Ulvac RFS-13100F, Инструкция по эксплуатации, Страница: 61 / 74

F Power Supply and Matching Box
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6-2. Matching box maintenance and inspection
The matching box inspection should be performed about once every six months and cover the items
listed below.
Is water leaking from the water-cooled coil?
Look at the water-cooled coil connector. Is the inside of the pipe clogged?
Has the tip of the water-cooled coil connector disappeared?
Has dust accumulated inside the matching box?
The matching box contains the kinds of consumable parts and parts that require regular maintenance
listed below. In order to use the product for many years to come, we recommend you periodically
replace these parts or overhaul the product.
Table 6-2 Matching box recommended replacement parts
No. Part name Periodic maintenance -
Recommended replacement
period Comments
1 Cooling fan 4 to 5 years
2 Vacuum variable
capacitor 3 to 4 years 1 million cycles at 50% variability (bellows
lifespan)
4 million cycles at 30% variability
3 Cooling pipe 5 to 7 years
(Basically, handled by internal
washing) The cooling pipe may clog because of the
water quality.
4 Motor 5 to 7 years
5 Potentiometer 3 to 4 years
6 Gear 3 to 4 years
7 Coupling 3 to 4 years
Table 6-3 Matching controller recommended replacement parts
No. Part name Periodic maintenance -
Recommended replacement
period Comments
1 Switching power
supply 3 to 4 years Power supply for internal device control
* The recommended replacement period is not a guarantee of a product's lifespan. The rate of
consumption of these products may also greatly differ according to the frequency of device usage.
Figure 6-1. Coil inspection point
Check if the
water inlet tip has
decreased.