PROCESS SETUP AND ACCEPTANCE
P
ROCESS
M
ANUAL
3.4-3
- Thickness and refractive index measurements should be done with a Plasmos automated
ellipsometer or comparable equipment.
- Sheet resistivity should be measured with an automated 4-point probe or comparable machine.
- Dopant concentration measurement should be supplied by the customer. Dopant variation will
be characterised in absolute percentages and measured with SIMS or a comparable technique.
- Particle measurements should be done with a Tencor Surfscan 6420 or comparable equipment.
