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Atmospheric Single-Arm Robot

User’s Manual

Brooks Automation

Revision 1

8-1

Command Reference

Firmware Revision 6.0

Overview

This chapter provides an overview of the embedded control software for the Brooks

Automation Atmospheric Single-Arm Robot. The control software provides a broad

range of command options, including a number of sophisticated, integrated com-

mand sequences. Communications between the Atmospheric Single-Arm Robot and

the host controller uses standard EtherNet communications for normal operation or

RS-232 communications for setup and test to access all product software commands.

The command reference in this manual reflects the version of the firmware indicated

above. Any previous version of firmware may not provide the full command set and

functionality as stated in this chapter.

Chapter Contents

Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-2
Commands and Macros for Robots. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-4

Coordinate File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-4

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Summary of Contents for ABM 100

Page 1: ...ized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos In stock Re...

Page 2: ...anual for the Atmospheric Top Mount ATM 100 200 300 400 500 the Atmospheric Bottom Mount ABM 100 200 400 500 and the Flat Panel Display FPD 400 500 700 Revision 1 Artisan Technology Group Quality Inst...

Page 3: ...WCR Smart Con troller TCM Time Optimal Trajectory TopCooler Ultrasort VacuTran VCD VCE WAVE WAVE II and Z Bot are trademarks of Brooks Automation All other trademarks are properties of their respecti...

Page 4: ...ion 1 8 About This Manual 1 10 Note Hazards andPictograms 1 11 Specifications 1 12 Robot Specifications 1 12 Site Requirements for Moving the Atmospheric Single Arm Robot 1 12 Environmental Specificat...

Page 5: ...iter Lab Label 2 12 Manufacturing Labels 2 12 SEMI S2 Systems 2 13 Safety Interlocks 2 14 Mechanical Hazards 2 15 Electrical Hazards 2 17 Lockout Tagout 2 17 Electrical Hazard Classifications 2 18 Las...

Page 6: ...Robot to the Frame 3 8 Leveling the Robot 3 8 Connecting the Robot and Controller 3 11 Overcurrent Protection 3 12 Facilities Connections 3 13 Communication Connections 3 14 Connecting the Teach Penda...

Page 7: ...ing and Homing a Robot Axis 6 3 Teaching Stations 6 4 Setting the Optional Z Axis Brake 6 5 Teaching a Robot Only 6 6 Teaching a Robot and Pre Aligner 6 7 Scanner Mapping 6 9 Teaching the Scanner Mapp...

Page 8: ...Flag 7 11 To Check and Adjust the Physical Position at the Index Position 7 13 To Set the Home Offset 7 14 Command Reference Description 8 2 Software Control 8 2 Macros 8 2 Coordinate File 8 3 Robot...

Page 9: ...8 Test 11 Vacuum Valve and Vacuum Sensor Test 9 29 Test 13 Scanning Test 9 30 Using the Teach Pendant to Run Diagnostics 9 31 STEP 1 NVSRAM Test 9 31 STEP 2 GALIL I O TEST 9 32 STEP 3 ENCODER READ TES...

Page 10: ...AM with RNCS Command 10 18 Checking Limit Switch Status with the RLS Command 10 19 Using the GLST Command 10 23 Problem Causes and Suggested Actions 10 25 Aftermath Analysis 10 29 Contact Brooks Autom...

Page 11: ...ts Atmospheric Single Arm Robot User s Manual Brooks Automation viii Revision 1 This Page Intentionally Left Blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisan...

Page 12: ...nclosure 2 6 2 2 Emergency Stop Circuit and Interconnect Diagram 2 8 2 3 Teach Pendants Models TTR 200 and TTR 100 2 27 3 1 Lift Points for the Robot 3 8 3 2 Leveling the Robot Arm 3 9 3 3 Robot Conne...

Page 13: ...3 Home Test and Set Dialog Box 9 27 9 14 Scaling Factor Test Dialog Box 9 28 9 15 Vacuum Valve Sensor Test Dialog Box 9 29 9 16 Scanning Test Dialog Box 9 30 9 17 Hojming the Z Axis 9 37 9 18 Center O...

Page 14: ...cros 8 4 9 1 Preventive Maintenance Schedule 9 3 9 2 Diagnostic Tests 9 16 9 3 Galil Commands 9 25 9 4 Keys Recognized During Diagnostic Mode 9 31 9 5 Robot Signal Cable Bits for Input Port G 9 33 10...

Page 15: ...eshooting Communication 10 25 10 14 Troubleshooting Axis Cannot Servo 10 25 10 15 Troubleshooting Axis Cannot HOME 10 26 10 16 Troubleshooting Robot Stops During Normal Operation 10 27 10 17 Troublesh...

Page 16: ...Revision 1 This manual was previously released as PRI Automation OEM Systems Atmospheric Single Arm Robot Manual part number 4000 0016 Revision B The following Technical Memos were added into the man...

Page 17: ...es Atmospheric Single Arm Robot User s Manual Brooks Automation xiv Revision 1 This Page Intentionally Left Blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisant...

Page 18: ...re explained Chapter Contents Atmospheric Single Arm Robot Overview 1 2 Robot Accessories 1 4 Robot Systems 1 5 User Interfaces 1 7 Configuration 1 8 About This Manual 1 10 Note Hazards andPictograms...

Page 19: ...ive pounds mov ing vertically about 7 in Larger robots have heavier bodies and move vertically from 10 in to 17 in The arm link length determines the reach arm links are available in lengths from 4 25...

Page 20: ...ctor can be used The Series 100 WETBOTs use a harmonic drive for the theta axis The speed and acceleration parameters for harmonic drives vary slightly from the speed and acceleration parameters for o...

Page 21: ...e removed or exchanged easily End Effectors The two standard end effectors are the horseshoe end effector and the blade end effector A dual end effector has two surfaces for lifting wafers The ends ar...

