Ulvac RFS-13100F, Инструкция по эксплуатации, Страница: 51 / 74

RF Power Supply and Matching Box 5. Operation
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MATCH [ 10% ] TUNE [ 90% ]
[ PRESET-1 ] [ 1 ]
MATCH [ 10% ] TUNE [ 90% ]
[ PRESET-1 ] [ 1 ]
MATCH [ 50% ] TUNE [ 50% ]
[ PRESET-1 ] [ 1 ]
3)-1 Recall operation
During manual mode, press the "ENT" key on the variable capacitor position display screen to
display the function selection screen.
(Function selection screen)
Point the cursor to REC and press the "ENT" key to display the preset selection screen.
(Preset load screen)
Select the preset number and press the "ENT" key to move the positions of the variable capacitors.
3)-2 Preset configuration
In manual mode, move the variable capacitors to the positions you wish to register.
Afterward, press the "ENT" key on the variable capacitor position display screen to display the
function selection screen.
(Function selection screen)
Select PRESET to display the preset configuration screen.
(Preset configuration screen)
Select the number you wish to register (1 to 16) and press the "ENT" key to display the set preset
name screen.
(Set preset name screen)
OPERATION SELECT
A・REC <REC> PRESET
OPERATION SELECT
A・REC REC <PRESET>