Ulvac RFS-13100F, Инструкция по эксплуатации, Страница: 58 / 74

RF Power Supply and Matching Box 5. Operation
50
Warning
Be careful of withstand voltage and withstand current when inserting a capacitor in parallel
to the load.
A fixed capacitor is a precision instrument. Shocks from falls or excessive stress may
damage it.
Please install it without excessive stress such as bending or twisting it. Excessive tightening
torque may also damage it. Please tighten to a tightening torque of 147 N/cm or lower.
5-3-4. Adding a fixed capacitor
When Pr is at its minimum, it will be necessary to add a fixed capacitor if the position of the MATCH
variable capacitor is within 0% to 100% and the TUNE variable capacitor is near 0% or 100%. In this
case, add a capacitor as described next. Similar to adjusting the number of coil turns, open the
maintenance side and add a fixed capacitor. Then make sure screws aren't loose and close the
maintenance side.
Recommended fixed capacitor to install inside the matching box (the fixed capacitor connected in
parallel with the TUNE variable capacitor)
MC1C series
* Fixed capacitor types may be changed without prior notice because of production stoppages or
other reasons.
* Shocks from falls or excessive stress may damage the fixed capacitor. Excessive tightening torque
may also damage it. Please tighten to a tightening torque of 147 N/cm or lower.
About the MATCH value
Adjust the MATCH variable capacitor by increasing or decreasing the coil's short circuits so that the
capacity is 20% to 80% when Pr is at its minimum.
About the TUNE value
Install inside the intermediate box. Install in the fixed capacitor mounting stay
inside the matching box.
Figure 5-7 Adding a capacitor