Zeiss Crossbeam 340, Инструкция по эксплуатации

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For more information about
In-lens Duo
detector or SESI detector refer to section 3.4.8.
For more information about aSTEM detector or the BSD4 detector refer to the corresponding in-
struction manual.
3.3.4.1. In-lens SE detector
The In-lens SE detector ( 1 ) is a high efficiency detector for high resolution SE imaging. It is located
above the objective lens ( 3 ) and detects directly in the beam path ( 2 ). The detection efficiency of
this detector results from its geometric position in the beam path and from the combination with
the electrostatic/electromagnetic lens.
SE2 detector
(Everhart-Thornley type)
Standard SE2 Topography
VPSE detector Standard SE2 Topography in VP mode
Optional detectors Configuration
Detected
signals
Typical application
In-lens Duo detector with
filtering grid
(in-column detector)
Optional SE,
BSE
Surface structure
Material contrast
SESI detector , integrated Optional SE2,
Secondary
Ions (SI),
BSE Channelling contrast
(crystal orientation), com-
positional contrast
aSTEM detector Optional Transmitted
electrons Diffraction contrast
compositional contrast
BSD4 detector Optional BSE Compositional contrast
Standard detectors Configuration
Detected
signals
Typical application