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R-2

ULVAC CRYOGENICS INCORPORATED

Содержание UK-2

Страница 1: ...n Manual Export Control Policy We recommend that ALL UCI customers be sure to follow all rules and regulations such as Foreign Exchange and Foreign Trade Law when exporting or reexporting UCI products D N MFUK200E 2018JE05 ULVAC CRYOGENICS INCORPORATED ...

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Страница 3: ... where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the personnel should be familiar with handling a cryopump in order to use it safely Since we offer a training session which is subject to fees as needed for people who use cryopumps for the first time please ...

Страница 4: ...owns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disasters such as fire earthquake flood lightning salt damage and so on environmental pollution irregular voltage and or usage of undesignated power source Breakdowns that are outside the terms of warranty C...

Страница 5: ...isplay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to give us information about the presence of the hazardous substance and or contaminant Also please be aware that we do not accept liability for damages by the contaminant which might be caused during tran...

Страница 6: ...sfer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the specification change and the improvement of the product 3 If you have any questions or comments on this document please do not hesitate to contact us The phone numbers of local customer support centers ...

Страница 7: ...could result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a risk of severe injury upon contact Corrosive chemicals used There is a risk of severe injury upon contact Flammable gas used There is a danger of fire or burn injury Explosive gas used There is a risk o...

Страница 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...

Страница 9: ... ordinance etc When it seems that the cryopump or refrigerator has been used to evacuate a toxic or dangerous material you must contact a safety supervisor before discarding and discard it after removing the poisonous material according to directions of the safety supervisor We will offer you Material Safety Data Sheet called MSDS of our products upon your request If you have any questions please ...

Страница 10: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...

Страница 11: ...ion 6 Section 4 DIP Switch Specifications 11 Section 5 Accessories and Optional Cables 12 Section 6 Installation 15 6 1 Installation method 15 Section 7 Wiring 16 Section 8 Operation 22 8 1 Remote Operation 22 8 2 Local Operation 22 Section 9 Parameter Setting 26 9 1 Parameter Setting method 26 9 2 Factory Setting 27 Section10 Troubleshooting 29 Appendix 1 UK 2 External Drawing 32 ULVAC CRYOGENICS...

Страница 12: ...Operation Flow Chart 24 8 3 Mode 3 COOL DOWN Operation Flow Chart 25 Table 3 1 Part Names and Descriptions Front panel 4 3 2 Part Names and Descriptions Rear panel 6 3 3 Connectable Plugs and Pin Descriptions 7 3 4 SYSTEM I F Connection Pin Descriptions 9 3 5 Serial Communication RS I F 10 4 1 DIP Switch Descriptions 11 5 1 UK 2 Accessories 12 5 2 Optional Cables 13 9 1 Parameter factory Setting 2...

Страница 13: ...BAND HEATER Not necessary H INNER HEATER Not necessary I COMPRESSOR UNIT Three regeneration modes below are available to operate UK 2 Mode1 FULL REGEN Cryopump warm up Rough pumping Cooldown See Fig 8 1 Mode2 WARM UP Cryopump warm up Rough pumping See Fig 8 2 Mode3 COOL DOWN Cooldown only See Fig 8 3 The 1st and the 2nd stage temperatures and pressure of cryopump will bedisplayed on the 7 segment ...

Страница 14: ...f the INNER HEATER is AC100V Power consumption MAX 100W Except for the power consumption of heater Operation Environment Temperature 10 50 No freezing Humidity Below 80 RH No condensing Altitude 1000m or lower Input 1ST TEMP The 1st stage temperature of cryopump K thermocouple input 2ND TEMP The 2ND stage temperature of cryopump MBS C ANALOG input 0 5V PIG CRYOPUMP inner pressure PIRANI GAUGEinput...

Страница 15: ...ore Withstand Voltage Between power source terminal and earth terminal AC 1000V min Display 1ST TEMP 3 digit Display range 45K 350K Display accuracy 350K 123K 0 5 FS 123K 73K 3 FS 73K Out of K thermocouple accuracy range 2ND TEMP 4 digit Display range 10 0K 350 0K Display accuracy 0 5 FS PIG 4 digit Display range 4 0E 01 3 0E 03 Pa ULVAC CRYOGENICS INCORPORATED 3 ...

