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6.7.2. Depositing or etching with the electron beam

CAUTION

Danger of damaging GIS micro stage or specimen.
Make sure to position the specimen surface at a safe working distance.

Procedure

Open the

Panel Configuration Bar

Double-click

E-Beam Deposition and Etch

The

E-Beam Deposition and Etch

panel

opens.

A deposition object is shown in the image
area.

Resize the deposition object to the appropriate

size.

Select the required precursor.

Set a

Gas Wait Time

Set a

Total Duration Time

Set a

Scan Rate

Click

Start

Содержание Crossbeam 340

Страница 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...

Страница 2: ...s will be prosecuted The use of general descriptive names registered names trademarks etc in this document does not imply even in the absence of a specific statement that such names are exempt from the relevant protective laws and regulations and therefore free for general use Software programs will fully remain the property of Carl Zeiss Microscopy No program documentation or subsequent upgrade t...

Страница 3: ...function only 18 2 4 1 5 EMO button optional but mandatory for compliance with SEMI S2 18 2 4 1 6 Main shut off valves 19 2 4 2 Safety labels and labels 19 2 4 2 1 At the front of the microscope 20 2 4 2 2 At the rear of the electron optical column 21 2 4 2 3 At the rear of the microscope 22 2 4 2 4 Inside microscope 23 2 4 3 Material Safety Data Sheets 23 3 Description 25 3 1 Workstation 25 3 2 C...

Страница 4: ...orage 57 4 1 Transport 57 4 2 Storage 58 5 Installation 59 6 Operation 61 6 1 Switching on the microscope 61 6 2 Starting the SmartSEM user interface 62 6 3 Finding your way in the SmartSEM user interface 63 6 3 1 Showing or hiding toolbars 63 6 3 2 Showing or hiding the data zone 63 6 3 3 Showing a full screen image 64 6 3 4 Preparing the docking panel for operation 64 6 3 4 1 Showing the docking...

Страница 5: ...1 4 Setting the coincidence point 97 6 8 2 Gas assisted deposition Platinum with GIS upgrade only 98 6 8 2 1 Heating the platinum reservoir 98 6 8 2 2 Outgassing the platinum reservoir 99 6 9 Using the help functions 101 6 9 1 Calling the SmartSEM help window 101 6 9 1 1 Printing help texts 101 6 9 1 2 Bringing help texts to the foreground 101 6 9 2 Calling the context sensitive help 101 6 9 3 Sea...

Страница 6: ...sing the stage 113 8 2 2 Replacing the chamber door seal 113 8 3 Column 115 8 3 1 Baking out the gun head 115 8 3 2 Ion source 116 8 3 2 1 Checking the lifetime of the ion source 116 8 3 2 2 Regenerating by heating 116 8 4 Power circuit 119 8 4 1 Checking the circuit breakers 119 9 Shutdown and disposal 121 9 1 Putting the microscope out of operation 121 9 2 Disposal 122 9 2 1 Disposing of solid w...

Страница 7: ...f the FIB refer to the SmartFIB online help For technical data refer to the documents Product Specification and Installation Requirements This instruction manual refers to the operating software SmartSEM V05 07 At a glance This instruction manual contains the following chapters 1 About this manual Explains function and structure of this instruction manual 2 Safety Summarises important safety detai...

Страница 8: ...death or serious injury WARNING This safety alert symbol and signal word indicates a potentially hazardous situation Disregarding this warning COULD result in death or serious injury CAUTION This safety alert symbol and signal word indicates a potentially hazardous situation Disregarding this warning MAY result in minor or moderate injury CAUTION This signal word used without a safety symbol indic...

Страница 9: ...ype key 1 first then type key 2 on the keyboard Type Ctrl Alt Del Simultaneously type CTRL key ALT key and DEL key on the keyboard Click the Magnification icon On the menu select File Exit Icons buttons and menus are printed in bold In the EHT target field enter 10 kV Values to be selected are printed in italics Text Meaning Click Press the left mouse button Right click Press the right mouse butto...

Страница 10: ...FIB option Carl Zeiss service engineer Carl Zeiss service staff Specially trained service expert either Carl Zeiss staff or authorised service partner of Carl Zeiss Operator A trained person who operates the microscope User A person or organisation that uses products of Carl Zeiss Microscopy EMO box The Emergency OFF Box EMO Box is a safety device integrated in the AC Unit When pushing the EMO but...

Страница 11: ...f a process gas the removal of material via the focused ion beam can be ac celerated Gas assisted deposition with ion beam requires optional gas injection system With the help of a process gas the focused ion beam deposits material onto the specimen surface Gas assisted etching with electron beam requires optional gas injection system With the help of a process gas the removal of material via the ...

Страница 12: ...microscope document folder Operator training Within the scope of initial start up the Carl Zeiss Microscopy service staff will perform a basic op erator training The basic operator training consists of fundamental operation procedures includ ing safety instructions Besides an introduction to basic maintenance tasks will be given for an advanced operator who has to be an electrically skilled person...

Страница 13: ...zard X rays are generated inside the microscope during operation Only authorised Carl Zeiss service engineers are allowed to service the microscope Do not remove any parts around column and chamber Observe all safety and X ray protection regulations In Germany the operation of the microscope is permission free as the following requirements are fulfilled The acceleration voltage is limited to 30 kV...

Страница 14: ...mber Ensure the area around the microscope is sufficiently ventilated Concerning the hazards of nitrogen installations and associated safety precautions refer to guide line IGC Doc 44 xx E Hazards of inert gases published by EIGA European Industrial Gases As sociation To download the document 1 Go to EIGA homepage www eiga org Publications IGC MGC SAC Documents 2 From the Quick list select Doc 44 ...

Страница 15: ...mply with all national and local safety and environmental protection reg ulations Maintenance procedures Baking out the gun head has to be performed as a regular maintenance procedure Only advanced operators are allowed to perform the bakeout procedure CAUTION Burn hazard Some parts inside the microscope will get hot during the bakeout procedure Do not place any combustible objects on the top of t...

