SK00-4802-DI-002-04
No.16.10.20
18
(1) For a leak valve on the outlet port side with respect to this unit, install
as near the auxiliary pump as possible.
(2) Install a valve on the way to the auxiliary pump.
When stopping this unit, keep the inside of this unit in vacuum.
(3) Install a vacuum gauge on the way to the auxiliary pump in order to
monitor the back pressure.
Note that if the diameter of the piping is small or any foreign substances
adhere to the inside of the piping when making connection to the outlet
side, the back pressure of the pump may increase, causing trouble with the
pump operation.
Use an auxiliary pump that has sufficient pumping performance.
CAUTION
CAUTION