Page 22: ...Robot Systems The basic robotic system is comprised of an Smart Controller ESC and a robot Options include a pre aligner an optical scanner or mapper and a linear track A cassette tilter is an option...

Page 23: ...have three axes or only one axis A three axis pre aligner can rotate the wafer theta axis move the wafer along a straight line radial axis and raise or lower the wafer z axis A one axis pre aligner ca...

Page 24: ...ing a personal computer or a hand held Teach Pendant With a PC you have the advantage of a full screen for editing macros or parameter files and the convenience of transferring files between ESC and P...

Page 25: ...dicator and messages from the ESC Each Teach Pendant key is printed with a graphic representation of its function For information about the Teach Pendant refer to the Smart Controller Hardware and Sof...

Page 26: ...M ABM 50X FPD Robots Z Stroke 17 3 21 3 Arm Link 8 1 FPD 408 11 FPD 411 FPD 511 14 75 FPD 515 21 3 lead screw limited to 18 travel VAC Robot Z Stroke 1 4 Arm Link 7 6 VAC 407 9 625 9 8 VAC 409 Chain 9...

Page 27: ...ents The example instructions in this manual therefore cannot be specific to a particular system The intent of this manual is to document how the robot works It does not document every possible device...

Page 28: ...s additional or explanatory information A CAUTION indicates a potentially hazardous situation which if not avoided may result in minor or moderate injury It may also be used to alert against unsafe pr...

Page 29: ...s or a comparable load rated substitute Black Oxide coated Heat Treated Alloy steel 20 Hoist Ring made by Ameri can Drill Bushing Co P N 23050 Four rings are required to lift a robot Each ring is load...

Page 30: ...To safely install the robot use the weight and center of gravity as shown here Center of gravity is on the X Y and Z axes Weight tolerance is 5 and distance tolerance is 10 Table 1 2 Center of Gravit...

Page 31: ...es do not require these ratings if they are located on the load side of another overcurrent protection device with the proper AIC rating This overcurrent protection device must be mounted close to the...

Page 32: ...pment Four user sup plied 1 4 20UNC or M6 cap screws secure the robot to the base plate The plate should be at least 0 5 in 12 5 mm thick if made from aluminum and 0 38 in 9 6 mm thick if made from st...

Page 33: ...ospheric Single Arm Robot Specifications User s Manual Brooks Automation 1 16 Revision 1 This Page Intentionally Left Blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE ww...

Page 34: ...this manual is the cur rent revision call Brooks Automation Customer Support Chapter Contents Regulatory Compliance 2 2 Safety Considerations 2 3 Robot Safeguards 2 6 Emergency Stop EMS MOFF 2 7 EMC...

Page 35: ...t the nickelcoated robots are CE and SEMI S2 compliant but the black anod ized robots are not There are no ergonomic or human factor requirements for a robot The robot is intended to be integrated int...

Page 36: ...not properly installed or operated Persons operating the product should be properly trained Possible injury can result from the automatic operation of the product Know the location of the following Fi...

Page 37: ...their discretion The user shall determine if the product will be employed in an earthquake prone environment and rectify equipment installation accordingly CAUTION The product is not provided with an...

Page 38: ...urpose other than as a robot is not recommended and may cause damage to the product or the equipment it is connected to Some moving mechanisms have no obstruction sensors and can cause personal injury...

Page 39: ...rating personnel Brooks Automation requires that robotic systems are enclosed behind safety doors and interlocks In addition the safety train ing of personnel required by ANSI RIA R15 06 should be fol...

Page 40: ...ff the servo motors To recover from EMS MOFF inspect the system for any damage or interfering components pull out the STOP button start up the system turn on servo motors for all axes SVON To enable E...

Page 41: ...er Interlock Power EMS MOFF Monitor Pins Cut off J7 SCSI 68 I OBoard Interlock Power Motor Pin 6 return Pin 3 return Circuit Pin 24 24 5Vdc Pin 20 24 5 Vdc Pin 5 return Power Circuit Safety Interlock...

Page 42: ...close to the root as possible ESD EMI Precautions Protection against electrostatic discharge ESD is designed into the robot The robot can withstand ESD up to 15 kV which is higher than current EMC req...

Page 43: ...in the nullification of the manufacturer s equipment warranty Laser Warning Labels The laser scanner should not be serviced in the field Customers who remove the laser scanners from the robot should n...

Page 44: ...on the con troller The high voltage warning label is attached to the controller The pinch point label is attached to the top of the robot body Possible pinch points are located near any moving arm ext...

Page 45: ...ring label lists the power rating It is located adjacent to the power supply input on the controller The robot manufacturing label is located on the left front of the robot The Underwriter Lab label i...

Page 46: ...ection An enclosure barrier prevents people from reaching the restricted enve lope If access is required through the enclosure barrier into the restricted envelope it should be through an interlocked...

Page 47: ...le the interlock circuit activate pin 24 and pin 6 on the DB37 connector or pin 34 and pin 67 on the SCSI 68 connector wired normally closed To allow for multiple interlock switches all switches shoul...

Page 48: ...any other precautions specified within the facility where the product is being used Moving mechanisms have no obstruction sensors Do not operate the product without the protective covers in place or p...

Page 49: ...or when it is not attached to the user s process tool Trip hazard exists if the facilities connections power and communications cables gas and vacuum lines for the Atmospheric Single Arm Robot are not...

Page 50: ...without assistance from service personnel The robotic system is not intended to be a stand alone unit Brooks Automation rec ommends that the robot be installed only in a host system with lockout tagou...

Page 51: ...st have the following information Date of maintenance service action Names of the persons performing the service procedure Short description of the service maintenance action Signatures of the service...

Page 52: ...Equipment is energized Energized circuits are covered or insu lated Type 3 Equipment is energized Energized circuits are exposed and inad vertent contact with uninsulated energized parts is possible...

Page 53: ...posure to potential laser hazards Do not look directly at or into the laser beam no matter what class of laser follow any posted laser warnings or labels and do not attempt to service repair or remove...

