SK00-4802-DI-002-04
No.16.10.20
24
4.2 Operation start
Check the following items again before operating the pump.
(1) Check that the piping and wire connections are complete.
(2) Leak check
The pump-specific leak check is performed by a helium leak detector.
The detectable minimum leak is 6.5 × 10
-11
Pam
3
/s (5 × 10
-10
Torr
･
L/s).
For leakage from the flange connections on the high vacuum side or the other parts, follow the
procedure below.
1. Check the presence of leakage with the helium leak detector.
2. If you do not have a helium leak detector, apply an organic solvent, such as a volatile
substance like alcohol, to the seal area and check the pressure variation on the ionization
gauge.
(3) Oil level check
Be sure to pour the specified amount of oil using a graduated cylinder etc. (See Section 3.2:
Oil filling.)
(4) Cooling water flow rate check
Check that the cooling water is flowing at a flow rate equal to or more than that shown in table
1.
In addition, check that no cooling water leakage occurs.
(5) Operation of auxiliary pump
Close the main valve and do the rough-pumping of the vacuum chamber, diffusion pump, and
connection piping to 13 to 1.3Pa (0.1 to 0.01 Torr).
(6) Turn on the power to the heater. If water cooling baffles, L-N traps, and valves are set at
the top of the inlet port of the oil diffusion pump in use, close the valves, supply cooling
water to the water cooling baffles and pour liquid nitrogen into the L-N traps.
(7) Check that a given flow rate of cooling water flows.
You may get burned. Do not touch the pump body and piping because
they become high in temperature during the pump operation.
WARNING
