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Dycor Dymaxion Mass Spectrometer

User Manual

90381VE Rev.

Process Instruments

150 Freeport Road

Pittsburgh, PA 15238

Summary of Contents for Dycor Dymaxion Mass Spectrometer

Page 1: ...Dycor Dymaxion Mass Spectrometer User Manual 90381VE Rev Y Process Instruments 150 Freeport Road Pittsburgh PA 15238...

Page 2: ...455 Corporate Boulevard Newark Delaware 19702 USA Phone 302 456 4400 Main 800 537 6044 Service 800 222 6789 Ordering Fax 302 456 4444 USA Texas AMETEK Process Instruments 4903 W Sam Houston Pkwy Nort...

Page 3: ...2 Specifications CHAPTER 3 Installation Mechanical Installation 3 2 Check Sensor Filament 3 2 Connect Sensor to the Vacuum System 3 3 Open Source and AMETEK Vacuum Chamber 3 3 Open Source and Customer...

Page 4: ...ment required to replace a filament 6 2 Removing the Dymaxion electronics 6 3 Removing the old filament 6 3 Installing the new filament 6 3 Closed Source 6 4 Equipment required to replace a filament 6...

Page 5: ...A 2 Analog Output Jumper Configurations A 3 Digital Output Jumper Configurations A 4 Analog Input Jumper Configurations A 5 Installing the I O Option Board A 7 Configuring System 2000 Software A 8 En...

Page 6: ...ly a qualified electrician should make electrical connections and ground checks Any use of the equipment in a manner not specified by the manufacturer may impair the safety protection originally provi...

Page 7: ...ent and to conserve our natural resources AMETEK recommends that you arrange to recycle this product when it reaches its end of life Waste Electrical and Electronic Equipment WEEE should never be disp...

Page 8: ...capacitor is a technique allow ing high frequency shield bonding while avoiding the AC ground metal connection In the case of shield ed cables the drain wire or braid connection must be kept short A t...

Page 9: ...SPR 11 Radiated and Conducted Class A Group 2 ISM Device EN61000 3 2 Harmonic Current EN61000 3 3 Voltage Fluctuation Flicker EN61326 1 EN50082 1 Immunity EN61000 4 2 Electrostatic Discharge 4kV 8kV c...

Page 10: ...ould appear on the documentation accompanying the equipment being returned declaring that the goods being returned for repair are American goods the name of the firm who purchased the goods and the sh...

Page 11: ...eter in 100 200 or 300 AMU range Faraday cup detector or microchannel plate electron multiplier detector Options for Dymaxion System Optional integrated System 2000 Software that provides systems int...

Page 12: ...of these systems are configured to bring the required number of sample streams into the Dymaxion at the specified pressure while maintaining the high vacuum neces sary for proper mass spectrometry op...

Page 13: ...old the molecule together When a single electron is removed a positive ion is cre ated this is referred to as a molecular ion When the bombarding electrons cause the molecular bonds to break fragment...

Page 14: ...otion through the quadrupole an ion passes through the quadrupole where it is neutralized on the walls of the vacuum housing Ions meeting the m z criteria have stable trajecto ries and emerge from the...

Page 15: ...con sists of an array of millions of small glass capillaries fused together in the shape of a disk The inside wall of each channel has a resistive electrically semi con ductive layer forming independe...

Page 16: ...ultiplier Enclosed 100 200 300 Faraday Multiplier Communications You can use either the RS 232 or RS 485 serial port as the interface to the Dy maxion RS 232 Standard serial communication connection R...

Page 17: ...has stopped Flashing Red Battery backed RAM has been cleared Check battery Green Normal operation COMM Shows the status of communications between the Dymaxion and the PC Green Receiving data from the...

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Page 19: ...nitrogen at mass 28 with peak width 0 5 at 10 height and 1 x 10 3 amps emission current Power Requirements 24 volts DC 3 amps 100 240 VAC 50 60 Hz adapter available Stability Mass stability 0 1 AMU af...

Page 20: ...de 2000 meters Relative Humidity 10 to 90 non condensing Bake Out Temperature 375 C without electronics attached 80 C with attached electronics Operating the instrument at temperatures above 80 C with...

Page 21: ...r of channels Resolution Input Range Isolation Voltage input range Minimum undervoltage Maximum overvoltage 2 12 bits 4096 steps 0 10 VDC Single Ended 0 10 VDC 15V 15V Analog Outputs Number of channel...

