SAFETY
P
ROCESS
M
ANUAL
2.Safety
This section contains a brief description of the safety features of a Tempress Horizontal
Diffusion System for the process engineer.
Process engineers must have a general knowledge of the technology involved in diffusion
systems. They should understand safety practices outlined in this manual. Process engineers
must have additional knowledge about chemistry and chemicals used in the customer specific
process applications.
The descriptions contained in this user manual are general in nature. The actual furnace may
differ in minor detail from the furnace described in this manual, because of customer specific
requirements or modifications. Please refer to the Tempress Safety manual (M110.00) for a
complete description of available safety features.
2.1 Emergency
Off
(EMO)
Emergency Off (EMO) buttons are located around the system at accessible locations
according to EN 60204-1 especially EN 418. Pressing an EMO button turns off all power to
the system except to the fans on top of the furnace. This prevents fire hazard as a result of
high heat concentration in the furnace cabinet. Also those parts that are connected to a UPS
facility remain operational.
Press the EMO button when a person is in danger, when there is a fire, a water leak
or any other event that could be hazardous to life.
2.2 Alarm
Signals
Alarms and alerts generated by tube controls are presented in several ways:
•
Buzzer / LED
•
Touch screen
•
Light tower
•
TSC-II
2.2.1
Buzzer / LED
Visible and audible alarm signals are generated by the process controller (DPC) and the
temperature controller (DTC). The visible signals will be presented with a LED, located
below the buzzer position as shown in Figure 1-1. Each process is represented by one LED
and buzzer combination.
2.2.2
Touchscreen
The visible alarms will be presented on the
touchscreen bottom line. Alarms on the
Touchscreen are always in combination with an
audible signal.
2-2
Touching the screen deactivates the audible signal.