Страница 16: ...splays the pressure inside the cryopump When Alarm is activated Displays alarm code See section 10 Status Display LED R T Lights up when the 2ND TEMP and or 1ST TEMP exceedeach 2rt and 1rt set value 300K READY Lights up when the 2ND TEMP and or 1ST TEMP become lower than each 2rd and 1rd set value 300K HIGH Lights up when PIG pressure exceeds the hP set value 67Pa LOW Lights up when PIG pressure b...

Страница 17: ...lay LED BAND HTR Lights up when BAND HEATER is output INN HTR Lights up when INNER HEATER 2ND HEATER and 1ST HEATER are output N2IN Lights up when N2 IN VALVE is OPEN N2 OUT Lights up when N2 OUT VALVE is OPEN RVOPEN Lights up when ROUGH VALVE is OPEN CP ON Lights up when Cryopump is ON Local Switches UP DN Use it for setting the parameters See section 9 1 ENT REGEN Use it when in Local operation ...

Страница 18: ...the HEATER SOURCE INPUT double as INNER HEATER output power source and the capacity of the INNER HEATER is AC100V BAND HEATER BAND HEATER input and output AC200 220V 10 MAX15A SENSOR INPUT 1ST TEMP and 2ND TEMP PIRANI GAUGE input ATM DC24V output For MBS C PIRANI GAUGE input power ATM input SYSTEM I F I F for remote operation from the equipment COMP I F I F for the Compressor VALVE N2 IN OUT VALVE...

Страница 19: ...e of connectable plug Pin No Description SOURCE INPUT VM0303B HIRAKAWA HEWTECH CORP L AC100 220V Input AC100V input when using INNER HEATER N E BAND HEATER Round crimping terminal φ4 Terminal width MAX8 1mm R AC200 220V input S U Band Heater output AC200 220V MAX 15A V SENSOR INPUT BL3 5 8F Weidmuller 1 K thermocouple input 2 K thermocouple input 3 MBS C analog input 4 MBS C analog input 5 PIRANI ...

Страница 20: ...2A 4 5 COMP ON ANS 6 N C 7 COMP ALARM 8 COM 9 N C VALVE BL3 5 9F Weidmuller 1 N2 IN VALVE Relay contact output AC240V MAX 2A 2 3 N2 OUT VALVE Relay contact output AC240V MAX 2A 4 5 N C 6 ROUGH VALVE Relay contact output AC240V MAX 2A 7 8 N C 9 N C HEATER BL3 5 4F Weidmuller 1 INNER HEATER 2ND output AC100V MAX2A 2 3 INNER HEATER 1ST output AC100V MAX2A 4 RS I F Round crimp terminal M3 terminal wid...

Страница 21: ... 3 for timing 5 RGN RESPONSE 1 During regeneration each signal changes to L level or H level in each mode 1 2 Mode1 FULL REGENE L L Mode2 WARM UP L H Mode3 COOL DOWN H L 6 RGN RESPONSE 2 7 CP ON ANS L level 1 when cryopump is in operation 8 HEATER ON ANS L level 1 when HEATER is ON 9 ALARM L level when UK 2 is in normal operation Changes to H level 1 when alarm has been activated Logic can be chan...

Страница 22: ...nd turn it OFF 15 17 19 25 N C Do not connect １ L level means that the transistor for open collector output is ON establish electrical continuity H level means that the transistor for open collector output is OFF break electrical continuity Terminal No RS 485 Standard RS 232C Optional 1 TXD TXD 2 TXD 3 RXD RXD 4 RXD 5 FG FG 1 Standard UK 2 is equipped with RS 485 Please contact our sales represent...

Страница 23: ... DIP Switch Descriptions 1 No 9 and No 10 will not be used when serial communication is RS 232C 1 No 9 and No 10 will not be used when serial communication is RS 232C No No Item Item OFF OFF ON ON 1 Prohibit panel control Operable Prohibited 2 Prohibit parameter change Operable Prohibited 3 BAND HEATER connection Connected Not connected 4 Cheesing Compressor type C10series C15series C30series 4 OF...