Page 22: ...2 4 Dycor Dymaxion Mass Spectrometer...

Page 23: ...hanical installation Communications setup LEDs Dymaxion Electronics and Sensor Before connecting the 24 VDC power to the electronics ensure that the electronics are connected to the sensor Otherwise d...

Page 24: ...ics ensure that the electronics are connected to the sensor Otherwise damage to the electronics is possible Always remove 24 VDC power from the Dymaxion electronics before removing the electronics fro...

Page 25: ...a good seal 4 Install the appropriate inlet components to the source end of the vac uum chamber if they are not already installed These consist of a thick VCR flange a blank flange a manual high cond...

Page 26: ...Bolt the source flange into place using the 6 28 x 1 1 2 screws and washers provided Tighten in a star pattern to ensure a good seal Figure 3 3 Connecting the open source to the customer s vacuum cha...

Page 27: ...ber if they are not already installed These consist of a 1 thick VCR flange a blank flange a manual high conductance valve or electro pneumatic EP high conductance valve two copper gaskets and fastene...

Page 28: ...assembly Insert the electronics onto the source until firmly seated do not twist Lock the electronics unit to the source using the tightening knobs Fig ure 3 5 on the side of the Dymaxion until it is...

Page 29: ...xion 2 Align the key and push in the connector 3 Push the outer ring over the connector and rotate clockwise until the ring locks in place Figure 3 6 The Dycor DC power supply model accepts either 110...

Page 30: ...on one end of the cable and a DB 9 female connector on the other end of the cable Connect the male connector end of the cable to the RS 232 port on the Dymaxion See Figure 3 7 Connect the female conn...

Page 31: ...3 amps 1 volt RS 485 Cable 24 VDC 3 3 amps 1 volt RS 485 Cable Network Termination 24 VDC 3 3 amps 1 volt PC Figure 3 7 Communication ports and LEDs Figure 3 8 Networking multiple Dymaxions ON ON ON...

Page 32: ...Transmit Receive PC DB 9M Pin 3 Ground optional Pin 4 Transmit Receive Pin 5 Transmit Receive 4 Wire Mode Four wire mode is recommended for Dymaxion com munications Figure 3 11 Belden 9842 is the rec...

Page 33: ...o 200 feet However RS 485 cable is recommended instead Figure 3 12 RS 232 communication cable connections Dymaxion DB 9M Pin 2 Transmit Pin 3 Receive Pin 5 Ground Dymaxion DB 9M Pin 2 Transmit Pin 3 R...

Page 34: ...off Red CPU has stopped Flashing Red Battery backed RAM has been cleared Check battery Green Normal operation COMM Shows the status of communications between the Dymaxion and the PC Green Receiving d...

Page 35: ...roller SETUP Ai SEt SEn tC Lin H FiL 0 5 i Er oFF dEC 0 LooP SEt h Ag Pid C Ag oFF t tUn no t Agr Crit UFA bPLS FAiL bPLS L dE no rP oFF L SP 0 h SP 250 SP Lo 100 SP hi 100 otPt SEt 1 otPt o Fn hEAt o...

Page 36: ...Mass Spectrometer 1 ALM A ty oFF A Sr A hy A Lg A Sd A LA A bL A Si A dSP A dL ALM SEt 2 ALM A ty oFF A Sr A hy A Lg A Sd A LA A bL A Si A dSP A dL ALM SEt 3 ALM A ty oFF A Sr A hy A Lg A Sd A LA A bL...

Page 37: ...r A hy A Lg A Sd A LA A bL A Si A dSP A dL gLbL SEt C_F C AC LF 60 CoM SEt Ad S 1 OPERATIONS Ai oPEr Pu READ ONLY i Er READ ONLY i CA 0 Mon OPEr C MA READ ONLY h Pr READ ONLY C SP READ ONLY Pu A READ...

Page 38: ...3 16 Dycor Dymaxion Mass Spectrometer C SP 50 id S 50 h Pb 5 ti 892 td 37 o SP 0 ALM OPEr 1 ALM A Lo A hi ALM OPEr 2 ALM A Lo A hi ALM OPEr 3 ALM A Lo A hi ALM OPEr 4 ALM A Lo A hi...

Page 39: ...ings and stainless steel tube until approximately 1 inch 2 54 cm of capillary tube is exposed at each end Figures 2a and 2b Figure 2a Figure 2b Do not force the capillary tube into the steel fittings...

