K465i Operations and Maintenance
P/N 1212831 Rev C
Page 5-146
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©
2012
Veeco Instruments, Inc. Confidential
All Rights Reserved
Perform a leak check of the particle filter.
62. Open the manual valves just before the Process Pumps.
63. After about 1 minute, open the Throttle Gate Valve to 20% by turning the key on the Exhaust Valve
Throttle Control Module to
Local
and pressing the
Open
button until the display reads 20%.
64. After about 1 minute, open the pneumatic ball valve in the Process Pump exhaust line.
65. Pump exhaust line down to vacuum.
66. Isolate the Ebara(s), using the manual isolation valve.
67. Connect the leak detector to the leak check port located between the Throttle Gate Valve and the
particle filter.
68. Pump down leak check port using the leak detector.
69. Leak check the leak check connection port. Once the connection is leak tight, open leak check port
manual valve.
70. Leak check the particle filter housing by spraying helium around the particle filter front plate, to ensure
that the seals are tight. Refer to the procedures in Section 16, Leak Checking for further details.
71. Close off the leak check port manual valve, remove leak detector, and cap leak check port.
72. Re-open the Process Pumps with the manual isolation valves.
73. Remove any air between the leak check port manual valve and the cap, by opening the valve and
allowing the process pump to draw it out. After one to two minutes close the valve.
74. Place the system in
Idle
Startup Following a Maintenance Shutdown
located in Operations, MaxBright GaN System Startup and K465i GaN System Startup section.
Note:
It is recommended that a thorough Reactor Chamber Bake-out is performed prior to
utilizing the system for product growth runs after this procedure is performed.
Dispose of all hazardous material
75. Place the spent particle filter in the 5 gallon bucket with mineral oil or sealable metal container upon
removal from the system. Then place all of the hazardous materials (the spent filter, soiled wipes, etc.)
into clear ziplock bags. Identify the bagged materials with the proper identification (indicate material,
date, initials, etc.). A tag or label may be utilized, just assure that it is securely fastened to the bag.
76. Dispose of the hazardous material in accordance with facility procedures and the local environmental
regulations.
77. Perform any general housekeeping needed around the maintenance area.
78. Complete any required documentation (i.e. logs, reports, etc).
LEAK CHECKING THE HOUSING ASSEMBLY AND CHAMBER
The following procedure outlines specific leak checking steps for the particle filter. Refer to
Section 5.9, Leak Checking, for general leak checking procedures and strategies.
Procedure 5-20: Checking the Housing Assembly and Chamber for Leaks
1. Open the manual valve just before the Process Pump.
2. After about 1 minute, open the Throttle Gate Valve to 20% by turning the key on the Exhaust Valve
Throttle Control Module to
Local
and pressing the
Open
button until the display reads 20%.
