Ulvac UTM-MS Series, Инструкция по эксплуатации

Страница: 47 / 61

31
6.2 Start-up Preparation
6.2
Start-up Preparatio
Please select "LOCAL" or "REMOTE" at the switch of the controller.
For more information regarding operation, please refer to the controller Instruction Manual.
6.2.1 Start-up Preparation
(1) Feed the cooling water into the cooling line (for cooling water method).
(2) Turn on the POWER switch of the controller and check if the POWER lamp lights.
And the rotor of the turbo molecular pump is levitated by the magnetic bearing.
(3) Evacuate the turbo molecular pump by using a backing vacuum pump.
(4) Start-up preparation is complete if the pressure in the turbo molecular pump reduces
below 200 Pa.
6.3
Start-up
6.3.1 Start-up Sequence
(1) Start-up begins when the Section 6.2.1 "Start-up Preparation" is complete.
(2) For more information regarding an operation, please refer to the controller Instruction Manual.
REFERENCE
A pressure check using the vacuum gauge attached to the pump inlet shows that the pressure
reduces gradually after rotation starts.
。