Page 40: ...ectrical connec tions are located into the valve end of the ProLine System Figure 3 Figure 4 6 Tighten the 1 16 nut at the end of the heater assembly onto the 1 16 threaded stub of the ProLine Figure...

Page 41: ...ng located on the customer side of the capillary heater assembly Figure 6 Figure 7 11 Make sure the spiral stretch to length heater covers all the tubing and fittings beginning at the ProLine valve st...

Page 42: ...nto the customer fitting Replace the Velcro straps Figure 8 13 Install the stainless steel tube clamps at each end of the heater jacket Figure 9 Figure 10 14 Plug the thermocouple wire and heater powe...

Page 43: ...s an RS 232 and an RS 485 A switch on the Dymaxion s back panel selects the port to use Figure 4 1 The RS 485 port allows up to 31 power supplies to be connected in a multi drop network configuration...

Page 44: ...nt multiple units from receiving commands with this ad dress as this will cause a bus contention The Dymaxion will always respond to messages with the node address Use a command with the node set as a...

Page 45: ...8 0x10 0x20 0x40 0x80 15 volt supply failure 15 volt supply failure 80 volt supply failure 200 volt supply failure 200 volt supply failure Reserved Reserved Reserved If sending a subfunction code in t...

Page 46: ...is 1 or 0 to 32767 Returns If no parameter supplied returns the number of scans remaining Function 04 Filament Turns the filament on or off If scanning does not take effect until the next scan Parame...

Page 47: ...e 0 to 31 low is the low mass Range 1 to 319 high is the high mass Range 2 to 320 dwell is the sample dwell time Range 3 4 5 10 15 30 60 120 250 500 1000 2000 4000 8000 16000 in milliseconds samples i...

Page 48: ...ital output value Function 0B Unit Name Sets an ASCII unit name Parameters name Up to 30 characters Returns If no parameter supplied returns the name Function 0C Calibration Parameters Sets the calibr...

Page 49: ...the autozero option on or off When turned on the scanning time will double For each data point two readings are taken One normal and one with the mass filter blocking all ions Parameters 1 0 Turn on...

Page 50: ...4 time Format 15 42 23 44 channel Channel number from 0 to 31 count Number of data values returned from 1 to 16 Tabular and Total Pres sure mode channels always return one data value Tune mode channel...

Page 51: ...ed Function 13 Degas Enable degas mode Not allowed while scan is on Parameters 1 0 Turn on Turn off Returns If no parameter supplied then the current state is returned Function 15 Digital Input Gets t...

Page 52: ...AMU 4 200 AMU multiplier 5 300 AMU 6 300 AMU multiplier HeadID 0 Not found 1 100 AMU 2 100 AMU multiplier 3 100 AMU dual multiplier 4 200 AMU 5 200 AMU multiplier 6 200 AMU dual multiplier 7 300 AMU...

Page 53: ...n t match the checksum sent N05 Write Only The command is write only Can t return a query N06 Out of Range The parameter sent is out of range N07 Memory The command tried to allocate memory and failed...

Page 54: ...2 data channels Each of the channels can be set to either tabular a single mass or to analog bar total pressure analog input digital input or disabled A scan consists of acquiring data for all active...

Page 55: ...of 10 4 to 10 9 Torr required by the mass spectrometer If a sample is at the same operating pressure as the mass spectrometer the sample can be analyzed directly However when the sample environment pr...

Page 56: ...he mass spectrometer Connection of the high conductance inlet makes it possible for the Dymaxion to sample from the sample chamber without being directly fitted to the sample chamber When the pressure...

Page 57: ...ve Electroneumatic High Conductance Valve Inlet Electropneumatic Aperture Bypass Valve Inlet Aperture Size Pressure Ratio Max Sample Torr Chamber Pressure 2 6 0 x 107 600 5 1 0 x 107 100 10 2 5 x 106...

Page 58: ...rture Size microns 50 sample chamber pressure 5 Sampling at Atmosphere Atmospheric sampling is possible using a capillary tube inlet The gas inlet is a fused silica capillary The diameter and length o...

Page 59: ...2000 software ensure that there is no air leak by verifying that the 28 peak is more than 5X the height of the 32 peak and that there is no peak at 14 Once you have verified that there are no air leak...