Страница 24: ...customers Table 5 1 UK 2 Accessories No Device Model Appearance Manufacturer Application Quantity Power cable UK2 HS02 ＳＲＥ UlVAC CRYO SOURCE INPUT 1 Connector BL3 5 8F BL3 5AH8SW ＢＬ３５ＡＨ８ Weidmuller SENSOR INPUT 1 Connector BL3 5 5F BL3 5AH5SW ＡＨ５ＢＬ３５ Weidmuller ATM 1 Connector BL3 5 9F BL3 5AH9SW ＢＬ３５ＡＨ９ Weidmuller VALVE 1 Connector BL3 5 4F BL3 5AH4SW ＡＨ４ＢＬ３５ Weidmuller HEATER 1 Connect...

Страница 25: ...２ＡＨ５ＢＬ３５ＢＬ３５ＡＨ８Ｎ２４ＡＴＭＡＴＭＰＩＧＭＢＳＡＮＡＵＫ２ＨＳ２０ｍＭＢＳＰＷＲＭＢＳＫＣＡＵＫ２ＨＳ２０ｍ and in Table 5 1 will not be attached VALVE Cable UK2 HS91 ＢＬ３５ＡＨ９ＵＫ２ＣＮ１１ＶＡＬＶＥＵＫ２ＨＳ９１ｍＲＳＮ２ＯＵＴＲＳＲＯＵＧＨＶＡＬＶＥＰＷＲＲＳＲＳＮ２ＩＮ in Table 5 1 will not be attached 1 BAND HEATER Cable UK2 HS51 or UK2 HS52 UK2 HS51 For RBH6 14 UK2 HS52 For RBH16 30 ＶＵ 2 INNER HEATER Cable CR HS50 ２ｎｄＨＥＡＴＥＲ２ｎｄＨＥＡＴＥＲ ...

Страница 26: ... UK 2 Instruction Manual 14 ULVAC CRYOGENICS INCORPORATED Continued from previous page No Name Model Appearance Note SYSTEM I F Cable UK2 HS40 in Table 5 1 will not be attached MBS C Compatible Cable GP HM30 ＨＡＲＴＩＮＧ Necessary for MBS C ...

Страница 27: ... dew point Where highly intense vibration or impact is generated or transferred Near high voltage power lines or where inductive interference can affect the operation of the product 6 2 Installation method Referring to panel cut dimensions of Figure 6 1 machine the mounting holes Insert UK 2 firmly from the front panel and then fix it with four screws M4 Note that if you cut taps from the panel lo...

Страница 28: ...d Especially for K thermocouple use the compensation lead wire with shield which is effective for electric noise Ensure to wire MBS C POWER properly If it is not wired correctly it may result in the breakage of MBS C CAUTION Conduit Requirements for UK 2 wiring To prevent interference during the operation there should be a separate conduit for each signal line control line and AC power line Especi...

Страница 29: ...ing be sure to use soldering iron and tip that are lead free use ONLY Also DO NOT mix the lead free solder with the lead eutectic solder It may decrease the lifetime of soldering connection CAUTION It is recommended to indicate the type of soldering for appropriate maintenance The character strings listed below are recommended indication for each soldering Lead eutectic solder SnPb or SP Lead free...

Страница 30: ...5sq 6C VALVE S R N2 IN VALVE N2 OUT VALVE ROUGH VALVE N C N C 3 2 4 5 1 1 3 4 5 2 6 7 8 0 5sq 10C SENSOER Cable I O K CA 14 6 10 2 Ｐ INPUT SENSOR ATM DC 24V 1ST TEMP 2ND TEMP PIG 15 FG SENS DC24V DC24V 8 9 1 PIRANI GAUGE MBS C ATM CRYO PUMP B1 B2 N C N C 9 2 3 4 5 6 7 1 8 C30series C15series C10series 2 10 11 1 9 8 16 15 5 6 3 1 2 1 7 8 9 6 10 11 COM COM COM COMP I F COMP ON COMP ON COMP ON ANS CO...

