SK00-4802-DI-002-04
No.16.10.20
26
4.3 Operation stop
(1) Turn off the power to the heater switch of the oil diffusion pump.
(2) Close the valves on the inlet (above this unit) and outlet (below this unit) sides.
If no valves are supplied, continuously operate the oil rotary pump for approx. 70 minutes until
the oil temperature becomes 150
℃
or lower.
(3) Stop the oil rotary pump Release the oil rotary pump to return to the atmospheric pressure.
(4) Turn off the heater switch. After 70 minutes, stop the cooling water.
Do not stop the cooling water because it may cause damage to the pump immediately after
the heater switch is turned off.
(5) If the operation stops and the ambient temperature becomes 5
℃
or lower, drain the water in
the cooling water system.
(Supply compressed air of 0.3MPaG (gauge) from the cooling water inlet port without stopping
the cooling water outlet port.)
If water is accumulated, it may be frozen and the cooling water pipe may be damaged.
During the operation the vacuum pump becomes high in temperature.
Even after it stops, do not touch the pump body and boiler cover until
they are cooled.
Provide protection to avoid surface contact as necessary.
Note that the heater and the internal jet take time to be cooled down.
To release air into the unit or the pump, make sure that it always enters
from the high vacuum side. Never make it enter from the outlet port
side.
To make air enter from the outlet port side unavoidably, slowly do it.
WARNING
CAUTION