Страница 16: ...t exceed 10 A at 230VAC IMPORTANT Fingerprints can cause virtual vacuum leaks Always wear lint free gloves when touching the specimen or inner parts of the specimen chamber 2 4 Safety equipment 2 4 1 Safety devices In order to prevent hazards to human health or property damage the microscope is equipped with several safety and protective devices 2 4 1 1 Protective cover panels Plinth electron opti...

Страница 17: ... indicated in the SmartSEM user interface EHT and SE2 detector voltages are blocked Interlock to airlock On the right side of the rear there is an interlock to the optional 80 mm airlock Vacuum interlock The vacuum interlock is an internal interlock It ensures that gun vacuum and system vacuum are better than the required thresholds 2 4 1 3 MAIN switch The MAIN switch is essential for compliance w...

Страница 18: ...ns power supply The main switch can be secured against re activation The main switch guarantees an ampere interrupt ing capacity AIC of at least 10000 A rms 2 4 1 5 EMO button optional but mandatory for compliance with SEMI S2 The Emergency off button 1 EMO button is located on the plinth adjacent to the specimen chamber The EMO button is to be pressed in an emergency to cut off mains power to the...

Страница 19: ... close off the connections to the corresponding media when needed The main shut off valves have to be lockable in their OFF position in order to prevent accidental re activation As the user is responsible for installing the main shut off valves he she should also provide in structions how to operate the main shut off valves properly 2 4 2 Safety labels and labels Appropriate safety labels on the m...

Страница 20: ...tage Order number 347800 0033 000 02en B Safety information Risk of damage Microscope or specimen stage could be damaged if the specimen stage is at short working distance Move specimen stage to longer working distance before opening the chamber door Order number 347800 0033 000 04en C Safety information Avoid injury Read and understand the instruction manual before operating this product Order nu...

Страница 21: ...ised service staff is allowed to service the equipment Disconnect power before opening Order number 347800 0033 000 03en E Safety information Burn hazard Hot surfaces inside during bakeout procedure Do not place any combustible objects on the grids of the electron optical column Only authorised service staff is allowed to service the equipment Disconnect power and let surfaces cool before opening ...

Страница 22: ...he electron microscope during operation Do not remove any parts Use genuine ZEISS parts exclusively Observe local safety and X ray protection regulations Order number 347800 0033 000 06en Legal information Order number 346000 0088 000 Safety information High leakage current Ensure proper grounding Do not operate the electron microscope without separate ground connection Order number 347800 0033 00...

Страница 23: ...s are described in the documents for Carl Zeiss service staff 2 4 3 Material Safety Data Sheets Material safety data sheets MSDS of chemicals used in combination with the microscope are contained in the document folder delivered with the microscope Safety information Suffocation hazard Specimen chamber is ventilated with gaseous nitrogen Ensure the area around the electron microscope is sufficient...

Страница 24: ...OQ çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF OK p ÑÉíó p ÑÉíó ÉèìáéãÉåí ...

Страница 25: ... scope with GEMINI column and FIB column 1 Electron optical GEMINI column 6 80 mm airlock optional 2 Ion Getter Pumps IGPs for FIB 7 Monitors 2nd monitor optional 3 FIB column optional 8 Dual joystick 4 Gas Injection System MultiGIS optional 9 Control panel optional 5 Specimen chamber with door handle Plinth with ON OFF Standby buttons and optional EMO box are not shown Fig 3 1 View of Crossbeam 3...

Страница 26: ...erface The microscope is controlled by the SmartSEM software The software is operated using a graphical user interface 3 2 1 1 Main areas in SmartSEM 1 Menu bar 5 Data zone 2 Toolbar with icons 6 Status bar 3 Docking panel 7 MiniBar with icons 4 Panel configuration bar 8 Annotation bar with icons Fig 3 2 Main areas in SmartSEM ...

Страница 27: ...ÉäÉãÉåíë 3 2 1 2 SmartSEM controls Use the SmartSEM controls in dialog panels to select choices enter information or to manipulate objects 1 Tab 2 Text field 3 Drop down list 4 Checkbox 5 Radio button 6 Arrow button 7 Slider 8 Navigation box 9 Button Fig 3 3 SmartSEM controls ...

Страница 28: ...latively fast At higher magnifica tions the stage movement is slower The small joystick on the left is used to control the Z axis and the stage tilt T Two M push buttons allow control of a second Z axis M on super eucentric stages to set the eu centric point of the specimen tilt on these stages The Break push button is an emergency stop for the stage All axes are deflection compensated When the jo...

Страница 29: ...can be operated in two different modes High vacuum HV mode Variable pressure VP mode Mode Characteristics Pressure regions HV HV mode is the standard mode of a FESEM It offers the possibility of analysing and mapping conducting specimens In HV mode the pressure in the speci men chamber is less than 10 6 mbar VP VP mode offers the possibility of analysing and mapping non conduct ing strongly gassin...

Страница 30: ... Turbo isolation valve TIV 11 Penning gauge 12 Vent valve 13 Pre vacuum pump In HV mode pre vacuum pump 13 and turbo pump 6 evacuate the specimen chamber The roughing backing valve RBV 7 has opened the connection between pre vacuum pump and tur bo pump The turbo isolation valve TIV 10 is open The vacuum in the specimen chamber is measured by a Penning gauge 11 The detected vacuum values are shown ...

Страница 31: ...t between 10 133 Pa with In lens SE detector configuration i e 0 02 1 33 mbar 10 60 Pa with In lens Duo detector configuration The pressure in the specimen chamber is measured by the Pirani gauge 15 As long as the detected pressure in the specimen chamber is not ready for operation the column chamber valve 4 is closed in order to separate the specimen chamber from the column Switching to VP mode S...

Страница 32: ...pecimen chamber has to be evacuated by the pre vacuum pump Gun vacuum In the gun head is an ultra high vacuum which is maintained by an ion getter pump 8 The vac uum in the gun head is called Gun vacuum It should be well below 1 x 10 8 mbar The specimen is located in the evacuated specimen chamber 9 To open the specimen chamber for specimen exchange you have to break the vacuum in a controlled man...

