Ulvac UTM-MS Series, Инструкция по эксплуатации

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8.5 Turbo Molecular Pump Return Request
When pump is removed from a equipment, drain the water from water pipe. If remained water
leak from water pipe, pump body will be corroded.
After the water drained, shut water pipe by the cap which is attached at shipment.
Remove the pump in the manner shown in Fig. 8-1.
Fig. 8-1 Way to Remove the Pump
When the pump is returned, please pack it surely so as not to damage it by the impact, the
vibration, and the high temperature and humidity environment, etc. from the outside.
Please use the packing materials which were used at shipment from ULVAC KIKO, or use the
packing materials having a same quality or better.
CAUTION
CAUTION