Ulvac UTM-MS Series, Инструкция по эксплуатации

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5.1 Installation
It is recommended to fix the inlet flange of the turbo molecular pump to the flange of vacuum
chamber, and the base bottom of the pump to the frame of host equipment (Refer to Fig. 5-3).
When you fix the pump, use the bolts regulated grade, size, number and tightening torque
(Refer to Table 5-1 and Table 5-2). And use all the bolt-holes of the inlet flange of the pump. Refer
to Fig. 5-4 about usage of the bolt.
The sets of half-thread bolt and nut should be used to fix the inlet flange of the pump. Make
installation with the cylindrical part of the bolt (not thread part) fit in the mating section of flanges.
When you connect piping or valve between the chamber and the pump, please fix the same
method as the inlet flange
【 recommend 】
Fixed both by the inlet flange and the base of TMP Fixed only by the inlet flange of TMP
Description Rapid shutdown torque [N•m] (Note)
UTM300A-MS / UTM400A-MS 6,700
(Note)Rapid shutdown torque is the typical valve measured by the ULVAC KIKO’s test
condition. The torque to transmit to host equipment might be different according to the
rigidity of host equipment. Host equipment should be designed to have enough margins
in strength.
Fig. 5-3 Installation of UTM-MS series
Fig. 5-4 How to Use of the Bolt