Page 54: ...that Nitrogen gas be used for cleaning sections of the product assembly by blowing out any accumulated particles during routine maintenance procedures DANGER Exposure to Nitrogen gas may cause dizzine...

Page 55: ...used during servicing the product the standard precautions for use of that chemical must be observed These safeguards include sufficient ventila tion proper disposal of excess chemical and wipes and...

Page 56: ...l heat during operation However heating may occur in the robot or in one of the attached components Be aware of these areas during servicing of the robot WARNING Allow the system chamber and robot to...

Page 57: ...s Automation Atmospheric Single Arm Robot uses vacuum to hold the wafer on the end effector WARNING Whenever any vacuum pump exhaust is vented the facilities envi ronmental procedures must be followed...

Page 58: ...a flammable residue If they are being used during servicing of the product the proper precautions for use of those fluids must be observed WARNING Never use isopropyl alcohol to clean hot parts due to...

Page 59: ...Brooks Automation Atmospheric Single Arm Robot provides no direct noise haz ard Vibration The Brooks Automation Atmospheric Single Arm Robot provides no direct vibration hazard Any vibrations produced...

Page 60: ...For information on converting the TTR 200 DB15 connector to an RJ12 connector refer to Chapter 12 Drawings Using the EMERGENCY STOP When the user sees or suspects a hazardous motion the user presses...

Page 61: ...tion cir cuit and you lock out the host computer by selecting Teach mode and entering CTRL D or CTRL T before holding down the dead man switches the host computer cannot take control from the Teach Pe...

Page 62: ...ded with that equipment Table 2 3 Emergency Action Matrix Emergency Corrective Response Electric Shock Disconnect from power source Fire Use a non conductive fire extinguisher Class C Mechanical Pinch...

Page 63: ...terial safety information is provided as a guideline for proper con duct when working with hazardous materials and corrective action if exposed to them Brooks recommends that MSDS sheets for these mat...

Page 64: ...sparks or flames Vapors may travel to a source of ignition and flash back Container may explode in heat of fire Fire may produce irritating or poisonous gases Small fires may be put out with a CO2 or...

Page 65: ...ing Point Dropping Point C 260 Vapor Density N A Evaporation Rate Butyl Acetate 1 Slower Solubility in Water Negligible Appearance and Odor White paste slight odor Section IV Fire and Explosion Hazard...

Page 66: ...for Safe Handling and Use Steps to be Taken in Case Material Is Released or Spilled Sweeping and shoveling will recover bulk material Trace may be removed by repeated washing with a solvent disposed...

Page 67: ...nd Symptoms of Exposure Irritation as above Aggravated Medical Conditions Pre existing skin disorder may be aggravated by exposure to this product Other Health Effects This specific product has not be...

Page 68: ...d Strong Oxidizers Hazardous Decomposition Product Nox Sox Cox and other unidentified oxygenates can be formed during combustion Section 10 Employee Protection Respiratory Protection A NIOSH approved...

Page 69: ...ating of 1 Hazardous Products of Combustion Decomposition at high temperatures 200 C yields hydrogen fluoride carbonyl fluoride and other acid fluorides Extinguishing Media not a fire hazard Fire Figh...

Page 70: ...lity with other materials Active metals metal oxides at temperatures 280 C Lewis acid catalysts Strong or non aqueous alkali Hazardous Decomposition Products Decomposition at high temperatures 200 C y...

Page 71: ...rnational Regulations One or more of the materials contained in this product does not appear on the Canadian Domestic Substances List DSL Canada This product has been classified in accordance with the...

Page 72: ...ntation These installation procedures assure maximum earthquake protection It is your responsibility to ensure that the size and intended operation of the robot system does not interfere with any othe...

Page 73: ...bot To obtain a com plete and current set of drawings and documents contact Brooks Automation Customer Support Environmental The site for the Atmospheric Single Arm Robot must meet the minimum environ...

Page 74: ...for the main disconnect device between the Atmospheric Sin gle Arm Robot and the facilities power source ensuring it complies with the correct electric codes Service to the product should have the app...

Page 75: ...cking Instructions CAUTIONS Do not handle nickel plated robots with bare hands Use clean latex barrier gloves or similar gloves Fingerprints will stain finish unless removed immediately with Windex TM...

Page 76: ...cleanliness of the product only unbag it in a cleanroom environment Ergonomic Hazard The various Atmospheric Single Arm Robot models have different weights Failure to take the proper precautions befor...

Page 77: ...etic interference EMI protection Brooks Automation recommends that you place the controller as close to the robot as possible To minimize EMI route cables along the metal chassis Excess robot cables s...

Page 78: ...g To lift a robot or a robot mounted on a track or frame Brooks Automation recommends using the following lifting rings or a comparable load rated substitute Black Oxide coated Heat Treated Alloy stee...

Page 79: ...use standard mounting hardware to attach the robot to a host system frame If you purchased your frame from Brooks Automation all hardware mounting and leveling brackets are included If you provide you...

Page 80: ...it level 2 Level the robot using the set screws on the robot mounting baseplate 3 Disconnect AC power or turn off the robot servo motors by issuing the SVOF command 4 Loosen the bolts securing the rob...

Page 81: ...ket head cap screws on the end of the end effector Adjust the three set screws to level Tighten the four socket head cap screws 11 Level all other stations to make sure the end effector cassette platf...

Page 82: ...puts as well as Motor Off Stop and Reset inputs through a DB37 female connector The baud rate bits per second is 9600 The two signal cables connecting the robot and the controller are isolated from th...

Page 83: ...he signal cables are correctly connected If the red LED lights up power down and exchange the two signal cables 2 Confirm the AC power setting on the voltage selector setting Unless other wise request...

Page 84: ...2 for specifications DANGER All facilities being supplied to the product must be disconnected per the facilities lockout tagout procedures before servicing to prevent the risk of personal injury or d...

