Ulvac UTM-MS Series, Инструкция по эксплуатации

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SECTION 7 GAS PURGE
This turbo molecular pump incorporates a gas purge port (Fig. 2-1 (2)). This turbo molecular
pump need to flow the purge gas for protection of the bearings, when it evacuates a lot of
corrosive gas. The proper purge gas flow rate is between 20 and 30 mL/min.
Joint Orifice size
KF10
（
Dust cap
）
φ0.5 mm
Fig. 7-1 shows an example of a gas purge piping diagram. Use a filter element size of 5 μ m, or
less. Use flow control valve to control the flow rate.
Gas feed start After starting backing vacuum pump; before evacuating
process gas
Gas feed stop After exhausting process gas sufficiently; before stopping
backing vacuum pump
Type of gas Nitrogen (Purity > 99.99 %)
Fig. 7-1 Gas Purge Method (adaptor with Φ0.5 mm orifice)