Operation
Atmospheric Single-Arm Robot
Teaching a Robot Only
User’s Manual
Brooks Automation
6-6
Revision 1
Teaching a Robot Only
Use a Teach Pendant or EQT interface to teach the robot stations. General steps are
given here for teaching a robot-only system. For specific information on how to use
the Teach Pendant or the EQT interface for teaching, refer to the
Smart Controller Hard-
ware and Software User’s Manual
.
For the following example steps, there are two cassette stations, Station A and Station
B, and one stage position, Station C.
1.
Place the wafer on the end effector.
2.
Turn off the servo motor for the T and R axes.
3.
Manually adjust the robot arm to face the first slot in the cassette for station A.
Raise or lower the Z axis. Manually adjust the R axis until the wafer is inside
the first slot of the cassette.
4.
Gently lower the Z axis until the wafer is just touching the edges of the slot.
5.
Select Station A. Press Enter or Teach to save or teach Station A. For stroke and
offset parameters, you can use the defaults or try 75 and 50. These parameters
are saved in the coordinate file with the station location and can be adjusted
later.
6.
Teach Station B, using the method you used for Station A.
7.
To teach Station C, the stage position:
•
Place the wafer on the end effector.
•
Turn off the R and T servo motors.
•
Manually adjust the robot arm to the stage while raising or lowering the
Z axis.
•
Manually adjust the R axis until the wafer is above the stage. Lower the
Z axis until the wafer is just resting on the stage.
•
Save the position, stroke, and offset for Station C.
8.
Test the station coordinates by sending several GET and PUT instructions:
•
Manually place a wafer on Station C.
•
Get the wafer from Station C.
•
Put the wafer in slot 1 of Station A.
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