Page 85: ...S button Another way to intereact with the robot is through the EQT 32 interface on a personal computer Refer to the Smart Controller Hardware and Software User s Manual for details on using the EQT 3...

Page 86: ...lug on the grounding strap over the 4 40 screw hole Do not cut or shorten the grounding strap 3 Replace the 4 40 jack screw and star washer Tighten 4 Connect the Teach Pendant cable to the bottom RJ12...

Page 87: ...loppy drive 2 Open the Windows Control Panel dialog box 3 Open the Add Remove Programs dialog box and click on Install 4 Follow the instructions displayed on the window You will be prompted for the pr...

Page 88: ...and press Enter This homes all axes of the robot and optional components such as track or pre aligner When all axes are homed EQT displays a status message A status message or code of 1000 or 1008 in...

Page 89: ...into eight binary bits A result of all zeroes indicates a good condition If any 1s are returned refer to the bit descriptions for Port G to determine what the problem is Alternatively you can read a s...

Page 90: ...fying Vacuum Sensor Connections To test the connections plug in the power cord The LEDs on the face of the controller will light Green LED on indicates the 5 VDC power supply is functioning A yellow L...

Page 91: ...ight cause hazards do not exist If you have an SEMI S2 compliant Teach Pendant function test the EMERGENCY STOP and motion controls to ensure proper operation Repair any damage or mal function before...

Page 92: ...d user training courses that provide proper safety training to people responsible for the safe programming operation or maintenance of the robot Before issuing any macros that initiate automated robot...

Page 93: ...et a wafer for Station A and put it in a cassette named Sta tion B Station names can be any upper or lower case letter It is helpful to use a nam ing convention that suggests the function or location...

Page 94: ...2 Check to ensure that the Atmospheric Single Arm Robot has been properly configured as described in the previous sections of this chapter 3 Plug in the Atmospheric Single Arm Robot s power supply to...

Page 95: ...nment can interfere with proper product operation and may cause wafer breakage The user must perform a complete alignment as part of installing the product in a sys tem Additionally proper alignment s...

Page 96: ...or subsystems within the Brooks Automation Atmospheric Single Arm Robot Chapter Contents System Overview 4 2 Smart Controller 4 3 Wafer Pre Aligner 4 3 Linear Track 4 3 User Interfaces 4 4 Robot Acces...

Page 97: ...1 Atmospheric System Overview E q u ip e S m a rt C o n tro ller S ig n a l C a b les S w itch in g P o w er S u p p ly _ _ _ _ _ _ _ _ _ L in ea r P o w er S u p p ly A T B u s C P U B o a rd R o b...

Page 98: ...mart Controller Hardware and Software User s Manual Wafer Pre Aligner Wafer pre aligners use high resolution optical sensing 11 0 microns to align wafers of 3 in to 12 in 75 mm to 300 mm without mecha...

Page 99: ...a full screen for editing macros or parameter files and the convenience of transferring files between the Smart Con troller and PC The small size of the Teach Pendant allows you to walk around the rob...

Page 100: ...settes The Smart Controller sends information back to the host indicating the presence absence or cross slotting in each wafer position The macros use this infor mation to provide automatic transfer o...

Page 101: ...pheric Single Arm Robot Robot Accessories User s Manual Brooks Automation 4 6 Revision 1 This Page Intentionally Left Blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE ww...

Page 102: ...Automation Atmospheric Single Arm Robot These interfaces provide communica tions and power to the product from the controller Chapter Contents Interface Overview 5 2 Power Connections 5 4 Electrical C...

Page 103: ...cable for host com puter to controller communication The signal cable is connected to a DB25 pin male connector RS 232 serial port An optional third communication port can be used for connection to o...

Page 104: ...S u p p ly _ _ _ _ _ _ _ _ _ L in ea r P o w er S u p p ly A T B u s C P U B o a rd R o b o t G a lil B o a rd R o b o t I O B o a rd P re a lig n e r G a lil B o a rd C O M 1 C O M 2 P re a lig n e...

Page 105: ...must comply with HD 21 or HD 22 specifications High Voltage Barriers All areas with circuit voltages higher than 30VRMS have grounded conductive barri ers Only trained personnel can remove these barri...

Page 106: ...are recom mended to reduce the noise level and protect against electro magnetic interference EMI 1 Fold the excess length as shown in Figure 5 2 2 Tightly gather the loops of cable and tie with three...

Page 107: ...Atmospheric Single Arm Robot Interface Overview User s Manual Brooks Automation 5 6 Revision 1 This Page Intentionally Left Blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SO...

Page 108: ...both nor mal conditions and emergency conditions Chapter Contents Theory of Operation 6 2 Moving and Homing a Robot Axis 6 3 Teaching Stations 6 4 Setting the Optional Z Axis Brake 6 5 Teaching a Rob...

Page 109: ...sers of these systems general information on how the Brooks Automation Atmospheric Single Arm Robot operates It is not intended to be a complete reference for someone developing the associated softwar...

Page 110: ...board to create the next output signal You can home the robot axis with a standard homing macro HOM or with the HOME command During the robot homing sequence 1 The robot axis moves towards the home sw...

Page 111: ...the limit on Z travel above the taught position This distance is required for placing a wafer in a slot or removing a wafer without touching the side of the cassette Stroke sets the limit on Z travel...

Page 112: ...he controller engages the brake port automatically when the SVOF command is executed or disengages the brake when the SVON command is executed The brake is activated when the Z axis servo motor is tur...

Page 113: ...4 Gently lower the Z axis until the wafer is just touching the edges of the slot 5 Select Station A Press Enter or Teach to save or teach Station A For stroke and offset parameters you can use the de...

Page 114: ...different 1 Access Teach mode 2 Place the wafer on the chuck of the pre aligner 3 Turn on all servo motors 4 Align the wafer To align the wafer with the Teach Pendant press CTRL Y To align the wafer...

