SK00-4802-DI-002-04
No.16.10.20
22
4. Operation
4.1 Operational precautions
For the auxiliary pump, use one that has sufficient pumping capacity.
An extremely high back pressure may cause loss of the pumping
action of this unit, leading to a rise of oil (back-flow of oil) to the
vacuum chamber or defects in this unit itself.
Do not operate this unit with the outlet clogged or with any equipment
installed on the outlet side which prevents gas from passing. The
internal pressure (and back pressure) of the pump may increase,
causing the pump body and the oil filler and drain ports to burst.
This unit is not pressure-proofed. Do not pressurize under any
circumstances because it is dangerous.
Make sure that the valve for evacuation is open before evacuation.
Make sure that the back pressure and the pressure in the high vacuum
section are sufficiently low before operating this unit.
Be sure to supply water during the operation. The required amount of
cooling water is as follows:
・
Amount of cooling water
ULK-04A/D-11(0.55kW) : 1.0 L/min or more
ULK-04A/D-31(0.73kW) : 1.0 L/min or more
ULK-06A/D-11(0.9kW) : 1.0 L/min or more
ULK-06A/D-31(1.2kW) : 1.5 L/min or more
ULK-10A/D-11(2.0kW) : 2.5 L/min or more
ULK-10A/D-31(2.4kW) : 3.0 L/min or more
ULK-14A/D-11(2.25kW) : 2.5 L/min or more
ULK-14A/D-31(2.4kW) : 3.5 L/min or more
・
Cooling water pressure: 0.1~ 0.3MPaG
(Gauge pressure)
・
Cooling water temperature: 19 ~ 25
℃
WARNING
CAUTION