Страница 33: ...s are accelerated by the acceleration voltage UEHT The beam booster UB booster voltage which is always at 8 kV potential when the acceleration voltage is at most 20 kV is integrated directly after the anode This guarantees that the energy of the electrons in the entire beam path is always 8 kV higher than the set acceleration voltage This considerably reduces the sensitivity of the electron beam t...

Страница 34: ...g the specimen surface therefore corresponds to the set acceleration voltage EHT Signal detec tion When the primary electron beam hits the specimen certain interaction products are released which can be recorded by specific detectors 3 3 3 Imaging modes The following imaging modes are available Imaging mode FIB Mode Characteristics Typical application SEM imaging SEM Electron beam is active ion be...

Страница 35: ...contrast imaging voltage contrast imaging Defining milling patterns on the specimen surface Grain analysis CrossBeam operation optional SEM FIB Image is composed of SEM and FIB components Setting the coincidence point Mill No image Mills with the milling parame ters set milling current Ion milling or deposition Only deposition by ion beam No deposition by electron beam Mill SEM Mills and generates...

Страница 36: ...om its geometric position in the beam path and from the combination with the electrostatic electromagnetic lens SE2 detector Everhart Thornley type Standard SE2 Topography VPSE detector Standard SE2 Topography in VP mode Optional detectors Configuration Detected signals Typical application In lens Duo detector with filtering grid in column detector Optional SE BSE Surface structure Material contra...

Страница 37: ...can be used up to an acceleration voltage of 20 kV At higher acceleration voltages the beam booster and thus the field of the electrostatic lens are switched off This reduces the efficiency of the In lens detector The efficiency of the In lens SE detector is mainly determined by the electric field of the electro static lens which is decreasing exponentially with the distance Thus the working dista...

Страница 38: ...ing the low energy SEs so that they cannot reach the scintillator and do not contribute to the signal Only high energy BSEs reach the scintillator contributing to the image generation This produces a pseudo backscattered image which shows pronounced topography but largely cancels surface properties and material contrast 1 Preamplifier 4 Scintillator 2 Photomultiplier 5 Specimen 3 Light guide 6 Col...

Страница 39: ...us SEs move towards the detector In VP mode gas molecules are present in the specimen chamber The accelerated SEs excite gas molecules which emit a photon when they de excite to the ground state Although BSEs also cause collisions their contribution is less than 1 because of the lower ionising cross section The emitted photons are detected by the rod like light guide pointing at the specimen The p...

Страница 40: ...an eucentric one which means that all rotation axes intersect in the same point The specimen surface is located in the eucentric point where the tilt axis meets the beam axis This guarantees that the focus is maintained when the specimen is tilted at a certain working distance When moving a tilted specimen the specimen is also moved unintentionally in Z direction The 6 axes super eucentric stage i...

Страница 41: ...ith GEMINI column The following table shows applications and the required upgrade stages 2 Five channel GIS or Single GIS 3 Charge Compensator 4 Five channel GIS with integrated charge compensation CC Applications Upgrades FIB GIS Charge compensation CC SEM operation SEM operation FIB imaging Milling SEM operation FIB imaging Milling Gas assisted etching Gas assisted deposition Electron beam depos...

Страница 42: ...full sized keyboard and allows direct ac cess to 14 of the most frequently used functions on the SEM The following functions are available through Turning knobs Push buttons Magnification Reduced Stigmator X Wobble Stigmator Y Freeze Aperture X Exchange Aperture Y Resume Scan Rotate Camera Shift X Scan Speed Shift Y Scan Speed Brightness Contrast Focus ...

Страница 43: ... the acceleration voltage to an energy of maximum 30 keV The ion emission is regulated by the ex tractor and stabilised by the suppressor Gallium is consumed during operation Therefore the gallium emitter cartridge is a consumable Moreover the gallium emitter has to be regenerated by heating from time to time the heating pro cedure removes the gallium oxide which has been created during operation ...

Страница 44: ...ive lens The objective lens is designed as an electrostatic einzel lens system to focus the beam onto the specimen surface 3 4 4 Gas injection system GIS For information regarding the gas injection system refer to the instruction manual of MultiGIS or Single GIS 3 4 5 Charge Compensator For information regarding the gas injection system refer to the instruction manual Charge Com pensator 3 4 6 Air...

Страница 45: ...field of the GEMI NI column These electrons are accelerated by the field of the electrostatic lens Filtering grid Without switching on the filtering grid voltage the In lens Duo detector has the same characteris tics as the In lens SE detector see section 3 3 4 1 The In lens Duo detector primarly detects secondary electrons SEs By switching on the filtering grid 2 voltage the SEs will be rejected ...

Страница 46: ...lerated to the converter In the converter both electrons and ions are converted into secondary electrons which are used to generate an image The SESI detector can be operated in two modes SE mode and Ion mode 1 FIB column 4 Collector grid 2 GEMINI column 5 Specimen 3 SESI detector Operating mode FIB mode Detected signals Typical application SE mode typical collector voltage 300 V SEM Secondary ele...

Страница 47: ...ntinuously variable in either coarse or fine modes Auto Compensation Magnification is precisely corrected automatically for changes in working distance or acceleration voltage Electron optics Electron source Filament Schottky field emitter Alignment Two stage electromagnetic emitter alignment utilizing emission imaging mode Automatic Emitter Run Up Safe controlled run up of the target emitter cond...

Страница 48: ...0 nA 7 apertures Sizes 7 10 15 20 30 60 120 µm High Current option 100 nA 6 apertures Sizes 10 20 30 60 120 300 µm Electromagnetic selection Precise alignment due to retrievable coordi nates Focus Wobble For assistance in aperture alignment with adjustable amplitude and speed Beam shift Control Adjustment with hardpanel or PC mouse For precise adjustment of image position at high magnifications 20...

