Introduction
Atmospheric Single-Arm Robot
Specifications
User’s Manual
Brooks Automation
1-12
Revision 1
Specifications
The Brooks Automation Atmospheric Single-Arm Robot is a high reliability product.
The specifications for the product and its subsystems are detailed below.
Robot Specifications
Repeatability:
3 sigma repeatability at +/- 25 microns
Wafer Sizes:
75mm (3 in) to 300 mm (12 in)
Contamination:
Cleanroom Class 1
Site Requirements for Moving the Atmospheric Single-Arm Robot
The smallest robot weighs about 35 pounds (15.88 kg) and the largest robot weighs
about 85 pounds (38.56 kg).
To lift a robot or a robot mounted on a track or frame,
Brooks Automation recommends using the following lifting rings or a comparable
load-rated substitute:
•
Black Oxide coated Heat Treated Alloy steel ¼ -20 Hoist Ring made by Ameri-
can Drill Bushing Co. (P/N 23050). Four rings are required to lift a robot. Each
ring is load rated for 550 pounds.
•
304-Stainless Steel ¼ -20 Hoist Ring made by American Drill Bushing Co. (P/N
23050-SS). Four hoist rings are required to lift a robot. Each ring is load rated
for 275 pounds.
Either type ring can swivel 360 degrees and pivot 180 degrees. To attach the hoist
rings and lifting device, follow the instructions in Chapter 3: Installation.
CAUTION
All drawings within this manual are generic and may not reflect spe-
cific builds of the Atmospheric Single-Arm Robot. To obtain a com-
plete and current set of drawings and documents contact Brooks
Customer Support.
Environmental Specifications
Temperature:
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