Ulvac UTM-MS Series, Инструкция по эксплуатации

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iv
Introduction
If the equipment is used in a manner not specified by the manufacturer, the protection provided
by the equipment may be impaired.
After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may
result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by
stopping the pump and dispersal of parts.
Avoid to install the pump at the following places.
(1)Place where the pump is inevitably exposed to significant vibration and impact.
(2)Unstable place.
(3)Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation. This pump is not connected to ground. Please provide PE
(Protective earth) connection to the chassis of pump in final application. This pump is not an
explosion-proof product. This pump is not intended to be used in a potentially explosive
atmosphere.
The pump surface may get hot, there are risk of burn.
Prevent the installation, operation, maintenance, and service personnel from contacting the
pump surface easily in all tasks that they are intended to perform.
WARNING
CAUTION
CAUTION
CAUTION