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Focus
Working Distance
: Range from 1 mm - 50 mm, depending on
acceleration voltage.
Manual Control
: Coarse and fine control. Sensitivity related to magnifica-
tion
Automatic Focus Control
Focus Compensation
: Automatic compensation to minimise focus
changes over the entire acceleration voltage and probe current range
Dynamic Focus
: For correction of focus on tilted specimens
Rotation Compensation
: Automatic correction of apparent image rotation
with changes in working distance
Stigmator
Type
: Eight pole electromagnetic
Control
: X and Y adjusted by using Hardpanel or PC mouse
Apertures
High Resolution option (20 nA)
7 apertures
Sizes
: 7, 10, 15, 20, 30, 60 120 µm
High Current option (100 nA)
6 apertures
Sizes
: 10, 20, 30, 60, 120, 300 µm
Electromagnetic selection; Precise alignment due to retrievable coordi-
nates.
Focus Wobble
: For assistance in aperture alignment, with adjustable
amplitude and speed.
Beam shift
Control
: Adjustment with hardpanel or PC mouse. For precise adjustment
of image position at high magnifications.
200 µm (±100 µm) at 20 kV, WD = 8.5 mm
Specimen chamber and stage
Specimen chamber
Dimensions
: 330 mm inner diameter and 270 mm height.
Free Accessory Ports
: 18 (for EDS, EBSD, SIMS, manipulators etc.)
Chamber Viewing
: Two infrared CCD cameras provided as standard
Analytical Working Distance
: 8.5 mm
Coincidence point of electron and ion beam
: 5 mm (SEM), 12 mm (FIB)
Column Arrangement
: The angle between electron-optical and focused
ion beam-column is 54 degrees.
EDS Take-off Angle
: 35 degrees.
Electron optics
Содержание Crossbeam 340
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