
RF Power Supply and Matching Box
Introduction
iv
3. No charge repair provisions
No charge repair provisions
1. This instrument has been shipped after undergoing an extensive in-house inspection. However, in the event a failure
occurs that ULVAC Inc. is responsible for, such as a manufacturing defect or accident during shipment, please inquire
with the ULVAC Inc. The product will be repaired or replaced at no charge.
2. Subject to warranty
1) RF power supply unit
2) Matching box
3) Automatic matching controller
3. Warranty period
1) Domestic transaction: 1 year from date of shipment from ULVAC
2) Direct export transaction: 1 year from receiving B/L
4. Warranty range
1) Products damaged by problems during delivery, shipping. However, for direct export transactions, pursuant
to the warranty range stipulated in the latest Incoterms.
2) Products that do not meet basic specifications even though they are being used within usage conditions,
such as the usage temperature range and usage power supply
5. Response method
1) For domestic transactions
①
ULVAC will send a replacement product, or you will return the product to ULVAC or the nearest ULVAC
service center where it will be repaired.
②
If an on-site response is required, consult separately with ULVAC, Inc.
2) For direct export transactions
ULVAC will send a replacement product, or you will return the product to ULVAC or the nearest ULVAC
service center where it will be repaired. Return shipping expenses are borne by the customer.
6. Warranty disclaimer
1) Products that have exceeded the warranty period
2) Malfunction or failure caused by natural disasters like fire, wind and flood damage, earthquakes, lightning,
and others, or disasters from force majeure events such as war
3) Malfunction or failure caused by inattention during handling or mistaken usage
4) Products modified, disassembled, or repaired without ULVAC's approval
5) Malfunction or failure from abnormal environments (strong magnetic fields, radiation environments, high
temperatures, high humidity, flammable gas atmospheres, corrosive gas atmospheres, dust, etc.)
6) Malfunction or failure from electronic noise
7) Secondary damage, process patents, and/or products manufactured by your company using this
equipment that occur from a product defect
8) When a defect is judged by ULVAC technicians to have occurred because usage did not meet the product's
usage conditions
9) Consumables (consumable parts are listed in "Chapter 6. Maintenance".)
10) When malfunction or damage occurs from mishandling in transport/moving after delivery
11) When replacement is necessary because of the lifespan of parts used
12) When parts cannot be procured because the parts used have stopped being produced
13) Lighting surge/when applying voltage outside the input variation range (including applying spike
voltage/during momentary power losses)
7. Others
1) When an individual contract or memorandum related to specifications exists separately from this document,
the warranty conforms to that content.
2) For questions or consultations about the product, first check the product's model and serial number, then
contact the ULVAC, Inc
3) The contents of this document are subject to change without prior notice.
4) Unless otherwise indicated, parts replaced during repair are the property of ULVAC Inc.
*1 Please note that the lending of replacement equipment during the repair period and dispatch repair
*2
will
incur separate expenses.
*2 For on-site dispatch repairs, the actual expenses billed are the expenses related to the trip (travel
expenses).
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