Страница 49: ...tion 360 continuous T 3 70º R 360º continuous May be reduced by specimen size operating conditions and accessories attached Accessory Port Two accessory ports on the stage door are provided Specimen Weight Up to 0 5 kg Specimen current monitor with integrated Touch Alarm Audible touch alarm warning with on screen message Specimen Mounts One single stub holder and one carousel 9x sample holder for ...

Страница 50: ...e two detection modes is not possible SE detection mode high efficiency SE detection with disabled filtering grid BSE detection mode high efficiency detection of energy and angle selective backscattered electrons using the energy filtering grid b Combined Secondary Electron Secondary Ion SESI detector based on a scintillator photomultiplier system easy change between secondary ion and secondary el...

Страница 51: ...300x 500 000x Acceleration Voltage 0 5 30 kV Adjustment Continuously variable in 10 Volt steps Conditioning interval Time between conditioning cycles 72 hours Imaging Patterning Maximum field of view 580 x 580 µm User beam shift 15 µm Dwell time Minimum dwell time 25 ns Maximum dwell time 1 sec Lenses Type Two electrostatic lenses Beamblanking Built in electrostatic Focus Control Coarse and fine c...

Страница 52: ...ade stage and installed optional accessories Current input Max 16 A Circuit breaker 25 A switch off behaviour K on installation site Moreover it is recommended to protect the complete room by installing a power switch next to the door of the room Ampere interrupting capacity AIC At least 10000 A rms Protective ground The workstation must be connected via a separate protective ground An exclusive g...

Страница 53: ...ber with chamber door open Pressure 0 30 0 35 MPa 3 0 3 5 bar Compressed air Flow rate Less than 1l min Pressure 0 6 0 8 MPa 6 8 bar Quality Oil free Environmental requirements Ambient Temperature 21 C 4 C Stability 0 5 C Relative humidity Less than 65 Altitude To guarantee undisturbed operation do not operate the workstation at sites higher than 2000 m above sea level Pollution degree 2 According...

Страница 54: ...damper A Mains power supply 208 230V 25A 1 N L2 PE II Static vibration damper B Equipotential bonding bar III Pre vacuum pump C Water solenoid valve IV Computer workplace D Pressure reducer water nitrogen compressed air V Emergency Off EMO button optional E Main shut off valves F Water supply G Water runback H Nitrogen supply J Compressed air supply K Exhaust line ...

Страница 55: ...nth column Capella FIB 940 x 1082 x 1700 920 4 x 230 4 x Ø 80 mm Plinth column Capella FIB 200mm airlock 1060 x 1082 x 1700 950 4 x 238 4 x Ø 80 mm Plinth column 200mm air lock 940 x 1082 x 1700 900 4 x 225 4 x Ø 80 mm 2 Table PC 1153 x 980 x 1350 97 4 x 24 3 4 x Ø 50 mm 3 Dynamic damping block 200 x 200 x 290 26 1 x 26 0 200 mm x 200 mm 4 Static damping block 180 x 180 x 160 36 6 1 x 36 6 180 mm ...

Страница 56: ...on a regular base Moreover it is recommended that you conclude a service contract with your local Carl Zeiss ser vice organisation or representative This will ensure a continuous trouble free operation of the mi croscope 3 7 Radiation protection For questions regarding radiation protection contact the Carl Zeiss Radiation Safety Officer Dr Wolfgang Sold Carl Zeiss AG 73447 Oberkochen Germany phone...

Страница 57: ...icroscope by shock the microscope has to be exclusively trans ported in air suspended vehicles Temperature during transport has to be between 10 C and 70 C The microscope is delivered in two wooden crates Check that none of the items has been damaged during shipment Otherwise contact your local Carl Zeiss service staff WARNING Tilting danger when removing the microscope from the wooden crate A per...

Страница 58: ...oden crate The forklift used must have a sufficient load capac ity Refer to the weights of the workstation stated in this chapter A hand pallet truck has to be used to move the workstation Ensure all hallways and corners are wide enough to be passed with the hand pallet truck 4 2 Storage The packed microscope has to be stored in a dry place Temperature during storage has to be between 10 C and 70 ...

Страница 59: ...RK fåëí ää íáçå fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RV çÑ NPQ 5 Installation Unpacking installation and first start up are carried out by authorised Carl Zeiss service staff ...

Страница 60: ...SM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF RK fåëí ää íáçå ...

Страница 61: ...SEM user interface Obtaining a first image Changing between the vacuum modes Setting SEM conditions Electron beam deposition or etching with GIS upgrade only Crossbeam operation Using the help functions Finishing the work session Changing to the STANDBY mode Switching off the microscope Emergency off EMO 6 1 Switching on the microscope Procedure 1 At the front of the plinth press the ON button 1 T...

Страница 62: ...dure 1 On your desktop double click the Zeiss SmartSEM icon Alternatively select Start Programs SmartSEM SmartSEM User Interface The EM Server opens while loading various drivers The EM Server implements the internal communication between software and hardware of the microscope The EM Server Log On dialog is displayed 2 Enter your user name and password 3 Click OK The SmartSEM user interface opens...

Страница 63: ...t View Toolbars The Toolbar Views panel opens 2 To show a toolbar select the respective checkbox 3 To change the tooltip features of the user toolbar on the right hand side of the panel select the respective radio button 4 Click OK 6 3 2 Showing or hiding the data zone The data zone is a special group of annotation objects that displays current parameters You can also include a micron marker to sh...

Страница 64: ...the function press Shift F3 6 3 4 Preparing the docking panel for operation The docking panel is the area on the right hand side of the user interface where you can dock various control panels on the main window 6 3 4 1 Showing the docking panel Procedure 1 On the menu select View Toolbars 2 Select the Docking Panel checkbox 3 Click OK The docking panel opens To hide a docking panel clear the Dock...

Страница 65: ... the docking panel Procedure 1 On the right side of the image area click the ar row button 1 The Panel Configuration Bar is displayed showing an alphabetical list of functions 2 To select a control panel double right click it The control panel is added to the docking pan el 3 To minimise a control panel select the arrow button in the title bar 1 ...

