xii
Section 3 CONSTRUCTION AND PRINCIPLE
3.1
Pump Construction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12
3.2
Principle of Turbo Molecular Pumping . . . . . . . . . . . . . . . . . . . . . . . . . . . .12
Section 4 SPECIFICATIONS
4.1
Standard Specifications for Pump Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . .16
Section 5 INSTALLATION
5.1
Installation . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20
5.1.1
Pump Mounting Direction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . 20
5.1.2
Installation of the Pump . . . . .. . . . . . . . . . . . . . . . . . . . . . . . . . .. .. 21
5.1.3
Example of Piping Connection. . . . .. . . . . . . . . . . . . . . . . . . . . . .. . 25
5.1.4
Center of Gravity of the Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . .26
5.2
Connection of the Pump to the controller . . . . . . . . . . . . . . . . . . . . . . . . . . .27
5.3
Interlock for Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .28
5.4
Notes on Transportation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . .28
Section 6 OPERATION
6.1
Outline . .. . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .30
6.1.1
Introduction . . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . .. . . 30
6.2
Start-up Preparation . . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .31
6.2.1
Start-up Preparation. . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . .. . . 31
6.3
Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .31
6.3.1
Start-up Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . . 31
6.4
Shutting Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .32
6.5
Baking Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .33
Содержание UTM-MS Series
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Страница 9: ...vii Introduction Location of Label...
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Страница 17: ...1 1 Outline 1 2 Descriptions 1 2 1 Outside Drawing 1 2 2 Standard Accessories OUTLINE AND DESCRIPTIONS...
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Страница 25: ...2 1 Pump Main Unit IDENTIFICATION AND FUNCTION...
Страница 27: ...3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping CONSTRUCTION AND PRINCIPLE...
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Страница 51: ...GAS PURGE...
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Страница 59: ...9 1 Vacuum Pressure Rise 9 2 Abnormal Noise and or Vibration TROUBLESHOOTING...