Ulvac UTM-MS Series, Инструкция по эксплуатации

Страница: 33 / 61

17
4.1 Pump Main Unit
Air cooled type
Model UTM300A-MS UTM400A-MS
Inlet flange VG100 / ICF152 VG150 / ICF203
Outlet flange KF25
Cooling method Air cooled
Ultimate pressure (after baking) (Note 1) 10 -7 Pa order
Maximum allowable inlet pressure 200Pa
Maximum allowable outlet pressure 400Pa
Pumping speed
(Note 2)
N
2
He
H
2
320 L/s
340 L/s
320 L/s 420 L/s
360 L/s
340 L/s
Compression ratio
N
2
He
H
2
1×10 9
8×10
4
1×10 4
Rated speed 45,000rpm
Start-up time 5 minutes or less
Mounting position In any desired direction (Refer to Section 5)
Bake-out temperature at an inlet flange 120 degrees C. or less
Vibration level (by ULVAC KIKO's method) 0.012 μ m or less (0-peak)
Noise 60 dB(A) or less
Recommended flow rate of purge gas 20 to 30 mL/min (Note 3)
Recommended pumping speed of
backing pump in case of gas purge
200 L/min or more
Admissible ambient
magnetic field Radial direction
Axial direction 3 mT
15 mT
Mass 14 kg
（ Note 1 ） When using a metal gasket at the inlet flange. When using an o-ring gasket, the
ultimate pressure is 10 -7 Pa order.
（
Note 2
）
Without a protective net. Pumping speed for N2 gas when protective net is used is
UTM300A-MS: 300 L/s, UTM400A-MS: 400 L/s.
（ Note 3 ） mL/min: volume flow rate at 0 degrees C., 1 atm (Compatible with SCCM).