Страница 66: ...ion 8 2 1 At a glance The complete sequence includes Preparing the sample holder Loading the specimen chamber Locating the specimen Switching on the gun Switching on the EHT Generating an image Optimising the image Saving the image Parts required No Allen wrench 1 5 mm delivered with the micro scope Stub delivered with the micro scope Tweezers for specimen delivered with the micro scope Sample hol...

Страница 67: ... times Always wear lint free gloves when touching specimen sample holder or stage Procedure 1 To attach a specimen to the stub use conduc tive carbon adhesive metal carbon tape or similar Ensure that the specimen area that you want to analyse is in proper contact with the stub 2 Use tweezers to insert the stub into the sam ple holder 3 Tighten the location screw with the Allen wrench to fix the st...

Страница 68: ...n the image area of the user interface switch to the TV mode Procedure 1 In the toolbar click the ChamberScope icon CAUTION Risk of damaging the objective lens and or your specimen Ensure not to hit the objective lens while driving the stage Change to TV mode to observe the moving stage 2 In the Vacuum tab click the Vent button A message box is displayed asking Are you sure you want to vent 3 Clic...

Страница 69: ...he specimen cannot hit any components dur ing insertion 5 Slowly open the chamber door IMPORTANT Contamination caused by fingerprints can lead to vacuum deterioration or prolonged pumping times Always wear lint free gloves when touching specimen sample holder or stage Keep the chamber door open as short as possible All sample holders are equipped with a dovetail in order to define the correct posi...

Страница 70: ...or Use the recessed grip to close the chamber door Ensure not to get your fingers caught in the chamber door gap 7 Use the recessed grip to close the chamber door 8 In the Vacuum tab click Pump The vacuum status messages show the cur rent vacuum levels achieved It may take up to 5 minutes until the appropri ate vacuum level is achieved ...

Страница 71: ...tive lens while driving the stage Watch the moving stage in TV mode 2 To open the Stage Navigaton bar on the menu select Stage Navigation The Stage Navigation shows specimen chamber schematics The upper schematic shows a lateral view of the specimen stage The lower schematic shows a plan view of the stage with the different stubs 3 Press Additional Settings The Stage Nav Settings dialog appears 4 ...

Страница 72: ...electron beam in the lower schematic of the Stage Navigation window double click the stub with the specimen you want to observe 8 Use the dual joystick carefully move the specimen closer to the objective lens see section 3 2 2 Note We recommend a working distance of less than 10 mm between objective lens and specimen surface ...

Страница 73: ...es is indicated 2 To open the pop up menu in the status bar click Gun 3 In the pop up menu select Gun On The gun runs up This may take up to 5 minutes CAUTION Risk of damaging the Schottky field emitter Avoid switching off the gun during the working week to optimise the life time of the Schott ky field emitter Switching off the gun is only recommended at longer breaks of two days or more such as w...

Страница 74: ...age EHT Procedure 1 Set the acceleration voltage a In the Gun tab double click the EHT Tar get field The EHT Target window apears b Enter 10 kV c Click OK 2 Switch on the EHT a To open the pop up menu in the status bar click EHT b In the pop up menu select EHT On The EHT runs up to 10 kV The status bar buttons are merged into the All button Now the electron beam is on ...

Страница 75: ...t long working distances 5 Select the Scanning tab 6 From the drop down list select Scan Speed 1 The lower the scan speed number the faster the electron beam scans across the specimen Scan Speed 1 allows you to get an image quickly 7 Set the magnification to Mag 500 x a In the toolbar select the Magnification Focus icon Now you can magnify and focus using the mouse b Drive the mouse cursor into th...

Страница 76: ...ã ÖÉ The current working distance WD is indicated in the status bar 9 Adjust contrast and brightness a Select the Detectors tab b Use the Brightness and Contrast sliders 10 Select a detail on the specimen surface 11 Magnify and focus the detail 12 Adjust contrast and brightness again ...

Страница 77: ...to move the field of view at high mag nifications we recommend using the Beam Shift function instead of moving the stage 3 Use the Beam shift function a Select the Column tab b Click Beam Shift c To shift the beam use the slider or the red marker 4 In the toolbar click the Reduced Raster icon A small scan frame is shown The image outside the scan frame is frozen 5 To change the size and position o...

Страница 78: ...sity use the Wobble Amplitude scroll bar c To accelerate the wobble speed select the Wobble Fast checkbox d Click Aperture Align e Use the vertical and horizontal slider of the Aperture Align box until there is no move ment of the detail in X and Y direction The specimen detail should just be pulsating without shifting f Clear the Focus Wobble checkbox 8 In the Scanning tab set Scan Speed 7 9 Brin...

Страница 79: ...ã ÖÉ c n the Apertures tab click Stigmation d To obtain the sharpest image in the Stig mation box use the vertical and horizontal slider 11 To deactivate the reduced raster click the Re duced Raster icon 12 To reduce image noise in the Scanning tab select a scan speed between 6 and 8 ...

Страница 80: ...ure 1 Stop the scan a Select the Scanning tab b In the Noise Reduction section click the drop down list and select Freeze on End Frame c Click Freeze A red dot at the right bottom of the image area indicates that the image is frozen 2 On the menu select File Save Image 3 Enter a path and a file name 4 Click Save tif ...

Страница 81: ...SK léÉê íáçå fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UN çÑ NPQ lÄí áåáåÖ Ñáêëí áã ÖÉ 5 In the Scanning tab click Unfreeze 6 Continue imaging 7 To finish the work session refer to section 6 10 ...

Страница 82: ...Select the VP Control tab 2 Double click VP Target field The VP Target window appears IMPORTANT If the VP system has not been used for several days start with moderate pressures in the range of 0 30 Pa for the first 10 minutes Af terwards the vacuum system is conditioned and the VP mode can be used with its full range 3 Enter the pressure value and click OK 4 Click the Go To VP button 6 5 2 Return...

