Ulvac UK-2, Инструкция по эксплуатации

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Auto Regeneration Controller Model UK-2 Instruction Manual
Continued from previous page
Name Description
③
Operatio
n Step
Display
LED
HEATER START
Displays each operational step
（ See Fig. 8-1, 8-2, and 8-3. ）
N2 PURGE
WARM UP
ROUGHING
BUILD UP
COOL DOWN
20K(2ND)
HIGH VAC OK
④
Output
Status
Display
LED
BAND HTR Lights up when BAND HEATER is output
INN HTR Lights up when INNER HEATER (2ND HEATER and 1ST HEATER)
are output.
N2 IN Lights up when N2 IN VALVE is OPEN.
N2 OUT Lights up when N2 OUT VALVE is OPEN.
RV OPEN Lights up when ROUGH VALVE is OPEN.
CP ON Lights up when Cryopump is ON.
⑤
Local
Switches
UP/DN
Use it for setting the parameters. (See section 9.1)
ENT
REGEN
Use it when in Local operation mode.
（
See section 8.2
）
REMOTE
ALARM Resets the alarm.
ULVAC CRYOGENICS INCORPORATED
5