xiii
Section 7 GAS PURGE
Section 8 TURBO MOLECULAR PUMP RECONDITION
8.1
Recommended Maintenance Intervals. . . . . . . . . . . . . . . . . . . . . . . . . . . 38
8.2
Turbo Molecular Pump Decontamination. . . . . . . . . . . . . . . . . . . . . . . . . .39
8.3
Touch-down Bearing Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .39
8.4
Check of the Rotor Blades.. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .39
8.5
Turbo Molecular Pump Return Request . . . . . . . . . . . . . . . . . . . . . . . . . . .40
Section 9 TROUBLESHOOTING
9.1
Vacuum Pressure Rise. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .44
9.2
Abnormal Noise and/or Vibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .44
Содержание UTM-MS Series
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Страница 17: ...1 1 Outline 1 2 Descriptions 1 2 1 Outside Drawing 1 2 2 Standard Accessories OUTLINE AND DESCRIPTIONS...
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Страница 25: ...2 1 Pump Main Unit IDENTIFICATION AND FUNCTION...
Страница 27: ...3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping CONSTRUCTION AND PRINCIPLE...
Страница 31: ...4 1 Standard Specifications for Pump Unit SPECIFICATIONS...
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Страница 51: ...GAS PURGE...
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Страница 59: ...9 1 Vacuum Pressure Rise 9 2 Abnormal Noise and or Vibration TROUBLESHOOTING...
