SK00-4802-DI-002-04
No.16.10.20
28
6. Maintenance/
Inspection
6.1 Maintenance
(1) During the operation, check the following items at least once every three days.
(2) Is the oil level sufficient? (See Section 2.2 Performance specifications.)
(3) Is the vacuum pump oil discolored?
(4) Does a specified amount of cooling water flow? (See Section 2.2 Performance specifications.)
(5) Is there any point of water leakage?
(6)
Is there an anomaly in the current value?
(See Section 2.2 Performance specifications.)
(7) Is there any anomaly in the ultimate pressure in the vacuum area higher than this unit, and in the
ultimate pressure of the auxiliary pump?
(8) Half once a year, please confirm that wiring and a terminal do not have the changes such as a
change of color, rust, the gossan.
6.2 Periodical Inspection
The inspection items depend on the use conditions of the vacuum pump but periodically check the
following items.
It is effective for avoiding defects or extending the pump life.
The pump stays at higher temperatures for a while after stopped, which
may get you burned.
Make sure that the pump body and piping is sufficiently low in
temperature before touching.
If it is used to exhaust hazardous gas, it goes without saying that not
only the pump body but also the pump oil will be toxic. Take due care.
Wear protective equipment, such as rubber gloves and protective
glasses.
Before starting the oil filling work, read "1.2 Material Safety Data Sheet"
in advance. In the event that the vacuum pump oil contacts your hands
or enters your eyes, follow the section about emergency measures in
the Material Safety Data Sheet.
CAUTION
WARNING
DANGER