Страница 83: ...e only for a short time 1 2 h and by maximum 500 V The extractor voltage is preset by the factory or by the Carl Zeiss service engineer Within certain limits the operator may carefully alter the extractor voltage in order to optimise the probe current for particular applications IMPORTANT The newly set extractor value is only valid for the current work session After a restart of the SmartSEM softw...

Страница 84: ...red by a small aperture If the beam is focused in this cavity no secondary electrons and no backscat tered electrons leave the Faraday cup The displayed current equals the incident beam current Procedure 1 Load the Faraday cup into the specimen chamber 2 Pump the specimen chamber 3 Switch on the electron beam 4 Set a magnification that allows transmission of the complete electron beam into the cav...

Страница 85: ...00 V 5 kV 2 8 mm Collector bias adjustable from 250 V to 400 V Standard applications 300 V Pseudo BSE image 250 V to 50 V Select the settings as described in section 6 6 2 2 5 kV 30 kV min 6 mm VPSE Optional detectors EHT Typical WD Detector settings Remarks In lens Duo SE Mode 100 V max 2 mm None Avoid strong specimen tilting 100 V 20 kV max 6 mm In lens Duo BSE Mode 100 V 1 kV 1 2 mm Filtering g...

Страница 86: ...ÉííáåÖ pbj é ê ãÉíÉêë 6 6 2 1 Selecting a detector Procedure 1 Select the Detectors tab 2 From the Detectors drop down list select a detector 6 6 2 2 Using the SE2 detector Procedure 1 Select the SE2 detector 2 To set the collector bias move the Collector Bias slider ...

Страница 87: ...fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UT çÑ NPQ pÉííáåÖ pbj é ê ãÉíÉêë 6 6 2 3 Using the VPSE detector Procedure 1 Select the VPSE detector 2 In the Detectors tab of the SEM Control pan el set the collector bias ...

Страница 88: ...M 2 Select the SESI detector The SESI detector is operated in SE mode 3 In order to toggle between SE Mode and Ion mode tick untick the ION Mode checkbox 4 To set the collector bias move the Collector Bias slider Operating mode Detected signals FIB mode EHT Typical WD Detector settings SE mode Secondary electrons SEM 100 V to 30 kV max 5 mm Collector voltage 0 V to 1500 V Best detection 300 V to 4...

Страница 89: ...ble method for materials that cannot be pro cessed with the focused ion beam e g quartz masks Another advantage is that there is no impairment of surfaces i e no generation of amorphous layers Precursor gas Application Insulator SiO2 Deposition Platinum Pt Deposition Water reactive products Etching of material that contains carbon e g diamond like carbon layers DLC Fluorine XeF2 Etching of Si cont...

Страница 90: ...bstance is volatile at room temperature Procedure 1 Open the Panel Configuration Bar 2 Double click Gas Injection System The Gas Injection System panel opens 3 Activate the Reservoir checkbox of the precursor you wish to work with The Capillary checkbox is activated automatically It is recommended that the heating remains switched on all the time to ensure stable conditions because it can last som...

Страница 91: ...specimen Make sure to position the specimen surface at a safe working distance Procedure 1 Open the Panel Configuration Bar 2 Double click E Beam Deposition and Etch The E Beam Deposition and Etch panel opens A deposition object is shown in the image area 3 Resize the deposition object to the appropriate size 4 Select the required precursor 5 Set a Gas Wait Time 6 Set a Total Duration Time 7 Set a...

Страница 92: ... Before you can make use of the CrossBeam functions you have to prepare the workstation 6 8 1 1 Getting started Procedure 1 Switch on the workstation 2 Start the SmartSEM user interface and log in 3 Initialise the specimen stage 4 Load the specimen chamber with an appropriate specimen 5 Evacuate the specimen chamber 6 Switch on the SEM a Switch on the gun b Switch on the EHT 7 Ensure the Specimen ...

Страница 93: ...eucentricity is adjusted by using the M axis the working distance will be changed during the eucentricity setup Ensure the working distance is 10 mm or more Procedure 1 Open the Panel Configuration Bar 2 Double click FIB Daily Adjust The FIB Daily Adjust panel opens 3 To show the crosshairs activate the Cross hairs checkbox 4 Center a characteristic feature in the middle of the screen i e in the m...

Страница 94: ...he FIB gun pressure is better than 5x10 7 mbar IMPORTANT Do not change the FIB Extr Target value Changing this value would require a complete adjustment of the FIB probe currents Procedure 1 In the SEM Control panel check the current status of the system vacuum To be able to switch on the ion beam the sys tem vacuum has to be 5 x 10 5 mbar or better 2 In the FIB toolbar click the FIB icon The FIB ...

Страница 95: ...ich can have values between 0 V and 2000 V 5 If necessary regenerate the ion source by heating refer to section 8 3 2 2 IMPORTANT From time to time the gallium emitter has to be regenerated by heating The heating pro cedure removes the gallium oxide which has been created during operation or during longer breaks 6 If Aperture Status is uninitialised click Initialise The aperture initialisation may...

Страница 96: ...ve several colours Green background The emission current equals the target 0 1 µA Yellow background The emission current differs from the target by more than 0 1 µA Red background The suppressor voltage has almost reached its limit The emission target can not be reached IMPORTANT If you intend to deposit platinum with the optional GIS you should start heating the plati num precursor now refer to s...

Страница 97: ...In SEM view centre the feature 7 Open the Panel Configuation Bar 8 Double click FIB Daily Adjust The FIB Daily Adjust panel opens 9 Tilt the stage to 54 10 Click Coincidence 11 Follow the instructions in the wizard 12 Click Start 13 To centre the feature only move the stage Do not use the centre point function because it is based on Beam Shift and can therefore have a negative effect on the alignm...

Страница 98: ...rtSEM XB Preconditions Workstation has been prepared Stage is tilted to 54 6 8 2 1 Heating the platinum reservoir Procedure 1 Heat the precursor a In the FIB Control panel select the GIS tab b Activate the Reservoir checkbox of Plati num The Capillary checkbox is activated auto matically There is a temperature gradient between reservoir lowest temperature capillary and nozzle highest temperature T...

