VQ=çÑ=NPQ
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM
=
ÉåMOE`loF
SK=léÉê~íáçå
`êçëëÄÉ~ã=çéÉê~íáçå
6.8.1.3. Switching on the ion beam (FIB)
CAUTION
Risk of damaging the ion source due to arcing.
Before switching on the ion beam, ensure the FIB gun pressure is better than 5x10
-7
mbar.
IMPORTANT
Do not change the FIB Extr. Target value.
Changing this value would require a complete adjustment of the FIB probe currents.
Procedure
1
In the
SEM Control
panel, check the current
status of the system vacuum.
To be able to switch on the ion beam, the sys-
tem vacuum has to be 5 x 10
-5
mbar or better.
2
In the
FIB
toolbar, click the
FIB
icon.
The
FIB Control
panel opens.
Содержание Crossbeam 340
Страница 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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