Page 115: ...tation B Press Enter or Teach to save the coordinates for Station B the cassette station 14 Set the stroke and offset for Station B Use the defaults For most wafer sizes the defaults are 75 and 50 Adj...

Page 116: ...e laser scanner 5 Offsets an equal and opposite distance from center on the T axis and moves Z distance down 6 Turns on the laser scanner 7 Makes the second scan pass 8 Turns off the laser and retract...

Page 117: ...For example if all slots are queried a string of digits is returned 100011111221111100011221 The first digit represents slot 1 and slot 1 has a wafer The second digit is slot 2 and slot 2 has no wafer...

Page 118: ...laser emitters just below the first wafer If the scanner head can touch the first wafer the Z axis Offset is 320 If the scanner head cannot touch the first wafer but can touch other wafers the Z axis...

Page 119: ...g the next available slot rather than slot 1 Make sure the Z axis Offset is set as instructed in the introduction to this pro cedure If the scanner head cannot touch any wafer position the scanner hea...

Page 120: ...cle If the sensor cannot touch the first wafer but can touch another wafer in a different slot calculate the offset using the following formula Z axis Offset 320 Sn 1 Pitch 10 Where Sn Slot number use...

Page 121: ...eration 2000 2000 2000 Encoder resolution 0 0 0 Reserved Not used 4300 3000 2000 Operational speed 10025 10012 14012 Operational acceleration 200 200 300 ER Error limit or following error 50000 30000...

Page 122: ...r acceleration send the command to set the new value in Terminal Mode Then save the new value in NVSRAM by sending the SAV command The commands for changing the robot parameters are summarized in the...

Page 123: ...teaching the Flipper ensure that it is offset from 0 degrees to about 90 degrees Accessing Galil Mode The flipper is controlled by the first Galil card To access Galil mode for the first Galil card f...

Page 124: ...meter File and make your RPW value the home offset for W Defining the Flip To find the number of steps required for the Flipper to complete a 180 flip and apply enough tension to the spring follow the...

Page 125: ...15 flipper values use item numbers 13 R position before a flip 14 number of flip pulses and 15 flipping position homed or inverted The following examples are for Station A 1 Using the results from you...

Page 126: ...3000 Testing the Flipper Test the flipper using the following macros Table 6 5 Macros to Test the Flipper Enter To IFLIP 0 Move the Flipper to the 0 degree position IFLIP 123 Move the Flipper to the...

Page 127: ...eric Single Arm Robot Flipper End Effector User s Manual Brooks Automation 6 20 Revision 1 This Page Intentionally Left Blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE...

Page 128: ...nment Strategy 7 2 Alignment Process 7 3 Leveling the Atmospheric Single Arm Robot 7 4 Adjusting the Vacuum Sensor 7 4 Flipper Setup 7 6 Setting up the Flipper 7 6 Tuning PID Motor Parameters 7 9 To t...

Page 129: ...mplete check if the product was involved in a wafer transfer error A complete check if the product was involved when an Emergency Machine Off EMO occurred A partial check whenever any component in the...

Page 130: ...tmo spheric Single Arm Robot exists These systems have no obstruction sensors and may cause personal injures To ensure accuracy and repeatability do NOT home the product or any of its sub systems duri...

Page 131: ...justing the Vacuum Sensor An SMC Series ZSE2 T1 15 vacuum sensor is installed in the lower arm link of the robot If you have two end effectors you have two vacuum sensors The functioning range of this...

Page 132: ...er to a position midway between position A and position B 8 Turn off the vacuum to the end effector using the EQT interface or with the command OUTP 0 1 9 If you have a dual end effector tune the seco...

Page 133: ...mber of steps you need to apply enough tension to the spring so that it is held in the level position against the mechanical stops Enter PR 100 Position Relative Move axis from current position this n...

Page 134: ...degree flippers except the required number of steps will obviously be smaller DP 0 Redefines the current position as 0 PR 5000 Position Relative Move Axis from the current posi tion this number of ste...

Page 135: ...ied If you wish the end effector to be in the 0 position you must set the Coordinate Special Item 15 for the station you are teaching to 0 If you wish the end effector to be in the Flip position while...

Page 136: ...mmand KI is the integrator function KI represented by the parameter KI It improves the sys tem accuracy With the KI parameter the motor does not stop until it reaches the exact desired position regard...

Page 137: ...Turn on and home the motor 9 Move the motor by the commands like MOVA R You might notice that the motor does not go to the exact position that you expect 10 Increase KI to somewhere in between 3 to 5...

Page 138: ...he R axis home sensor flag position has been moved from its correct posi tion due to mishandling of the unit or by mechnical failure Adjust the index and offset values any time they are out of specifi...

Page 139: ...TEP 4 LIMIT HOME TEST on page 9 35 This will help display the toggling of the radial home switch 8 Physically move the position of the Home Flag to a location were the home switch toggles 9 Tighten th...

Page 140: ...t of the index position NOTE For 100 200 and 300 series robots the proper index range is between 1000 and 3000 For 400 500 and FPD series robots the proper index range is between 2000 and 6000 3 Remov...

Page 141: ...elt Press Enter when done 9 Repeat STEP 8 HOME TEST SET on page 9 36 to verify proper index is achieved To Set the Home Offset 1 Open the diagnostics step STEP 8 HOME TEST SET on page 9 36 Select the...

Page 142: ...between the Atmospheric Single Arm Robot and the host controller uses standard EtherNet communications for normal operation or RS 232 communications for setup and test to access all product software...

Page 143: ...tion to determine the distance between slots in the cassette Software Control The Equipe Smart Controller ESC contains the firmware on EPROMs The macro coordinate parameter and optional pre aligner fi...

Page 144: ...on coordinates by saving the coordinates for that position or station in the Coordinate File cor stored in NVSRAM For more information on teaching refer to the chapter on Operating and Teaching Robot...

Page 145: ...s For position parameters list the value in mils Commands are case sensitive Coordinate File The coordinate file contains station coordinates and cassette slot information You can define up to 52 stat...

