Ulvac ULK-04A, Инструкция по эксплуатации

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SK00-4802-DI-002-04
No.16.10.20
36
No. Name
1 Plain washer: For M5
2 Hexagon socket head bolt M5 × 16
3 Hexagon nut: M5
4 Hexagon nut: M5 (ULK-14A only)
Hexagon socket head bolt M5 × 16
(ULK-10A only)
5 Plain washer: For M5
6 Cold cap support beam (C)
7 Cold cap support beam (B)
8 Pump case
9 Hexagon socket head bolt M5 × 16
10 Plain washer: For M5
11 Spacer
12 Cold cap
13 Spacer
No. Name
14 1st steam cylinder
15 Shim (1) (ULK-14A only)
16 2nd steam cylinder
17 Shim (2) (ULK-14A only)
18 Back-flow check ring assy
19 Cross-recessed round machine screw
20 Ejector protection ring
21 3rd steam cylinder
22 4th steam cylinder
23 Hexagon nut: M8
24 Plain washer: For M8
25 5th steam cylinder
26 Long bolt
27 Hexagon nut: M8 (2 nuts)
Figure 12: Exploded diagram of nozzle for ULK-10A, ULK-14A