Ulvac UTM-MS Series, Инструкция по эксплуатации

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SECTION 8 TURBO MOLECULAR PUMP RECONDITION
8.1
Recommended Maintenance Intervals
It is different for deterioration progress speed of each part changes greatly by pump condition
(Magnetic-bearings, sensors and motor need to change new ones per 3-5 years in addition in
using corrosive gas, rotor temperature rises up depending on process, therefore it’s possible the
rotor life is short). Refer to the following list as overhaul of each process.
These are not terms of warranty.
Process
Recommended maintenance intervals
1
Non-active gas (Sputtering, Evaporation and so on) and
Light load process
3 years
2
CVD, Ion implanter and process of having deposition
pump inside
1 - 2 years
3
Etching process 6 months - 1 year
(1) Recommended maintenance intervals for parts
1) Non-active gas and Light load process
Part name
Recommended maintenance intervals
1 Touch down bearing 3 years
2 Shaft 7 years
It has a possibility of under 2 years
(Dependent on condition)
3 Rotor
4 Motor
7 years
5 Magnetic bearing parts
6 Cooling fan (Note 1)
5 years
7 Heater (Note 1)
8
Pipe for water cooling (In case of copper material only) (Note 1)
3 - 5 years
2) Use of corrosive gas
Part name
Recommended maintenance intervals
1 Touch down bearing 1 years
2 Shaft
5 years
It has a possibility of under 1 years
(Dependent on condition)
3 Rotor
4 Motor
5 years
5 Magnetic bearing parts
6 Cooling fan (Note 1)
5 years
7 Heater (Note 1)
8
Pipe for water cooling (In case of copper material only) (Note 1)
3 - 5 years
9 Orifice (Note 1)
1 years
(Note 1) Only as for the adaptation model.