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6.8. Crossbeam operation
It is assumed that the operator is already familiar with general functions of SmartSEM
®
and the
operation of the FESEM.
IMPORTANT
For general information about SmartSEM
®
refer to the Software Manual SmartSEM
®
.
For more information about crossbeam operation refer to the SmartFIB online help.
6.8.1. Preparing the workstation
Before you can make use of the CrossBeam
®
functions, you have to prepare the workstation.
6.8.1.1. Getting started
Procedure
1
Switch on the workstation.
2
Start the SmartSEM
®
user interface and log in.
3
Initialise the specimen stage.
4
Load the specimen chamber with an appropriate specimen.
5
Evacuate the specimen chamber.
6
Switch on the SEM:
a
Switch on the gun.
b
Switch on the EHT.
7
Ensure the
Specimen Current Monitor
is switched off:
a
From the menu, select
Tools/Goto Panel
.
b
Double-click
Specimen Current Monitor
.
c
Deactivate the
SCM On
checkbox.
This ensures that the touch alarm function
is active.
8
Bring the image into focus.
Содержание Crossbeam 340
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