PREFACE
P
ROCESS
M
ANUAL
V
Preface
This set of manuals explains how to operate and maintain a Horizontal Diffusion/LPCVD
furnace.
Refer to the Touchscreen reference manual (M440.00) or the TSC-2 reference manual
(M450.00) for a full description of all operating screens.
For information about maintenance, refer to the maintenance manual (M230.00).
The Tempress Horizontal Diffusion Furnaces are fully described in the reference manuals
(M300.00).
Tempress documentation set
The complete Tempress documentation set includes:
•
Safety manual
•
Operator manual
•
Reference manuals
1. Loadstation
2. Furnace
3. Gas cabinet
4. Main Power cabinet
5. DPC (Digital Process Controller)
6. DTC (Digital Temperature Controller)
7. ETC (Excess Temperature Controller)
8. Touchscreen
9. TSC-2 (+ SECS/GEM)
•
Vendor documentation
1. Digital pressure switch
2. Mass Flow Controllers
3. External torch controller (if used)
