ASP sterrad NX, Service & Troubleshooting Manual

Page: 37 / 126

Functional Description
3
Process Variables and Cancellation
Limits
The following table lists the control parameters and cancellation limits
for the Standard and Advanced cycles.
Variable Standard Cycle Advanced Cycle
Cycle time 28 minutes 38 minutes
Chamber wall temperature 50º C 50º C
Pressure at delivery to vaporizer Atmospheric pressure Atmospheric pressure
Chamber pressure before transfer to
chamber. ≤ 300 mtorr ≤ 300 mtorr
Transfer time 3 minutes 7 minutes
Diffusion time 0.5 min 0.5 min
Plasma time 4 min 4 min
Chamber pressure 800 mtorr 800 mtorr
Plasma power 500 Watts 500 Watts
STERRAD
®
NX
™
Service Guide 37