PROCESS DESCRIPTION
P
ROCESS
M
ANUAL
4.3-7
74
Alarm limit setting for Gas O2 [2] at 10 % ( ± 50 SCCM) Variable Command: No
75
Branch on gas/pressure O2 [2] to step O2 PURGE. Sonalert alarm Yes
76
13 DEPOSITION
77
Message DEPOSITION [13]. Sonalert alarm No
78
Time: [000:30:00] (hr:min:sec) Variable Command: Yes
79
Gas [SIH4 [3]] at [50.0] [SCCM] Variable Command: Yes
80
Alarm limit setting for Gas SIH4 [3] at 10 % ( ± 10.0 SCCM) Variable Command:
No
81
Alarm limit setting for Gas PRESSURE [8] at 5 % ( ± 100 MTOR) Variable
Command: No
82
Branch on gas/pressure O2 [2] to step O2 PURGE. Sonalert alarm Yes
83
Branch on gas/pressure SIH4 [3] to step O2 PURGE. Sonalert alarm Yes
84
Branch on gas/pressure PRESSURE [8] to step O2 PURGE. Sonalert alarm Yes
85
14 O2 PURGE
86
Message PURGE [12]. Sonalert alarm No
87
Time: 000:02:00 (hr:min:sec) Variable Command: No
88
Gas N2 [1] at 0.00 [SLM] Variable Command: No
89
Gas SIH4 [3] at 0.0 [SCCM] Variable Command: No
90
Gas PRESSURE [8] at 0 [MTOR] Variable Command: No
91
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = ON
Variable Command: No
92
Alarm limit setting for Gas SIH4 [3] at 0 % ( ± 0.0 SCCM) Variable Command: No
93
Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0 MTOR) Variable Command:
No
94
15 EVACUATE
95
Message EVACUATE 3 [10]. Sonalert alarm No
96
Time: 000:05:00 (hr:min:sec) Variable Command: No
97
Gas O2 [2] at 0 [SCCM] Variable Command: No
98
Alarm limit setting for Gas O2 [2] at 0 % ( ± 0 SCCM) Variable Command: No
99
16 PURGE
100
Message PURGE [12]. Sonalert alarm No
101
Time: 000:05:00 (hr:min:sec) Variable Command: No
102
Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = ON
Variable Command: No
103
17 EVACUATE
104
Message EVACUATE 3 [10]. Sonalert alarm No
105
Time: 000:05:00 (hr:min:sec) Variable Command: No
106
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = ON,MAINVAC[16] = ON
Variable Command: No
107
18 READY
108
Message STANDBY [1]. Sonalert alarm No
109
Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIH4[12] = OFF,,,SOFTSTRT[15] = OFF,MAINVAC[16] = ON
Variable Command: No
110
Wait for operator
111
19 BACKFILL 1
112
Message BACKFILL [14]. Sonalert alarm No
113
Time: 000:01:00 (hr:min:sec) Variable Command: No
114
Boat to 2000.0 mm at 300.0 mm/min with oscillation speed of 0.0 mm/min.
Variable Command: No
115
Gas N2 [1] at 0.00 [SLM] Variable Command: No
