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6.8.2. Gas assisted deposition: Platinum (with GIS upgrade only)
Requires FIB column and GIS.
A common ion-beam induced deposition is the deposition of platinum, which serves e.g. as a sur-
face protection layer. This section summarizes the procedure for the platinum depsition as a mod-
el.
IMPORTANT
For details on the deposition of other materials, refer to the Software Manual SmartSEM
®
XB.
Preconditions
•
Workstation has been prepared
•
Stage is tilted to 54°
6.8.2.1. Heating the platinum reservoir
Procedure
1
Heat the precursor:
a
In the
FIB Control
panel, select the
GIS
tab.
b
Activate the
Reservoir
checkbox of
Plati-
num
.
The
Capillary
checkbox is activated auto-
matically.
There is a temperature gradient between reservoir (lowest temperature), capillary and nozzle
(highest temperature). This will guarantee that substances will not have the chance to condense
in any part of the gas line.
IMPORTANT
It is recommended to leave the precursor heaters always heated.
2
If required, initialise the GIS micro stage:
a
In the
GIS
tab, click
Stage Initialise
.
Содержание Crossbeam 340
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