SK00-4802-DI-002-04
No.16.10.20
7
2.2 Performance specifications
Table 1 Performance specifications
Model
Specification
ULK-04A
ULK-06A
Oil
ULVOIL
D-11
ULVOIL
D-31
ULVOIL
D-11
ULVOIL
D-31
Pump Power*1
kW
0.55
0.73
0.90
1.2
Ultimate pressure
Pa
＜
2.6
×
10
-5
＜
2.6
×
10
-6
＜
2.6
×
10
-5
＜
2.6
×
10
-6
Maximum forepressure Pa
40
60
40
60
Evacuation speed
L/s
550
500
1200
1100
Maximum air outlet
volume
Pa
・
m
3
/s
0.086
0.13
0.15
0.20
Heating up time
min
9
8.5
16.5
15
Oil capacity
L
0.15
0.15
0.35
0.35
Water capacity
L/min
1.0
1.0
1.0
1.5
Standard backing pump
VD151,VD201,PVD-180,PVD360
VD30C,VD40C,VD60C
Model
Specification
ULK-10A
ULK-14A
Oil
ULVOIL
D-11
ULVOIL
D-31
ULVOIL
D-11
ULVOIL
D-31
Pump Power*1
kW
2.0
2.4
2.25
2.4
Ultimate pressure
Pa
＜
2.6
×
10
-5
＜
2.6
×
10
-6
＜
2.6
×
10
-5
＜
2.6
×
10
-6
Maximum forepressure Pa
35
40
30
30
Evacuation speed
L/s
3400
3000
5400
4900
Maximum air outlet
volume
Pa
・
m
3
/s
0.35
0.43
0.35
0.47
Heating up time
min
20
20
25
25
Oil capacity
L
0.8
0.8
1.5
1.5
Water capacity
L/min
2.5
3.0
2.5
3.5
Standard backing pump
PKS-030,PKS-016,VD90C,VS1501
PKS-030,VS1501,VS2401
*1: The power req
uires 1φ
-
200V or 1φ
-220V. Pay attention to a heater applicable to the voltage you
specified when purchasing is attached.
*2 Cooling water temperature: 19 to 25
℃
; Cooling water pressure: 0.1 to 0.3MPaG (gauge)
