Zeiss Crossbeam 340, Инструкция по эксплуатации

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7 In the SEM Column Valve section, click
Close .
The column chamber calve in the SEM is
closed.
The FIB gun valve is closed simultaneously.
8 Click the Open Time text field and enter
2 seconds.
9 Click the Close Time text field and enter a val-
ue of about 5 to 10 seconds.
10 Click the Number of Loops field and enter 5 .
CAUTION
Risk of damaging electron source and ion source
Before starting the outgassing procedure:
Ensure that EHT and FIB EHT are switched off.
Ensure that “SEM Column Valve“ and “FIB Gun Valve“ are closed.
11 To start the outgassing procedure, click Go .
12 Monitor the system vacuum by observing the
System Vacuum value in the Outgassing
panel.
If, after the 5th loop, the vacuum has not
reached 2 x 10
-5
mbar or better, which is the
pressure necessary for deposition, repeat the
procedure.
In this case, you should increase the number
of loops in future outgassing procedures.
The outgassing procedure ends automatically.
If you wish to stop the procedure prematurely, click Stop.