Страница 99: ...cuum level exceeds and decreases abruptly when the reservoir valve is opened Outgassing basically consists of a series of open and close cycles to let small amounts of gas out of the reservoir Procedure 1 Switch off the SEM EHT 2 Switch off the FIB EHT 3 Open the Panel Configuration Bar 4 Double click Gas Injection System The Gas Injection System panel opens 5 Ensure that the Temperature Control c...

Страница 100: ...on source and ion source Before starting the outgassing procedure Ensure that EHT and FIB EHT are switched off Ensure that SEM Column Valve and FIB Gun Valve are closed 11 To start the outgassing procedure click Go 12 Monitor the system vacuum by observing the System Vacuum value in the Outgassing panel If after the 5th loop the vacuum has not reached 2 x 10 5 mbar or better which is the pressure ...

Страница 101: ... 6 9 1 1 Printing help texts Procedure 1 To print help texts click the printer icon in the help window 6 9 1 2 Bringing help texts to the foreground Procedure 1 If you want to display help texts always in the foreground in the menu select Help Help Always On Top 6 9 2 Calling the context sensitive help Procedure 1 On the menu select Help What s This The mouse cursor is equipped with a question mar...

Страница 102: ...4 Using the step by step guides The step by step guides provide quick information about operation sequences 6 9 4 1 Getting started Procedure 1 On the menu select Help Getting started 2 Click the topic of interest 6 9 4 2 Frequently used operation sequences Procedure 1 On the menu select Help How To 2 Click the topic of interest 6 9 5 Calling the short cuts help Using keyboard short cuts you can o...

Страница 103: ...martSEM 6 9 6 1 Version history The Release Notes summarise important information about the software version history New functions bug fixes and special features of the different versions are explained Procedure 1 On the menu select Help Release Notes 6 9 6 2 About SmartSEM Procedure 1 On the menu select Help About SmartSEM ...

Страница 104: ... messages that may appear during the log off procedure Procedure 1 Logging off if there are no applications active in the SmartSEM UI 1 On the menu select File Exit A window appears asking for confirmation to close the session 2 To log off from SmartSEM click Yes The EM Server remains active To go back to SmartSEM click No Procedure 2 Logging off when there are applications active in the SmartSEM ...

Страница 105: ...ure 1 Switch off the EHT see section 6 10 2 Log off from SmartSEM see section 6 10 2 3 Close the EM Server A window appears asking for confirmation to close the session 4 Click Yes 5 Shut down the PC 6 At the plinth of the microscope press the STANDBY button The yellow STANDBY push button is blinking then permanently on We also recommend the STANDBY mode to store the microscope In this case select...

Страница 106: ...g off from SmartSEM see section 6 10 2 4 Close the EM Server A window appears asking for confirmation to close the session 5 Click Yes 6 Shut down the PC 7 At the plinth of the microscope press the OFF button The yellow STANDBY button is blinking then the red OFF button is permanently on Computer electronic components and vacu um system are switched off The electron opti cal column is partially ve...

Страница 107: ... from all components with the risk that sensitive high voltage parts may get damaged due to the rapid voltage fail So either of these procedures should only be performed in an extreme emergency where personal health is directly involved 6 13 1 Switching off in an emergency with EMO option installed Procedure 1 Press the EMO button on the top of the plinth All mains power is immediately cut off fro...

Страница 108: ...itch on the microscope Procedure 1 If EMO button available pull it to release the button 2 If necessary turn the MAIN switch 1 in posi tion ON 3 Only with EMO option Underneath the MAIN switch press the START button 2 At the front of the plinth the red OFF button turns on 4 Press the ON button 3 The green ON button is blinking during all in ternal components are switched on and initialized afterwa...

Страница 109: ...pection Preventive maintenance work Change of consumables and chemicals Equipment test Verification run IMPORTANT The mainenance work will be accomplished according to standardized maintenance plans and will be recorded by the ZEISS service representative 7 2 Maintenance intervals The maintenance intervals depend on the period of application of the device 24 7 annually 8 5 semiannually IMPORTANT P...

Страница 110: ...is no warranty on field emission guns manufacturers do not guarantee any lifetime Interval Component Part Every 6000 h1 filament on Field emission gun1 Copper seal at gun head As required or yearly and after exchange of field emission gun Standard aperture Anode aperture Extractor aperture Anode aluminium seal Copper seal at gun head Yearly or as required Pre vacuum pump Yearly SE2 detector In len...

Страница 111: ...m pump Vacuum Microscope does not vent No nitrogen No compressed air Check nitrogen supply Check compressed air supply System vacuum Vac ready OK is indicated abnormally fast Penning gauge has not been identified correctly Restart the microscope If this does not solve the problem call your local Carl Zeiss service engineer System vacuum Bad system vacuum Chamber door seal does not seal tightly Rep...

Страница 112: ...r to have the field emis sion gun replaced Image quality Image is bad at low EHT e g 1 kV Working distance is too long Reduce working distance to a maximum of 7 mm In lens image In lens image is noisy Working distance is too long Reduce working distance In lens image No In lens image EHT exceeds 20 kV Reduce EHT to a maximum of 20 kV SE2 image SE2 image is noisy Scintillator is used up Call the lo...

Страница 113: ... engineer 8 2 2 Replacing the chamber door seal Reasons Chamber door does not close tightly bad chamber vacuum CAUTION Suffocation hazard due to lack of oxygen since the specimen chamber is ventilated with nitrogen Avoid inhaling the air from within the specimen chamber Ensure the area around the microscope is sufficiently ventilated IMPORTANT Contamination caused by fingerprints can lead to vacuu...

Страница 114: ...Q çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ Ü ãÄÉê 3 Remove the chamber door o ring 1 4 Insert the new chamber door o ring 5 Close the chamber door 6 Pump the specimen chamber 1 ...

Страница 115: ...e menu select Tools Goto panel The Panel Configuration Bar opens 4 Double click Bakeout The Bakeout dialog is shown 5 If the Full service bakeout checkbox is avail able disable the Full service bakeout check box Full service bakeout includes column heating that may lead to column misalignment 6 In the drop down list select one of the different bakeout cycles Quick 2 hours heating 1 5 hours cooling...