Страница 31: ...NNECTION ＣＲＹＯＭＥＴＥＲＭＢＳＣ GRN ON 20K ＳＲＳＲ HEATER S R N C V U N C N C N C RS I F BAND HEATER SW ATM 910 12 3 4 56 7 8 I D VALVE COMP I F SENSOR INPUT SYSTEM I F SOURCE INPUT ＢＬ３５ＡＨ９ＢＬ３５ＡＨ８ＢＬ３５ＡＨ５ AC 220V 15A MAX HEATER POWER SOURCE POWER ＴＯＳＹＳＴＥＭＡＴＯＳＹＳＴＥＭＢＢＬ３５ＡＨ４１ｓｔＨＥＡＴＥＲ１ｓｔＨＥＡＴＥＲ２ｎｄＨＥＡＴＥＲ２ｎｄＨＥＡＴＥＲ 1 2 1 N C 2 N C 3 N C 1 Red 3 Black 2 Black 1 Red 3 Red 2 Black ＢＡＣＤＥ ...

Страница 32: ...Model or Specification Manufacturer Quantity Note 1 Pin contact LLM 01T P1 3E JST 9 Attached to UK2 HS91 UK2 HS20 optional cables 2 EL Connector Receptacle ELR 03V JST 4 Necessary tools No Tool name Image Model or Specification Manufacturer Quantity Note 1 Crimping tool YC 202 or equivalent JST 1 2 Wire stripper For AWG20 1 Crimping procedures Strip the electrical insulation from a wire for 4 or 5...

Страница 33: ...ent of VALVE and ATM Figure 7 3 Connector pin assignment of VALVE and ATM ROUGH VALVE CRYO PUMP 2 黒赤 1 白 3 2 1 2 1 3 1 3 赤黒赤 3 黒 2 赤黒 ROUGH 大気圧確認器 ATM N2 OUT ATM N2 IN N2 IN VALVE VALVE N2 OUT 1 1 1 Atmospheric sensor R B 1 Twist the wires as much as possible Fix the cable as the image below to prevent wire ends from getting any stress or pressure when the cable is pulled W B R R B B R B Black R...

Страница 34: ... off It will move to manual operation mode Hold down key for 1 second key LED lights up Use keys to select an operation mode referring the table below LEDs flash as described below in each mode Operation Mode Mode 1 Mode 2 Mode 3 None Flashing LED HEATER START WARM UP BUILD UP ROUGHING N2 PURGE COOL DOWN 20K 2ND HIGH VAC OK HEATER START WARM UP BUILD UP ROUGHING N2 PURGE COOL DOWN 20K 2ND HIGH VAC...

Страница 35: ...OSE N2 OUT VALVE CLOSE ROUGH PUMP ON １ Press _LP 40Pa NO ROUGHING BAND HEATER OFF INNER HEATER OFF ROUGH VALVE CLOSE Build UP Test 5min Press hP 67Pa NO YES YES ROUGH VALVE OPEN Press _LP 40Pa CRYO PUMP ON ROUGH PUMP OFF YES NO WAIT TIME Up tt 0 999min NO YES HI VAC OK Mode1 END COOL DOWN 20K 2ND HI VAC OK 5sec TIMER ROUGH VALVE OPEN 1ST TEMP _1rd 130K and 2ND TEMP _2rd 20K ROUGH VALVE CLOSE ２２１...

Страница 36: ...URGE TIME Up Pgt 0 999min NO YES Press _LP 40Pa NO ROUGHING Delay 5sec ROUGH VALVE OPEN １ N2 OUT VALVE CLOSE ROUGH PUMP ON N2 IN VALVE CLOSE WARM UP N2 PURGE ２ YES ROUGH VALVE CLOSE Build UP Test 5min Press hP 67Pa NO YES ROUGH VALVE OPEN Press _LP 40Pa Mode2 END ROUGH PUMP OFF ROUGH VALVE CLOSE ２ INNER HEATER OFF BAND HEATER OFF Mode2 START １ LED STATUS HEATER START BUILD UP Figure 8 2 Mode 2 WAR...

Страница 37: ...UGH VALVE CLOSE ROUGH PUMP OFF ROUGH PUMP ON ROUGH VALVE OPEN ROUGH VALVE CLOSE Build UP Test 5min Press hP 67Pa NO NO NO YES Press _LP 40Pa BUILD UP YES YES NO WAIT TIME Up HI VAC OK YES Mode3 END HI VAC OK tt 0 999min 20K 2ND NO 1ST TEMP _1rd 130K and 2ND TEMP 2rd 20K CRYO PUMP ON COOL DOWN Figure 8 3 Mode 3 COOL DOWN Operation Flow Chart ULVAC CRYOGENICS INCORPORATED 25 ...

