Ulvac RFS-13100F, Инструкция по эксплуатации, Страница: 46 / 74

RF Power Supply and Matching Box 5. Operation
38
Fw : 0.00/1.01 kW
Re : 0 W
Fw : 0.00/0.91 kW
Re : 0 W
Fw : 1.01/1.01 kW
Re : 0 W
Fw : 1.01/1.01 kW
Re : 0 W
Press the left key to move the cursor position to the left.
If there is no value in the destination, the following occurs.
0
→
10
(Power settings screen)
Press the down key and the set value at the digit where the cursor is displayed will get smaller.
(Power settings screen)
When that digit becomes 0, the digit is automatically borrowed. If the down key is continuously
pressed, the value goes:
900
→
800 ... 100
→
90 ... 10
→
9 ... 1
→
0
in that order. The lower limit of the set value is 0. The upper limit is the rated value. If the value
exceeds the limit, the buzzer (long sound) sounds and the value is ignored.
Press the "RESET" key while configuring to set the value to 0[W]. Press the "ENT" key to confirm the
set value and RF output operation will become possible. Press the "ENT" key once again and the
settings can be reconfigured.
Press the "ENT" key during operation and the cursor will appear. The RF output settings can be
changed during operation. The actual output is controlled simultaneously with each change.
Press the "ENT" key once again and the cursor will disappear and the set value is confirmed.
Move the cursor and change the set value.
(Power settings screen)
Press the "ENT" key and the cursor disappears.
(Power settings screen)
5-1-3. Remote operation method (external control)
1) Operation mode menu
To change the operation mode, press the "ESC" key several times to display the configuration screen,