Ulvac UTM-MS Series, Инструкция по эксплуатации

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SECTION 9 TROUBLESHOOTING
9.1
Vacuum Pressure Rise
A rapid rise of vacuum pressure in the turbo molecular pump causes the internal motor of the turbo
molecular pump to start braking and the ALARM lamp lights.
9.2
Abnormal Noise and/or Vibration
Should the turbo molecular pump ever generate abnormal noise and/or vibration, the turbo
molecular pump operation is to be stopped immediately.
But there is possible that a race of touch-down bearing (Fig. 3-1 (9)) may make sounds for seconds
when the pump internal pressure gets back to atmospheric pressure using air (or non-activity gas). This
phenomena is not abnormal and make no damage to the pump, because the air whirlpool sometimes
occurs and then makes the touch-down bearing rotate slightly.