SK00-4802-DI-002-04
No.16.10.20
29
Use oil we specify. Use of oil other than those specified may cause the
pump performance to deteriorate or the life to be shortened.
6.2.1. Oil level
In oil replacement, be sure to pour the specified amount of oil using a graduated cylinder etc.
Model No. ULK-10A and ULK-14A are equipped with inspection windows.
Model No. ULK-04A and ULK-06A are not equipped with inspection windows.
6.2.2. Inspection of vacuum pump oil
The vacuum pump oil is not only contaminated by suction gas but also degraded gradually as
the temperature increases during the pump operation. Check the degree of dirt and the oil
condition, and replace oil periodically.
If the pump oil gets mixed with low-boiling substances (water, organic solvents, etc.) or if
sludge accumulates at the bottom of the pump case, the ultimate pressure is not recovered
even after replacement of oil and an overhaul is necessary.
6.2.3. Oil replacement
For ULK-04A,ULK-06A
Drain of working fluid
(1) After stopping the pump following Section 4.3, check that the pump and oil are at a normal
temperature again and then return the pressure in the pump to the atmospheric pressure.
(2) Prepare a container of approx. 0.5L.
(3) Pull out the nozzle in reference to Section 6.2.4.
(4) After pulling out the nozzle, set the pump case to a horizontal position and drain the
hydraulic fluid from the air inlet.
(5) Return the nozzle to the pump in reference to Section 6.2.4.
Oil filling
(1) Pour the specified amount of oil from the air inlet.
(2) If the given ultimate pressure is not obtained even after the oil is replaced, sediments
including sludge has accumulated in the pump case in some cases.
In such a case, an overhaul is necessary.
Please contact the nearest service center described at the end of this document.
CAUTION