Page 146: ...T R and Z SOF A 50 Offset SST A 80 Stroke SRET A 5500 R axis retract position PITCH A 2500 Distance between cassette slots SPSC A 7344 12617 2831 Scanning coordinates SCSI A 0 50 Parameters for scanni...

Page 147: ...ric Single Arm Robot Commands and Macros for Robots User s Manual Brooks Automation 8 6 Revision 1 This Page Intentionally Left Blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88...

Page 148: ...ion of this chapter provides repair procedures for subsystem repair and replacement Chapter Contents Preventive Maintenance 9 2 Preventive Maintenance Schedule and Procedures 9 3 Cleaning 9 4 Robot Le...

Page 149: ...ron ment Any deviation from this basic environment will affect the scheduling of PM and may also require additional PM procedures be performed The user should adjust the Preventative Maintenance Sched...

Page 150: ...The following Preventive Maintenance Schedule is based on a certified clean dry environment The user should adjust the Preventative Maintenance Schedule to account for any deviations from this environ...

Page 151: ...may be contaminated by those materials Refer to the facility s Material Safety Data Sheets for those materials to determine proper handling WARNING Dispose of cleaning cloths per facilities procedures...

Page 152: ...d with DI water to remove any residues CAUTIONS Wipe must be moistened only squeezing the wipe should not cause any water to drip Do not allow water to come in contact with bearings seals etc 4 Once a...

Page 153: ...ease P N 10007 0360 LG2 grease P N 1007 0359 Castrol Braycote 803 P type grease P N 70033949 6mm 45 degree angle zerk fitting grease fitting Grease gun Clean room compatible rubber gloves Lint free cl...

Page 154: ...er 2 Insert the tip of the grease syringe into the grease port and push the grease into the bearing nut until the grease purges out through the nylon retainer on the bottom of the bearing nut 3 Re ins...

Page 155: ...er s Manual Brooks Automation 9 8 Revision 1 2 Locate the threaded hole in nut holder 3 Install zerk fitting on bottom of Bearing Nut Figure 9 1 Zerk Fittings Figure 9 2 Hole in Nut Holder Artisan Tec...

Page 156: ...r Castrol Braycote 803 P type You need to use Castrol Braycote 803 P type grease for ATM100 1001 0063 On the lead screw you shoud see You see no visible markings on leadscrew bearing nut The purge por...

Page 157: ...ease gun pump grease into Leadscrew bearing nut until grease purges out through the nylon retainer in the bottom of the bear ing nut fig 6 6 a 6 Remove the zerk fitting and clean excess grease off Lea...

Page 158: ...applicable 1 Remove the Phillips head screw from the center of the scanner head This screw is located directly in front of the Avoid Exposure label 2 Locate and remove the two Flat head Allen screws...

Page 159: ...he covers Place the screws and covers in a safe area To remove the vacuum hose 1 Locate and remove the two brackets in the outer arm link The screws are cap head screws Place brackets and screws in a...

Page 160: ...replace the screw holding the vacuum sensor in place 4 Replace the feed through covers and tighten all hardware 5 Check to make sure the vacuum hose does not rub or kink while exercising the motion of...

Page 161: ...Remove all Phillips head screws that attach the access cover to the large cover on the can of the robot 2 Place the cover and screws in a safe area To inspect the internal belts 1 Locate the belts on...

Page 162: ...the 3 Phillips head screws that fasten the cover to the outer arm link 2 Remove the screws and arm cover placing them in a safe place 3 Locate the 4 Phillips head screws that fasten the cover to the...

Page 163: ...22 Test the limit and home switches Before you move the axes make sure the robot signal cable is securely connected 5 Amplifier Board Setup Do not use Do not use Not available on EQT 32 6 Amplifier Mo...

Page 164: ...troller or when you are calibrating the robot after a repair or parts replacement In the Terminal mode window press the Diagnostics button The Diagnostic window displays the available tests Double cl...

Page 165: ...D or Not Open If all files and NVS Ram are OK click on the OK button to return to the Diagnostic main menu If a file status is BAD or Not Open download that file Return to the Terminal mode window and...

Page 166: ...s sage Port X BAD is displayed where X is the port designator If Port B Failed is dis played it is probable that the signal cable is loose Ensure that all cables are correctly connected The test retur...

Page 167: ...sponding bits must toggle including MOFF shown as EMO in the dialog and STOP bits If this test fails check wiring continuity If the wiring is OK replace the I O board Use the External outputs box to a...

Page 168: ...nd as it moves in a negative direction the number should count down The number should count smoothly one increment at a time If this test fails for an axis use a test motor to test the encoder input I...

Page 169: ...each of the motion stops Activating the negative limit switches triggers the Home switch for that axis Note that the R axis has one limit switch the negative limit or home switch If the Limit switches...

Page 170: ...d To test the continuous action of amplifier modules 1 In the Set torque limit box select the lowest torque limit 2 In the Servo box toggle the servo on 3 Manually move one axis at a time You should f...

Page 171: ...bration In the following graphic the robot Z axis is homed The homing procedure moves an axis to its home switch and then moves in the opposite direction to find the encoder index The encoder index is...

Page 172: ...to the limit switch for ABM 400 series with track robots First find the distance to the index using the following commands in GALIL mode It may not be necessary to do this in GALIL mode if you are se...

Page 173: ...not contain any teeth and it is situated between main idler pulley and the boggie roller pulley 4 Slide belt a couple of notches 5 Snap the belt back on the idler pulley 6 Tighten motor mounting brac...

Page 174: ...to have the R axis home flag activate at 5 0 in 127 mm from its Center Overlapping Position 5 0 in or 127 mm center to center press the Adjust R at home button Center Overlapping Position COP is the p...

Page 175: ...tor algorithm requires the precise Zero posi tion of the R axis to be at the COP The position of Theta is expressed in 0 01 Radial in 0 001 in and Z axis position in 0 001 in units Before executing th...