Page 60: ...livered right to the analyzer Its effective pressure is reduced by using a very small diameter aperture The sample is switched on using the manual or electropneumatic valves Sweep Tee This inlet is si...

Page 61: ...ump can be backed by a rota ry vane mechanical pump This provides a 10 3 Torr pumping capacity that brings the system into a vacuum range in which the turbomolecular pump can operate Using the two pum...

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Page 63: ...all power from the analyzer before starting these proce dures Touching any part of the quadrupole head source or mass filter with your fingers will leave dirt and oil on the parts resulting in contam...

Page 64: ...ose during ultrasonic cleaning This will significantly degrade analyzer performance A loosened mass filter must be replaced Filament Replacement Open Source The Dycor open source contains a dual wire...

Page 65: ...ds in place and slide the rods out of the analyzer Be sure to remove all residual pieces of the old filament Installing the new filament 1 Install the new filament being careful not to bend or break t...

Page 66: ...nd remove the quadrupole head from the vacuum system The Dymaxion power must be turned off before servicing Equipment required to replace a filament needle nose pliers 5 64 hex wrench supplied by AMET...

Page 67: ...ew on the col lar holding the ion volume to the source see Figure 6 2 Carefully remove the ion volume and set it aside Filament Hold Down Screw Filament Hold Down Screw Ion Volume Filament Plate Tab L...

Page 68: ...ase rods in their barrel connectors Be sure the filament coils are aligned with the slots in the ion volume and ionizer Make sure the filament coils do not touch the base plate ionizer or ion volume i...

Page 69: ...d about 0 1 above the focus plate with its long wire in the correct barrel connector at 10 Figure 6 1 Tighten the connection 3 Install the repeller so that its plate is spaced about 0 1 above the sour...

Page 70: ...ll keep the mass filter from operating properly This will result in a loss of sensitivity over the full range of the spectrum If the peaks disappear at high scan speeds an insulating layer may have de...

Page 71: ...s cleaning You should not attempt to clean the source yourself unless you are familiar with disassembling and reassembling the source and replacing the filament The source cannot be disassembled witho...

Page 72: ...C for 30 minutes Alternatively dry the parts with a heat gun until the water has evaporated 7 Reassemble the source Assembling the Source Assemble the source in reverse order of the disassembly takin...

Page 73: ...use of the complexity of the detector flange assembly we recommend that the multiplier be replaced at the factory 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Figure 6 5 Breakdown of conductance limited enclosed...

Page 74: ...TEK sensor manifold 3 Make sure all cables are connected properly to the Dymaxion unit 4 Make sure that the Dymaxion is fully pushed onto the feedthrough contacts Reset the Dymaxion by unplugging the...

Page 75: ...Maintenance Troubleshooting 6 13 Figure 6 7 Quadrupole head pinout view of flange atmosphere side...

Page 76: ...operly When the unit is through cycling the top LED turns green LEDs are listed in the order in which they appear top to bottom on the back of the electronics unit CPU Indicates CPU and system status...

Page 77: ...analyzer head and check the continuity between Pins 3 and 8 5 If the filament is burned out LED is red open the vacuum system and replace the filament assembly If the filament checks out OK do the fo...

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Page 79: ...at sink and LED panel on the right side Amp Card Located behind the rear heat sink and under the Amp cover RF Board Located behind the rear heat sink and separated from it by the conductor guide 4 40...

Page 80: ...d 3 Pull out the front panel and Master board Replacing the Master Board 1 Place the new board with attached front panel into the slot from which you removed the old board There is one connector into...

Page 81: ...Sink Screw for Scan Board Screw for Control Board Screwsfor Heat Sink Control Board Scan Board LEDs Front Heat Sink Screw for Scan Board Screw for Control Board Screwsfor Heat Sink Figure 7 2 Control...

Page 82: ...g remove the upper left and bottom right 3 8 screws with internal tooth lock washer from the front heat sink 5 Gently pull on the heat sink to remove it The LED panel is now visible 6 Remove the 1 4 s...

Page 83: ...Amp card is underneath 6 Remove the Amp card by removing the 4 1 4 screws holding it to the Amp card shield Replacing the Amp Card 1 Secure the Amp card onto the Amp card shield using the 4 1 4 screws...

Page 84: ...cing the board The insulator is coated with thermally conductive joint compound If it is not replaced the unit will not work 10 Separate the RF card from the conductor guide Replacing the RF Card 1 Us...

