Ulvac UK-2, Инструкция по эксплуатации

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Auto Regeneration Controller Model UK-2 Instruction Manual
10. Troubleshooting
Table 10-1 Troubleshooting list (Error descriptions and corrective actions)
Display Class Description Possible Cause Corrective Action
_sb
A
Alarm will be output
when K thermocouple
(1st temperature) is
disconnected.
Miswiring of
K thermocouple.
Disconnecting
(breaking) of K
thermocouple wire.
Check that the wiring has
been done properly.
The sensor must be
replaced. Please contact our
customer service.
_Pi
A
Alarm will be output
when PIRANI GAUGE
sensor is disconnected.
Miswiring of sensor.
Disconnecting
(breaking) of
sensor.
Check that the wiring has
been done properly.
The sensor must be
replaced. Please contact our
customer service.
F_hb
A
Alarm will be output
when 1st HEATER line
is disconnected.
Miswiring of
HEATER.
Disconnecting
(breaking) of
HEATER.
Check that the wiring has
been done properly.
The heater must be
replaced. Please contact our
customer service.
S_hb
A
Alarm will be output
when 2nd HEATER line
is disconnected.
F_to
A
Alarm will be output
when 1st HEATER
energizing time (1Lt)
exceeds the set time.
The set time is too
short for energizing
time.
The sensor of
HEATER is not
rounded properly. g
The HEATER and/or
sensor of HEATER
are not grounded
properly.
Change energizing time in
accordance with your
cryopump specifications.
※
1
There is a possibility that the
refrigerator has been
damaged. Please contact our
customer service.
There is a possibility that the
heater has been damaged.
Please contact our customer
service.
E-to
A
Alarm will be output
when 2nd HEATER
energizing time (2Lt)
exceeds the set time.
ULVAC CRYOGENICS INCORPORATED
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