Page 176: ...ve on open the valve and put and remove an object on the end effector The vacuum sensor should indicate On and Off respectively If the sensor remains on or off when the object is moved the sensor is s...

Page 177: ...To verify the connection and functionality of the Laser Scanner press the Laser button to turn the laser on Place an object two inches in front of scanner Scan result should change accordingly DANGER...

Page 178: ...ed Use the or button to select the next or previous step When the desired step is dis played press HERE After each step press HERE or ENTER to advance to the next Step STEP 1 NVSRAM Test NVSRAM Test f...

Page 179: ...NVSRAM STEP 2 GALIL I O TEST Galil Board Test To test the Galil board the diagnostics software attempts to communicate with the Galil board A message indicates whether Galil passed or Galil failed If...

Page 180: ...ctions or robot sig nal cable Check I O to Galil cable I O to amplifier board and the signal cable If all cables are OK replace the I O board If a problem persists replace the robot interface board 1...

Page 181: ...reads On the numerical keypad use 0 through 7 to toggle the outputs If this test fails contact Brooks Automation Customer Support 5 Robot Interface Board Power Supply indica tor Usually accompa nied b...

Page 182: ...ally replace the motor STEP 4 LIMIT HOME TEST Before you move the axes to activate the switch indicators make sure the robot signal cable is securely connected In the display the symbols H and indicat...

Page 183: ...d 2 Manually move one axis at a time You should feel the motor apply a counter directional force smoothly and continuously without jerking Repeat Step 2 for another axis At higher torque settings be c...

Page 184: ...o home Use the toggle buttons to select the axis 3 The axis homes stopping at the home switch and then at the index mark The Distance to Index is displayed in encoder counts One revolution is 4 times...

Page 185: ...ample you might want the R axis retracted the maximum of 5 0 in 127 mm from its center 5 0 in center to center when performing the first home motion and a maximum of 0 5 inch forward for the second mo...

Page 186: ...inks to a position 5 0 in 127 mm behind the COP Tighten the screws Press Enter when you are finished or ESC to start over To adjust the physical position at the Index 1 You are prompted to adjust R at...

Page 187: ...To set the Home offset 1 The robot homes to its Radial axis and then moves to its COP 2 You are prompted to determine if the offset is correct If the upper link is in the correct COP press Y Yes and...

Page 188: ...vement that is the displacement of the axis not the absolute position Compare the result with the reading on the Teach Pendant STEP 11 VAC VALVE SENSOR Step 11 tests the vacuum valve s and vacuum sens...

Page 189: ...ing To verify the connection and functionality of the Laser Scanner turn on the laser by pressing the number 2 key which corresponds to the laser The OUT line displays the status for Output port A bit...

Page 190: ...hoot 10 10 Common Problems 10 11 Frequently Asked Questions 10 12 What do I do if I get a new robot 10 12 What do I do if I get a new controller 10 12 Checking Robot Status 10 14 Using the STAT STAT2...

Page 191: ...o access the controller information on the functioning of various components use the EQT Information Request or send various information commands Use the STAT command to check general controller statu...

Page 192: ...t Up Procedure Table 10 1 Stat for Robot Will Not Start Up Flow Chart BIT Definition When set to 1 Cleared by 0 Previous command not executed Any 1 Previous command invalid Any 2 Vacuum Sensor is acti...

Page 193: ...Amplifier Interconnection and Signal Cable Closed Loop 1 EMO 2 Stop Signal 3 Amplifier Board Under Power Low if OK 4 Motor Power Supply indicator Low if on 5 Robot Interface Power Supply indicator Lo...

Page 194: ...e r v o s o n G o t o R o b o t w i l l n o t s e r v o o n n e x t p a g e H o m e R o b o t a c c o r d i n g t o y o u r m a c r o s e t i e H O M E A D i d t h e R o b o t H o m e G o t o R o b o...

Page 195: ...s e rv o o n tro u b le s h o o tin g P e rfo rm D ia g n o s tic s s te p 3 E n c o d e r R e a d te s t D Id ro b o t p a s s te s t R e p la c e L im it S w itc h th a t fa ile d M a c ro p ro b le...

Page 196: ...gnment ALIGN 8 Running Macro 9 One or more axes are moving 10 Servo off on one or more axes SVON 11 Error on COM2 AST 2 12 Not used always 1 13 NV SRAM error RNCS 14 Controller error Any 15 Error on C...

Page 197: ...ll E q u ip e T e c h n o lo g ie s T e c h n ic a l S u p p o rt a t 1 8 8 8 7 7 5 7 7 0 0 D o n e C h e c k R o b o t P o w e r C a b le C o n n e c tio n S e r v o s till n o t o n e n te r S V O N...

Page 198: ...um Sensor is activated 3 Vacuum Switch is on 4 Motor error on one or more axes SVON 5 One or more limit switches triggered RLS 6 One or more axes are not homed yet HOME A 7 Error on last alignment ALI...

Page 199: ...follow the instructions you might be asked to perform one or more Diagnostic steps Instructions for using the Teach Pendant and EQT 32 to perform diagnostics are given in chapter 9 General instruction...

Page 200: ...is not moving check the following Is the power on If not connect it Are the servo motors turned on If not use the SVON command Is the robot homed If not use your homing macro or HOME command Is the si...

Page 201: ...he correct parameter file is resident on NVSRAM If the serial numbers are different use a text editor such as Notepad to verify that the parameter file on the diskette delivered with the robot is the...

Page 202: ...eed and acceleration to all axes enter one or more RSA com mand with the applicable axis parameter A a t w W 5 To save the coordinates and parameters to NVSRAM enter the command SAV 6 Download the mac...

Page 203: ...ion Request and press the Run button Nine commands are executed and the results are displayed as text messages Problems are highlighted with a red box Table 10 6 Commands to Check Connections Command...