Страница 116: ...ick the FIB icon The FIB Control panel opens The life of the ion source is indicated as µAh IMPORTANT When the lifetime of the ion source approaches 3000 µAh you should contact the Carl Zeiss service to have the ion source replaced 8 3 2 2 Regenerating by heating The heating procedure is used if the suppressor voltage has reached 0 V while a probe current of 2 µA cannot be maintained any more or i...

Страница 117: ... x 10 7 mbar CAUTION Risk of arcing Danger of damaging the ion source Before switching on the ion beam ensure the FIB gun pressure is better than 5 x 10 7mbar 2 To switch on the ion gun click ON CAUTION Risk of damaging the ion source Ensure the FIB gun is switched ON before you start the heating procedure 3 Click Heating ...

Страница 118: ...NNU çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ çäìãå The FIB Ga Source Heating dialog opens 4 Click FIB Ga source begin heat ...

Страница 119: ...solve the problem contact your local Carl Zeiss service for assistance IMPORTANT Tripped circuit breakers may be a hint for an electrical problem in the microscope or with a electrical component connected to one of the IEC Plugs at the panel of the AC Unit If a circuit breaker is tripping again switch off the microscope completely and contact the Carl Zeiss service for assistance No Value Circuit ...

Страница 120: ...NOM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...

Страница 121: ...çéÉ çìí çÑ çéÉê íáçå 9 Shutdown and disposal 9 1 Putting the microscope out of operation If the microscope will not be used for an extended period of time e g several months it should be put out of operation Contact your local Carl Zeiss service engineer to have the microscope put out of operation ...

Страница 122: ...l modules Be careful to separate the materials properly when you dispose of the microscope Materials e g metals non metals composite materials process materials Electronic scrap material e g transformers circuit boards cables Comply with national and regional waste disposal ordinances Description Material Disposal Schottky field emitter Tungsten ceramics Used up emitters may be returned to the emi...

Страница 123: ...er A list of Carl Zeiss locations and authorised service partners can be found at http www zeiss com microscopy 10 1 Important consumables Item Part no Schottky field emitter gun By DENKA 0302 460 Multihole aperture On request Anode aperture On request Extractor aperture 348520 0097 001 Anode aluminium seal 348520 0266 001 Copper seal gun head single use 546 290 Tip seal for pre vacuum pump BOC Ed...

Страница 124: ...10 2 Important spare parts 10 3 Tools and accessories Item Part no Chamber door o ring 476 960 Item Part no Faraday cup 348342 8055 000 3 mm Allen key 0015 247 1 5 mm Allen wrench 151 883 Small pliers Sample holders Refer to sample holder catalogue Stubs Tweezers Cloth lint free Gloves lint free ...

Страница 125: ...Electromagnetic compatibility EMO Emergency off FIB SEM Field emission scanning electron microscope GUI Graphical user interface H Height HV High vacuum IGP Ion getter pump M M axis MSDS Material safety data sheet PC Personal computer PE Protective earth R R axis SE Secondary electron T T axis U Voltage UIF User interface VP Variable pressure VPSE Variable pressure secundary electron W Width WD Wo...

Страница 126: ...NOS çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NNK ÄÄêÉîá íáçåë ...

Страница 127: ...profile mode used to adjust the filament The emission image is a shadow image In lens SE image of the multi hole aperture holes generated by scanning the electron beam above the multihole aperture In this process the true size of the holes is masked while parts of the specimen can be visible through the aperture holes Extractor Positive electrode that attracts electrons from the filament Faraday c...

Страница 128: ...es photons while releasing the previously absorbed energy SEMI S2 Standard developed by Semiconductor Equipment and Materials Interna tional SEMI Primary electrons Narrowly bundled beam of accelerated electrons that hit the specimen surface X ray Type of ionising radiation that is generated during the operation of elec tron microscopes ...

Страница 129: ...dards Directive 2004 108 EC Standard EN ISO 12100 Standard EN 60204 1 Standard EN 61010 1 Standard EN 61000 6 4 Standard EN 61000 6 2 Unauthorised modifications of the machinery will cancel this declaration CE marking The CE conformity marking is located on the type plate of the machinery Notice to users Denomination Field emission scanning electron microscope with focused ion beam FIB SEM Model C...

Страница 130: ...NPM çÑ NPQ fåëíêìÅíáçå j åì ä êçëëÄÉ ã PQM ÉåMOE loF NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...

Страница 131: ... 89 Disposal 122 Documents related 7 Dose rate 13 Drift 111 Dual joystick controller 28 E EHT 33 Electron optical column 25 Electron optics 33 Emergency off 107 112 EMO 107 EMO box 25 Evacuating 32 Exhaust line 52 Extractor 33 F Faraday cup 84 127 FIB column 25 FIB imaging 35 FIB Mode 34 Filament 33 110 Filtering grid 45 Fluorine 89 Focus wobble 78 Fuses 119 G Gas ballast 111 Gas injection system ...

Страница 132: ...afety 8 11 13 Safety devices 16 Safety instruction 8 Safety labels 19 Schottky field emitter 33 Scintillator 110 128 SE2 detector 36 37 86 SEM imaging 34 SEMI standard 18 Service 12 13 111 Service area 52 SESI 88 SESI detector 36 46 Shutdown 121 SmartSEM 10 Software 26 Software Manual 7 Solid waste 122 Spare parts 124 Specifications 47 Specimen chamber 25 Specimen current 84 Specimen stage 40 Stab...

Страница 133: ......

Страница 134: ... Cambridge Cambridgeshire CB1 3JS UK microscopy zeiss com Carl Zeiss Microscopy LLC One Zeiss Drive Thornwood NY 10594 USA microscopy zeiss com Plus a worldwide network of distributors www zeiss com microscopy Due to a policy of continuous development we reserve the right to change specifications without notice Carl Zeiss Microscopy GmbH ...

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