Ulvac UTM-MS Series, Инструкция по эксплуатации

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8.2 Turbo Molecular Pump Decontamination
(2) Recommended maintenance intervals for other parts
1) It has the possibility that the following part is exchanged, when cleaning TMP.
Part name
55-pin Receptacle
2) Others
When exchanging parts, it has possibility that other parts are exchanged for improving a
reliability (Example: Old type lower and upper radial sensor had changed dimensions for
reliability. When exchanging them, these housing must also be exchanged).
8.2
Turbo Molecular Pump Decontamination
All expenses incurred with the decontamination of the turbo molecular pump are the
responsibility of the customer.
8.3
Touch-down Bearing Replacement
The touch-down bearing (Fig. 3-1 (9)) is the only component of ULVAC KIKO's turbo molecular
pump that is subjected to friction and wear, normally occurring only during electrical power
failure. Repeated and/or frequent rotor touch down will cause wear and bigger rotational
resistance and require replacement of touch down bearings.
The replacement of the touch-down bearing is done only by ULVAC KIKO or an approved service
company.
8.4
Check of the Rotor Blades
Rotor blades of turbo molecular pump are high-speed rotor made of aluminum alloy. It has the
possibility that material strength deteriorates, specially when corrosive gas is evacuated. Regular
check (Customer is liable for the cost) by ULVAC KIKO or a ULVAC KIKO approved/authorized
service center is suggested (Every one year is recommended). ULVAC KIKO and/or the service
center investigate rotor blades in every overhaul task and check and suggest a rotor replacement
to customers if any cracks are found out.