PROCESS DESCRIPTION
P
ROCESS
M
ANUAL
4.1-5
4.1.7
Recipe example: LPCVD siliconnitride from SiH
2
Cl
2
and NH
3
1
00 START RECIPE
2
Message LOAD/UNLOAD [4]. Sonalert alarm No
3
Normal recipe 00 Zone1 800.0 °C Slope 10.00 °C/min Zone2 800.0 °C Slope 10.00
°C/min Zone3 800.0 °C Slope 10.00 °C/min , profile table A
4
Boat to 2000.0 mm at 300.0 mm/min with oscillation speed of 0.0 mm/min.
Variable Command: No
5
Gas N2 [1] at 0.00 [SLM] Variable Command: No
6
Gas DCS 1 [2] at 0.0 [SCCM] Variable Command: No
7
Gas DCS 2 [3] at 0.0 [SCCM] Variable Command: No
8
Gas NH3 [4] at 0 [SCCM] Variable Command: No
9
Gas PRESSURE [8] at 0 [MTOR] Variable Command: No
10
Digital out ,,,,,,,WATERVLV[8] = ON Variable Command: No
11
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = OFF,PROCESS[11] =
OFF,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
12
Alarm Limit Setting for All Analog Output Channel at 0 %
13
Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,doorclsd[3] =
OFF,VACFAIL[4] = OFF,WATRCOOL[5] = OFF,,TEMP SCR[7] =
ON,EXCESS[8] = ON
14
Alarm on digital in FANCONTR[9] = ON,,,OPERATE[12] = ON,WARNING[13]
= ON,FAILURE[14] = ON,,
15
01 BOAT OUT
16
Message BOAT OUT [3]. Sonalert alarm No
17
Time: 000:10:00 (hr:min:sec) Variable Command: No
18
Boat to 10.0 mm at 300.0 mm/min with oscillation speed of 0.0 mm/min. Variable
Command: No
19
Gas N2 [1] at 10.00 [SLM] Variable Command: No
20
Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
OFF,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
21
Wait for boat to reach setpoint
22
02 LOAD WAFERS
23
Message LOADWAFERS [5]. Sonalert alarm Yes
24
Wait for operator
25
03 BOAT IN
26
Message BOAT IN [2]. Sonalert alarm No
27
Time: 000:10:00 (hr:min:sec) Variable Command: No
28
Boat to 2000.0 mm at 300.0 mm/min with oscillation speed of 0.0 mm/min.
Variable Command: No
29
Wait for boat to reach setpoint
30
Wait on digital in PRESS N2[1] = OFF,PRESSAIR[2] = OFF,doorclsd[3] =
ON,VACFAIL[4] = OFF,WATRCOOL[5] = OFF,,TEMP SCR[7] =
OFF,EXCESS[8] = OFF
31
04 EVAC 1
32
Message EVACUATE 1 [8]. Sonalert alarm No
33
Time: 000:01:00 (hr:min:sec) Variable Command: No
34
Gas N2 [1] at 0.00 [SLM] Variable Command: No
35
Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
OFF,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = OFF Variable Command: No
36
05 EVAC 2
