OPERATION INSTRUCTIONS
P
ROCESS
M
ANUAL
5.3.2
TSC-2
1) select the desired tube from the
pull-down menu or from the
‘Overview’ screen.
2) select ‘Operations’ to access the
operations screen.
3) Select the desired process recipe
from the pull-down menu
4) Press ‘Yes’ to confirm the
question ‘Are you sure to select
another process recipe?’
Note
:
selecting another process
recipe is only possible if the
current process recipe is in Step 0.
5.3-3