Страница 38: ...value Use keys to select the parameter and press key 1ST cell flashes Use keys to change the set value Press key to determine the set value 2ND cell flashes Hold down key for 1 second to close the parameter setting mode Key Description In parameter setting mode it is used to increase the set value Hold down the key for 1 second and it will take you to parameter setting mode In parameter setting mo...

Страница 39: ...GE TIME Time for purging N2 after warm up 0 999 5min _tt WAIT TIME Wait timer after cooldown has been completed 0 999 10min _hP HI PRESS The highest limit of pressure that a Cryopum can be started 1 99 67Pa _LP LOW PRESS The lowest limit of pressure that a Cryopum can be started 1 99 40Pa _2ot 1 The temperature at which 2ND HEATER turns ON 10 350 150K _2Pb 1 Proportional band of 2ND HEATER 1 1 100...

Страница 40: ...s not used 2 Heater maximum energizing time When heater is energized more than the set value an alarm will be activated Recommended set values Pump size Set time 8 inch 45 min Pgt 12 inch 80 min Pgt 16 inch U16P 150 min Pgt 16 inch other than above and larger size U16HSP U16HSPL 240 min Pgt 28 ULVAC CRYOGENICS INCORPORATED ...

Страница 41: ...b A Alarm will be output when 1st HEATER line is disconnected Miswiring of HEATER Disconnecting breaking of HEATER Check that the wiring has been done properly The heater must be replaced Please contact our customer service S_hb A Alarm will be output when 2nd HEATER line is disconnected F_to A Alarm will be output when 1st HEATER energizing time 1Lt exceeds the set time The set time is too short ...

Страница 42: ... set temperature 340K Heat input from heater and or other heat sources Cut off all heat sources immediately ALARM CLASS Description Ｓ１ Requires repair System stop Requires adjustment service Ｓ２ Requires resetting System stop Requires user setting Ａ Severe failure Stops full output Outputs ALARM Ｂ Minor failure Continues outputting Outputs ALARM Table 10 2 Troubleshooting other errors Display Class...

Страница 43: ...neration Controller Model UK 2 Instruction Manual CAUTION Maintenance and repair must be perfprmed only by qualified maintenance personnel DO NOT remove the cover of the product ULVAC CRYOGENICS INCORPORATED 31 ...

Страница 44: ... DOWN 20K 2ND REMOTE ALARM ENT DN REGEN LOW UP Pa HIGH VAC OK 99 50 24 5 300 2 3 17 5 CONTROLLER REGENERATION UK 2 240 220 FRONT VIEW SIDE VIEW HEATER POWER SOURCE POWER HEATER S R N C V U N C N C N C RS I F BAND HEATER AC 220V 15A MAX SW ATM ID VALVE COMP I F SENSOR INPUT SYSTEM I F SOURCE INPUT REAR VIEW 99 ON １１０９８７６５４３２ 200 UK 2 100 220V 10 5A 50 60Hz 3 0 kg ULVAC CRYOGENICS INC MADE ...

Страница 45: ...a Chigasaki Kanagawa 253 0085 Japan Sales Tel 81 467 85 8884 Service Engineering Division Tel 81 467 85 9366 Fax 81 467 83 4838 ULVAC CRYOGENICS KOREA INC www ulvac cryo co kr 107 Hyeongoksandan ro Cheongbuk Myeon Pyeongtaek si Gyeonggi Do Korea 17812 Tel 82 31 683 2926 Fax 82 31 683 2956 ULVAC CRYOGENICS NINGBO INC www ulvac cryo com No 888 Tonghui Road Jiangbei District Ningbo China 315020 Tel 8...

Страница 46: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...

Страница 47: ...st edition New format P 1 2 Specifications Correction of the voltage of input power source P 15 16 The latest Wiring diagram Introduction has been revised SERVICE NETWORK has been revised Full fledged revision Full fledged revision P 13 Correction has been made on Table 5 2 Optional cables Introduction has been revised SERVICE NETWORK has been revised SERVICE NETWORK has been revised ULVAC CRYOGEN...

Страница 48: ...Revision This page intentionally left blank R 2 ULVAC CRYOGENICS INCORPORATED ...

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