SK00-4802-DI-002-04
No.16.10.20
16
(1) It is designed to cause no leakage under the specified condition and
water leakage tests have been done. However water leakage may
occur under abnormal conditions outside the specifications (such as
an abnormal increase in water pressure). In such a case, unless the
supply from the unit stops, the water leakage continues. Do not install
electrical equipment and wiring on the floor under or near the pump.
(2) It is recommended to install a water leakage sensor on the floor below
the pump and incorporate it into the interlock system of the unit.
If water leakage is detected, immediately stop the pump and close the
supply valve (HWSV) for cooling water.
After closing the valve, attach a "Closed" tag to the handle.
(3) Install a flowmeter to the cooling water supply source, such as the
unit, so that it can be visually checked that water flows and an
interlock can be installed in order to allow operators to check whether
the water flows.
3.4 Intake port pipe (Connection to vacuum chamber side)
(1) Thoroughly clean the inside of the vacuum chamber, piping, vacuum valves, etc. and then
connect to the pump. If it is connected under a dirty condition, the ultimate pressure becomes
higher or the time required for the pressure to decrease down to a given pressure becomes
longer.
Do not touch any part under vacuum by bare hands but wear clean nylon gloves.
(2) Remove the gaskets set on the inlet and outlet port flanges, lightly wipe them with a cloth
moistened with a solution, such as alcohol to remove dirt on the surface.
(3) Do not apply even grease with a low vapor pressure to the gasket surfaces.
Only wipe dirt off.
(4) Also wipe the gasket grooves on the flange and the corresponding flange surfaces with a clean
cloth.
(5) Set gaskets in place.
(6) Connect the inlet port with the piping using a JIS vacuum flange.
(1) If the pump suctions solid substances or moisture, such as dust and
fine powder, not only the ultimate pressure may deteriorate but also it
is broken down.
(2) For a leak valve on the inlet port side with respect to this unit, install
as near the vacuum chamber as possible.
CAUTION
CAUTION
