NNS=çÑ=NPQ
fåëíêìÅíáçå=j~åì~ä=`êçëëÄÉ~ã=PQM
=
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UK=qêçìÄäÉëÜççíáåÖ
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7
To start the bakeout procedure, click
Bakeout
Start
.
8
To continue working with the microscope after
the Bakeout, switch on the gun .
8.3.2. Ion source
8.3.2.1. Checking the lifetime of the ion source
The ion source is a consumable that is used up during operation.
In order to have a clue of the ion supply you should check the ion source lifetime.
Procedure
1
In the
FIB
toolbar, click the
FIB
icon.
The
FIB Control
panel opens.
The life of the ion source is indicated as
µAh
.
IMPORTANT
When the lifetime of the ion source approaches 3000 µAh you should contact the Carl Zeiss
service to have the ion source replaced.
8.3.2.2. Regenerating by heating
The heating procedure is used
•
if the suppressor voltage has reached 0 V while a probe current of 2 µA cannot be maintained
any more or
•
if the ion source does not start emitting.
Prerequisite
•
Requires the Supervisor privilege.
•
To be performed only by specially trained advanced operators.
•
Requires user level
Service
.
Procedure
1
In the
FIB Control
panel, in the
FIB
tab, check the
FIB Gun Pressure
.
Содержание Crossbeam 340
Страница 1: ...Crossbeam 340 Crossbeam workstation Instruction Manual ...
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Страница 133: ......