Ulvac RFS-13100F, Инструкция по эксплуатации, Страница: 34 / 74

RF Power Supply and Matching Box 4. Functions
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4-1-6. RF power supply parameters
How to start the configuration menu
On the operation mode selection screen, simultaneously press the "ESC" key and "ENT" key for 3
seconds or more to open the configuration menu.
(Operation mode selection screen)
* METER CALIBRATION
START PULSE
(Configuration menu)
You can select the item to change by pressing the up and down keys on the configuration menu
screen.
(The selected item has the "*" symbol.)
You can change the parameter by pushing the "ENT" key on the selected item.
Return to the parent menu by pressing the "ESC" key.
Return to the operation mode selection screen by pressing the "ESC" key on the configuration menu
screen.
Item Default
value Comments
METER CALIBRATION Do not
execute Power calibration menu
After selecting <EXECUTE> and setting calibration
power, power calibration is available with the up/down
keys.
(Within 5% of rated power)
Selecting <DEFAULT> returns the value to the factory
default.
START PULSE Do not
execute Not configurable
SOFT START SOFT START TIME
SET (RISE) 0.0 (s) Soft start time. Set the rise time until the rated power.
When the power setting is low, rises in a shorter time
than the set value.
SOFT START TIME
SET (FALL) 0.0 (s) The power down time setting when reducing power
during RF ON.
The time from the rated power until 0 W.
ARCING ARCING COUNT
SET 0 CNT Sets RF OFF as ALARM when the set number of arcs
is detected.
If 0 CNT, does not set RF OFF. (Also does not send
ALARM)
RESTART TIME SET 10 ms Internal arcing shut off pause time
RECOVER SOFT
START 0.0 (s) Soft start after internal arcing pause time
RF OPERATION SELECT
<PANEL> SERIAL ANALG
Table 4-6 RF power supply parameters