PROCESS DESCRIPTION
P
ROCESS
M
ANUAL
4.2-6
37
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
OFF,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
38
Wait on digital in PRESS N2[1] = OFF,PRESSAIR[2] = OFF,doorclsd[3] =
OFF,VACFAIL[4] = ON,,,TEMP SCR[7] = OFF,EXCESS[8] = OFF
39
Branch on wait alarm to step BACKFILL 1. Sonalert alarm Yes
40
06 EVAC 3
41
Message EVACUATE 3 [10]. Sonalert alarm No
42
Time: 000:05:00 (hr:min:sec) Variable Command: No
43
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
44
Abort recipe 01
45
07 PURGE
46
Message PURGE [12]. Sonalert alarm No
47
Time: 000:05:00 (hr:min:sec) Variable Command: No
48
Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
49
Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0.0 ) Variable Command: No
50
08 EVACUATE
51
Message EVACUATE 3 [10]. Sonalert alarm No
52
Time: 000:05:00 (hr:min:sec) Variable Command: No
53
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
54
09 LEAKCHECK
55
Message LEAKCHECK [11]. Sonalert alarm No
56
Time: 000:02:00 (hr:min:sec) Variable Command: No
57
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
58
Alarm limit setting for Gas PRESSURE [8] at 2 % ( ± 0.0 ) Variable Command: No
59
Branch on gas/pressure PRESSURE [8] to step PURGE. Sonalert alarm Yes
60
10 EVACUATE
61
Message EVACUATE 3 [10]. Sonalert alarm No
62
Time: 000:00:30 (hr:min:sec) Variable Command: No
63
Normal recipe 01 Zone1 610.0 °C Slope 0.00 °C/min Zone2 610.0 °C Slope 0.00
°C/min Zone3 610.0 °C Slope 0.00 °C/min , profile table A
64
Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
65
Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0.0 ) Variable Command: No
66
11 SET GASFLOWS
67
Message PURGE [12]. Sonalert alarm No
68
Time: 000:01:00 (hr:min:sec) Variable Command: No
69
Gas [SIH4DOOR [2]] at [60.0] [sccm] Variable Command: Yes
70
Gas [SIH4REAR [3]] at [60.0] [sccm] Variable Command: Yes
71
12 SET PRESSURE
72
Message PURGE [12]. Sonalert alarm No
73
Time: 000:02:00 (hr:min:sec) Variable Command: No
74
Gas [PRESSURE [8]] at [250.0] [mtor] Variable Command: Yes
75
Alarm limit setting for Gas SIH4DOOR [2] at 10 % ( ± 30.0 ) Variable Command:
No