Page 204: ...errors indicated in Bit 14 of the STAT response STAT2 is available in systems with a SEMI S2 compliant robot with speed interlock mapping If you use STAT2 the response is given in two 16 bit words th...

Page 205: ...all Setting Bit 4 to 1 sets Bit 10 to 1 Clear the obstacle send the SVON command and con tinue If ER is too small usually about 100 200 change the setup and increase 5 One or more limit switches are t...

Page 206: ...rmine the reason for the error and the recovery for NVSRAM problems enter the RNCS command in the terminal mode and evaluate the response See Checking NVSRAM with RNCS Command on page 92 14 Controller...

Page 207: ...ost current files 1 Upload a copy of the parameter files of each robot when you receive them 2 Upload all macros to the host computer 3 After teaching all stations upload the coordinate files to your...

Page 208: ...ernal interface board switch input will read as active Limit switch problems can be caused by software mechanical position setup or hard ware To determine if limit switch hardware is functional perfor...

Page 209: ...r Pre aligner negative z Track negative w 8 Pre aligner negative t Pre aligner negative r Pre aligner negative z Track negative w 8 16 17 18 19 Robot positive T triggered Robot positive R triggered Ro...

Page 210: ...o the limit This can occur even during teaching if the position taught was beyond the limit This 28 29 30 31 Pre aligner negative t triggered Pre aligner negative r triggered Pre aligner negative z tr...

Page 211: ...switch area To resolve these problems 1 Change the taught position This might require physically moving the station to a position farther away from the limit 2 If the problem occurs at the first or la...

Page 212: ...an error Card 1 write data error Card 1 debug mode active Integrator output exceeds torque limit Always 0 Always 0 Always 0 8 9 10 11 Position error on T axis Position error on R axis Position error o...

Page 213: ...f Track w axis servo off 8 t axis servo off r axis servo off z axis servo off Track w axis servo off 8 Table 10 12 GLST Command Response for Firmware Earlier that 6 0 Bit Meaning when bit is set to 1...

Page 214: ...board Replace them securely Bad CPU board Replace CPU board LEDs on amplifier board not lit Bad EPROMs or EPROMs improp erly installed Order new EPROMs and place them properly Sockets are 32 pin JEDEC...

Page 215: ...ns servo Intermittent false positive signal generated by home switch Bit 5 Send RLS to determine which axis Replace limit switch assembly Axis moves but stops at random position and loses servo Servo...

Page 216: ...s when it comes in contact with an object such as a wafer Excessive electro static discharge or EMI to robot Bit 14 Re route each grounding and proper shield ing Robot hits the object Bits 4 and 10 Re...

Page 217: ...vement Symptom Possible Cause Code Corrective Action Robot performs normally but an axis jumps unpre dictably to its hard stop negative or positive Bad Encoder Perform Encoder test Diagnostics Step 3...

Page 218: ...e send the commands listed in the first column and record the responses in the second column Do not reset the controller power off or send any commands other than those listed Send the commands in the...

Page 219: ...______ RCP A ________ ________ _______ RNCS ________ RGN A ________ ________ _______ RZR A ________ ________ _______ RKI A ________ ________ _______ RFA A ________ ________ _______ RTL A ________ ____...

Page 220: ...ation of the product 3 Provide the name of the person to contact e mail address and telephone num ber 4 List any error codes received during the failure 5 Prepare a detailed description of the events...

Page 221: ...Atmospheric Single Arm Robot Contact Brooks Automation Technical Support User s Manual Brooks Automation 10 32 Revision 1 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www...

Page 222: ...user with a single location for specific information related to the Brooks Automation Atmospheric Single Arm Robot Contents Appendix A Factory Default Settings 11 2 Appendix B Approved Laser Scanners...

Page 223: ...ontrol transmit serial line TX is discon nected from the robot controller serial receive line RX disabling all other control consoles Interlock current path is routed from 24V through J6 pin 1 DB15 pi...

Page 224: ...2 x 2 4 1 3 1 8 DD50 AIGaAs 800 2 x 2 4 1 7 2 2 DD50P AIGaAs 800 2 x 2 4 1 7 2 2 WX40PI AIGaAs 800 2 x 2 4 0 6 1 2 WX43PI AIGaAs 800 2 x 0 2 0 05 0 1 Model Pulse characteristics Beam divergence Durat...

Page 225: ...R Remote Gain P Positive Enable DD 51 Reflective Photoelectric Laser Dual Beam Type Two Receiver Focal Point 1 8 Laser 670nm 2 x 2 4mW Class IIIa S High Sensitivity D Delay R Remote Gain P Positive En...

Page 226: ...he sensor detects an object In Dark On mode the OUT signal is trig gered when there is no object detected Switch 3 Remote Off On In Remote Off the laser will emit radiation when ever VCC and GND are c...

Page 227: ...ngle Arm Robot Appendix B Approved Laser Scanners User s Manual Brooks Automation 11 6 Revision 1 This Page Intentionally Left Blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88...

Page 228: ...ll drawings and other related documents provided with this manual are generic and may not reflect specific builds of the product CAUTION This manual and the documents supplied with it are not controll...

Page 229: ...ble 1 2 3 4 5 1 2 3 1 2 6 Cut to enable loop VCC JP3 JP4 Close customer loop if Interlock is OK DB37 Cut to enable loop VCC JP3 JP4 1 2 1 2 8 7 3 Return Return Return 10 mA Current Sink Customer Suppl...

Page 230: ...d Emergency Stop Button Emergency Stop Safety Interlocks Host Control Lockout Terminal Cable TTR 200 Teach Pendant Interlock Closed Monitor J6 CON 2 Pin 1 2 J5 CON 2 Pin 1 2 J8 DB37M 1 9 3 7 1 8 3 6 1...

Page 231: ...Atmospheric Single Arm Robot User s Manual Brooks Automation 12 4 Revision 1 Figure 12 3 TTR 200 Teach Pendant DB68 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artis...

Page 232: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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