Page 85: ...ling the I O Option Board 1 Remove the screw from the top and bottom of the option plate 2 Slide in the option board making sure the connectors engage 3 Replace the screws that were removed from the o...

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Page 87: ...nduc tance valve 73805SE M240 Sensor Manifold Kit Open source with manual high conductance valve 73806SE M250EP Sensor Manifold Kit Open source with electro pneumatic high conductance valve 73807SE M2...

Page 88: ...e 90390VE DM206V 200 AMU V Stack Open Source 90391VE DM306V 300 AMU V Stack Open Source V Stack Closed Enclosed Sources 90398VE DME106V 100 AMU V Stack Closed Enclosed Source 90399VE DME206V 200 AMU V...

Page 89: ...526VE Oil 115V Non Remote 90541VE Oil 230V Remote 90540VE Oil 230V Non Remote 90543VE Dry 115V Remote 90542VE Dry 230V Remote 90545VE Dry 230V Remote 90544VE Dry 230V Non Remote Cart Pumping System 90...

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Page 91: ...plate is removed to insert the I O board Before installing the I O option board you must configure the jump ers on the board Refer to the charts on page A 3 and A 4 to set up the inputs and outputs fo...

Page 92: ...8 1 Relay Output 0 2 Relay Output 1 3 Relay Output 2 4 Relay Output 3 5 Relay Output 4 6 Relay Output 5 7 Not Used 8 Digital Input 1 9 Relay Output 0 10 Relay Output 1 11 Relay Output 2 12 Relay Outpu...

Page 93: ...CURRENT JUMPER CONFIGURATIONS Analog Out 0 5 Volts Out JP6 JP7 Analog Out 0 10 Volts Out JP6 JP7 Analog Out 0 4 20 mA Out JP6 JP7 Analog Out 1 5 Volts Out JP9 JP10 Analog Out 1 10 Volts Out JP9 JP10 A...

Page 94: ...using Jumpers JP16 through JP21 Jumpers shown in isolated output position RELAY RELAY RELAY RELAY RELAY RELAY 1 1 1 1 1 JP17 JP18 JP19 JP20 JP21 Pin 2 Pin 10 Pin 3 Pin 11 Pin 4 Pin 12 Pin 5 Pin 13 Pi...

Page 95: ...INPUT CHANNEL VOLTAGE CURRENT JUMPER CONFIGURATIONS Analog In 0 0 10 Volts In JP13 JP12 Analog In 0 0 20 mA In JP13 JP12 Analog In 1 0 10 Volts In JP14 JP15 Analog In 1 0 20 mA In JP14 JP15 0 10V 0 20...

Page 96: ...A 6 Dycor Dymaxion Mass Spectrometer JP18 JP16 JP17 JP19 JP20 JP21 JP13 JP12 JP14 JP15 JP9 JP6 JP10 JP7...

Page 97: ...tron ics unit making sure that you engage the connector on the board with the electronics unit itself 3 Insert the screws at the top and bottom of the I O Option board cover securing it to the electro...

Page 98: ...menu The Device Properties screen appears Figure A 6 COM1 Dig64 OPTO 22 Digital Optomux Digital 57600 128 Figure A 6 Device Properties screen Click on the I O Setup Tab to set up and name the input a...

Page 99: ...trend and tabular modes Right click the screen that you want to display your analog input Select Scan from the context menu Click on the Device button and select the device Figure A 8 Select the Funct...

Page 100: ...on which you want to display your analog output Select Analog from the context menu Click on the Device button and select the device Figure A 9 Select the Module Full Scale Define the value to be use...

Page 101: ...s 2 Resolution 12 bits 4096 steps Input Range Current 0 20 mA or Voltage 0 10 VDC Jumper selectable Isolation Single Ended Voltage input range 0 10 VDC Minimum undervoltage 15 V Maximum overvoltage 15...

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Page 103: ...on System to work with your analyzer Complete information on how to use the modules is provided in the Opto 22 SNAP user manual that you received with the product These instructions are divided into t...

Page 104: ...NAP I O System The components used in the Opto 22 SNAP I O System consist of SNAP Brain SNAP input output modules SNAP rack power supply The SNAP Brain is the core of the I O system Using the SNAP I O...

Page 105: ...Opto 22 Option Appendix B 3 Opto Rack with I O Modules Opto I O Modules Opto Power Supply Input Output Modules Opto Brain B3000 B...

Page 106: ...tic interrupts wire IRQ and IRQ pins 6 and 7 See the B3000 B User s Guide for details on network wiring 2 Rotate the baud rate switch to set the desired baud rate as shown in the table below NOTE Due...

Page 107: ...7 7 7 7 Lower Address 0 4 8 C 0 4 8 C 0 4 8 C 0 4 8 C Base Address 128 132 136 140 144 148 152 156 160 164 168 172 176 180 184 188 Upper Address 8 8 8 8 9 9 9 9 A A A A B B B B Lower Address 0 4 8 C 0...

Page 108: ...6 A E 2 6 A E Base Address 192 196 200 204 208 212 216 220 224 228 232 236 240 244 248 252 Upper Address C C C C D D D D E E E E F F F F Lower Address 2 6 A E 2 6 A E 2 6 A E 2 6 A E Upper address sw...

Page 109: ...Opto 22 Option Appendix B 7 RS 232 to RS 485 Converter Cable Figure B 1 RS 232 to RS 485 converter cable Power can be applied once the I O system is connected properly NOTE...

Page 110: ...ree devices 2 digital Address 64 and 65 1 analog Address 66 Digital Input Address 64 Modules 0 1 2 3 Digital Output Address 65 Modules 12 13 14 15 Analog Input Address 66 Modules 2 3 4 5 6 7 Analog Ou...

Page 111: ...roperties dialog box appears If a digital device is not listed click Cancel On the main screen click the Edit menu and Add Device Click Optomux Digital Once the Opto 22 SNAP System has been added you...

Page 112: ...efers to a particular digital I O channel not the physical module For example if a single digital output module is installed in the first SNAP rack position the System 2000 will refer to it as Modules...

Page 113: ...Opto 22 Option Appendix B 11 Click the Display tab to configure the parameters for the display Click OK for it to become part of the mode display you have chosen Dig Digital IN 0 1 00E 07 1 00E 11...

Page 114: ...ollows Bits per Second 9600 Address 66 Type Optomux Analog Make sure that Device Enabled and Live Data boxes are checked Click on the I O Setup tab and enter the Type and Name for the input and output...

Page 115: ...ation viewed Right click on one of the screens Click Scan Click Device and select your analog input device Click on the Display tab to configure the parameters for the display Empty Empty Analog IN An...

Page 116: ...Dymaxion Mass Spectrometer Digital and Analog Outputs 1 Refer to Chapter 8 in the 2000 software manual for setting up the Digital Outputs 2 Refer to Chapter 9 in the 2000 software manual for setting u...

Page 117: ...Opto 22 Option Appendix B 15 OPTO 22 MODULE DATA SHEETS AMETEK Part 25540JE Input Module 2 Channel Analog 20 mA to 20 mA...

Page 118: ...Appendix B 16 Dycor Dymaxion Mass Spectrometer AMETEK Part 25538JE Input Module 2 Channel Analog Type J K E Thermocouple...

Page 119: ...Opto 22 Option Appendix B 17 AMETEK Part 25539JE Input Module 2 Channel Analog 10 VDC to 10 VDC Voltage Input...

Page 120: ...Appendix B 18 Dycor Dymaxion Mass Spectrometer AMETEK Part 25541JE Output Module 2 Channel Analog 4 20 mA...

Page 121: ...Opto 22 Option Appendix B 19 AMETEK Part 25542JE Output Module 2 Channel Analog 0 to 10 VDC...

Page 122: ...Appendix B 20 Dycor Dymaxion Mass Spectrometer AMETEK Part 25578JE Digital Module 4 Channel AC Input 9 140 VAC...

Page 123: ...Opto 22 Option Appendix B 21 AMETEK Part 25577JE Digital Module 4 Channel Isolated AC Output 12 280VAC...

Page 124: ...Appendix B 22 Dycor Dymaxion Mass Spectrometer AMETEK Part 25577JE Digital Module 4 Channel Isolated AC Output 12 280VAC...

Page 125: ...Opto 22 Option Appendix B 23 AMETEK Part 25544JE Output Module 4 Channel Source DC 5 60 VDC...

Page 126: ...Appendix B 24 Dycor Dymaxion Mass Spectrometer AMETEK Part 25544JE Output Module 4 Channel Source DC 5 60 VDC...

Page 127: ...Opto 22 Option Appendix B 25 AMETEK Part 25543JE Input Module 4 Channel 2 5 28 VDC...

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